lPSMt

, dry, oil free air Fla.nmmcnalcal for air nrcr f Recommended for air preparation: NAC 2030-NO2 or NAC 2040-N02 f.,ter, coalescer, regulator Re{ catalog Ns-G1 Modular type FRL combination Recommended for control of pilot signali NlT200 OO 2G Electro-pneumatic regulator Ref catalog N8-01 HOW TO ORDER TravelAngle Indicator 0 not included 1 included Thread Size Nil Rc(pt) 1/a N female 1/4 NPT

OMU0023

2 3 ExOR step 1 with step 2 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 4 1st shift, Fill in 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 0 5 2nd shift, ExOR A001h 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 1 Value of 1st 6 3rd shift 0 1 0 0 1 1 1 1 1 1 1 1 1 1 1 1 0 byte: 7 4th shift, ExOR A001h 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 1 "01h" 8 5th shift 0 1 0 0 0 0 1 1 1 1 1 1 1 1 1 1 0 9 6th shift, ExOR A001h 1 0 0 0 0 0 0 1 1

E-P HYREG

VEX1-17 1 pc. 0 1 For VY1B0 B 01 1 8 2 Common external pilot 210 2 Note 1) 10 stations 2 stations 1 Internal pilot 0 1 For VY120 2 1 4 02 Piping thread type 2 Common external pilot 8 2 8 stations Nil Rc G Note 2) A B C 3 8 1 4 2 stations 1 F N Internal pilot 0 1 For VY140 4 3 8 NPTF NPT 2 Common external pilot T 6 3 8 1 2 6 stations VY manifold pilot type Body size B, 2 Note 1) In the case

High Vacuum Angle Valve

None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *

HRX-OM-W069

HRX-OM-W069 Contents Contents Chapter 1 Read before using . 1-1 1.1 Operation mode and operation method . 1-1 1.2 Change of operation mode . 1-3 1.3 Communication port . 1-4 1.4 Touch panel flow . 1-5 Chapter 2 Contact input/output communication /Analog output communication . 2-1 2.1 Precautions for communication . 2-1 2.1.1 Precautions wiring communication . 2-1 2.1.2 Precautions after wiring

CG5-S

R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 6 6 8 8 10 10 12 12 16 16 KGS Extended Male Elbow KGW Hexagon Socket Head Male Connector Applicable tubing O.D.

HRX-OM-Z015

HRLE Series HRX-OM-Z015 Chapter 1 Read before using Contents Chapter 1 Read before using . 1-1 1.1 OPERATION MODE AND OPERATION METHOD . 1-1 1.2 CHANGE OF OPERATION MODE . 1-2 1.3 COMMUNICATION TERMINAL BLOCK . 1-3 1.4 OPERATION DISPLAY PANEL FLOW . 1-4 Chapter 2 Contact input / output communication . 2-1 2.1 PRECAUTIONS FOR COMMUNICATION . 2-1 2.1.1 Precautions wiring communication . 2-1

E-P HYREG ® Series VY1 1

Sensitivity 0.5% F.S. 1% F .S. 1.5% F .S. 2% F .S. Repeatability 0.5% F.S. 1% F.S. 1% F.S. 2% F.S.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor The common polarity should be the same as the common specifications of the valve to be used.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Made to Order (Refer to page 681 for details.) 680 AS-FG Series Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type How to Order AS 2 1 0 3 F G 01 06 Body size Lock nut option Nil J Hexagon lock nut Round lock nut 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Control type AS-F 0 1 Meter-out Meter-in Made to Order (Refer to the below for

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series RoHS Stainless steel Universal Elbow 1 AS-F Model TMH ASD Applicable tubing O.D.

PFM7.eng

Press this button to change to the peak display mode. button (UP) [F 4] [F 5] [F 6] [F 7] [F 8] [F 9] [Anr.] Standard condition [1.00] 1 second Selects the mode or decreases the ON/OFF set value. Press this button to change to the bottom display mode. CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

53

When this product is sold on the market in the EU after January 1, 2017, it needs to be compliant with the quota system of the F-Gas Regulation in the EU. Note 2) See specification table for refrigerant used in the product. 154-1 A

PFM3.eng

Standard condition [F 4] [F 5] [eES] Response time [1.00] 1 second Specifications / Outline with Dimensions [F 6] [dSP] Display mode [ inS] Instantaneous flow [F 7] [ inP] External input [ r_r ] Accumulated flow external reset Refer to the product catalogue or SMC website (URL http://www.smcworld.com) for more information about the product specifications and outline dimensions. [1E2] 100-

PC Wiring System Series PCW

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Series VCL

2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm Grommet: G Conduit: C Approx. 300 V D Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port

CRJ

CRJB 1-90 54 CRJB 1-100 1 CRJB 1-180 67 CRJB 1-190 CRJU05-90 47 05 CRJU05-180 53 With external stopper CRJU 1-90 70 1 CRJU 1-180 81 Note) Above values do not include auto switch weights. 2 Mini-Rotary Actuator Series CRJ Rotating Direction and Rotation Angle The shaft turns clockwise when the A port is pressurized, and counterclockwise when the B port is pressurized.

CLQ

CLQ Without Auto Switch B 40 30 D F A73 S CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.