CHKD/CHKG

Rod end male threads (mm) (mm) Bore size (mm) Bore size (mm) a b c e f Lg Lh M P Q R X1 Y1 Z ZZ S SS 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 43 1/8 16.5 6 11.5 10.5 15 7.5 58 73 12.5 15 M10 x 1.25 6 10 33 91 49 1/8 17 8 12 10.5 15 7.5 60 75 15.5 18 M12 x 1.25 6 12 36 96 63 1/4 19.5 10 19.5 11 16 8 72 88 22 25 M16 x 1.5 7 14 44 116 71 1/4 21.5 10 21.5 13 20 10 85 105 27 30 M20 x

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

MXF

Body through-hole 1. Body tapped Stroke (mm) Model Reed switch D-A9, D-A9V 10 20 30 50 75 100 MXF8 8 Solid state switch D-M9, D-M9V MXF12 12 2-color indication solid state switch D-F9W, D-F9WV MXF16 16 MXF20 20 8-6-1 2 Low Profile Slide Table Series MXF 8, 12, 16, 20 How to Order MXF 12 50 M9N S Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

ZB-OM00301

() 0.005MPa5kPa4 1000 P28 31 - No.ZB-OM00301 -550 2/ 1 30m/s 2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

Compact Guide Cylinder

Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Number of auto switches Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9V 1 5 2 5 D-M9 1 5 Note 1) 5 2 10 Note 1) 10 D-M9W 1 5 Note 2) 2 10 Note 2) 10 D-M9WV D-M9AV 1 5 Note 2) 2 10 D-M9A 1 5 Note 2) 2 10 Note 2) Note 1) Confirm that it is possible

Smooth Vent Valve

Service life cycles (10 thousand) Operating pressure (Pa) Leakage (Pam3/s) Effective area (mm2) Model Valve type Piping size Orifice (mm) Internal External Fitting P.523 For VCR 1.3 x 10-11 XVD2-02V 50 0.2 MPa (G) to 1 x 10-6 5 x 10-9 1.3 x 10-11 Single acting (N.C.) 1/4 3 Main air supply: 4.6 Initial air supply: 0.2 to 4.6 Values at normal temperature, excluding gas permeation to For Swagelok

CUJ

Bore size (mm) Piano wire u Return spring CUJB4-S-PS 4 Sintered metallic BC i Bronze element CUJB6-S-PS 6 Set of nos. above !1 and an exclusive grease pack. o Magnet CUJB8-S-PS 8 Steel Nickel plated !0 Rod end nut CUJB10-S-PS 10 NBR !1 Piston seal NBR !2 Rod seal NBR !

Refrigerated Air dryer Series IDU/IDF

to 220VAC (60Hz) Model 3D 4D 6D 8D Note 1) Single phase 200 to 240VAC is "S" specification standard.

S Couplers

87.3 552.8 KKA9P-10F Rc 1 107.8 986.9 -12F 1 1/4 Rc 1 1/4 24.6 332.1 49.1 110.1 925.6 55 -14F Rc 1 1/2 110.1 848.2 346 KKA Series S Couplers Dimensions/Socket (S) With check valve Male thread type (mm) Body size H Width across flats T Connection port size Weight g Effective area mm2 L Min. bore size A Model D KQ2 KKA3S-01M R 1/8 38.5 34.1 38.1 -02M R 1/4 5.9 18.5 41.8 35.1 41.1 1/8 17 18.5

CP95

of auto switches Auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

CP95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Dimensions inside are for rubber seal. 6-1/2, 3/4 1, 3, 5 port 32 (35) 32 (35) 35 35 3-11-9 10 Series EVS7Dimensions EVS7-10-FG-S-M0 1/2, 3/4-5 port 1, 4, 2, 5, 3 port 200 124 124 45 (14 port) 76 39 37 2-8.5 mouting hole 45 (12 port) 5 1 3 22 (4 port) 22 (2 port) 22 12 2 4 14 14 80 26 33 80 95 50 B A 4 2 19 19 5 1 3 1/8-2 port 12, 14 port 47 47 Manual override 8 71 65 2-8.5 mounting hole

Table of Contents

1-2-7 Precautions 1 Be sure to read before handling.

Process Pump

With nut PAF341 S S 13 0 1 X68 Fitting type Fitting type Products using stainless steel parts (Body tightening bolts, switching valves, etc.)

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

MRQB-OM0002

MRQB32,40 18 1 17 2 16 2 34 2 15 1 33 O 1 14 1 32 4 13 2 31 2 12 O 1 30 1 11 2 29 1 10 1 28 S 1 9 1 27 S 1 8 O 2 26 1 7 1 25 2 6 1 24 4 5 1 23 4 4 1 22 4 3 1 21 O 3 2 1 20 O 1 1 1 19 1 12 14 2 28 1 13 2 27 1 12 4 26 1 11 1 25 R 1 10 1 32 24 2 9 2 23 2 8 4 22 8 7 1 21 2 6 2 20 2 5 1 19 2 4 1 18 O 4 3 1 17 O 4 2 1 16 4 1 1 15

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70