Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !4 y e !1 !2 @3 @1 q !4y e !1 !2q @1 CXSL20 to 32 @0 !5!6@3@4r!

Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

CRBU

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. Component Parts Note No. q w e r t y u i o !0 !

Air Slide Table Series MXP

6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Series AP500

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

HRL

Select the proper size of cable according to an actual condition. 5 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Operation Display Panel Items displayed on the home screen and setting items are shown in List of check items in inspection monitor menu. w q e r o !0 !1 !2 !3 !4 t y u i !5 !6 !7 !8 !

REA/REB

9 @1 q !5 !4 y i !0 !6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

High Purity Chemical Valve

Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

Air Cylinder

5/64 3 3/4 1.57 3/8-24 1.18 1 4 11/16 2.76 1/2 5/8 2 1-14 1 5/8 1 1/4 6 1/4 4 1/4 4.7 1 5/8 2.59 2.72 400 (4") 1 3/8 7/16 5/8 0 1 1/2 6 5/64 4 1/2 1.57 3/8-24 1.18 1 5 7/16 3.32 1/2 5/8 33 Series NCA1 Medium Duty Air Cylinder Oversized Rod Rear Flange Mounting Type NC A1G (XB5) Y P + Stroke AA FA 4-FB (Hole) C 2-EE (NPTF) D Across Flats KK Q Width Across Flats KK Bore 200 250 325 400 Q 3

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q

CXWM/CXWL

6 !7 !8 !

Slide Unit Series CX2/CXWM/CXWL

6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

Slide Unit Series CX2/CXWM/CXWL

6 !7 o !0 @1 @2 @3 @0 e q t y u i r w !1 !8 !9 CX2N15, 25 q w e r t yu i o !0 @1 @2 @3 !2 !4 !5 !6 @0 !3 !7 Description Material Note Parts List Description Material Note Parts List No. No.

MQQ

6 r t !3 w q e RE A B REC CX CY !5 !0 !1 !2 u y i o MQQ M RHC MK(2) Material Note Component Parts RS Q G No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

MQQ

6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

Modular Type Filter Regulator Series AW

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

MNB

9i @2 q r @8#9 $0 $2 w $3 #8 @9 A C B !3 !4 #4 $1 e$8 o $7 !1@1 !6 @5 u !0 $6#6#5 $4 y#8 @6 #3 Section B Section C Section A !2 !2 #1 #0 !2 32 100 80 63 50 40 80, 100 80, 100 Parts list Parts list No. No.