Guide Table Series MGF ø40, ø63, ø100 1

Rc 1/8 relief port Port for extending cylinder Port for retracting cylinder 8-23-8 9 Guide Table Series MGF Construction @2 !2 y u !3 e q t r o w @0 !1 !7 !8 !9 !5 !6 !0 MX i MTS @4 MY CY MG @1 !

Precision Cylinder Series MTS

6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Parts list No. 1 2 3 4 5 No. Description Rod cover Head cover Cylinder tube Piston Spacer for switch type Description Qty. Note Material Qty.

Air Cylinder NCQ7 Series Compact Cylinder

Type 19 o{rsut NPN NPN PNP NPN NPN Appllcalion Relay, lC, Squence conlroller 24YDC rclay, 8elay, rc, 24VDC rclay, Eby, rc, 4.s-28VDC 5-24VDC 5-24VDC 12-24VDC 5-24VOC 5-24VDC 24VDC Max. lOmA I Max.2omA Loaal volleEa ZSVDC or ls! Max.28VDC 10-28VDC Max.28VDC 10-28VDC Max. 28VDC Mar(. 150m4 Max.'l00mA 5-t00mA 5-4omA I 6-40ma hEmsl vollrgE drop {kitgr l@d voftlg!

asilltr

Type 19 o{rsut NPN NPN PNP NPN NPN Appllcalion Relay, lC, Squence conlroller 24YDC rclay, 8elay, rc, 24VDC rclay, Eby, rc, 4.s-28VDC 5-24VDC 5-24VDC 12-24VDC 5-24VOC 5-24VDC 24VDC Max. lOmA I Max.2omA Loaal volleEa ZSVDC or ls! Max.28VDC 10-28VDC Max.28VDC 10-28VDC Max. 28VDC Mar(. 150m4 Max.'l00mA 5-t00mA 5-4omA I 6-40ma hEmsl vollrgE drop {kitgr l@d voftlg!

VXR21/22/23

Z S L, Z S Note ) PAX 1 1 4 1 2 PB AC Ordering example (Example) Series VXR21, Rc 3/4, 24 VDC, Conduit terminal (Part no.)

VCB

Proper tightening torque N m Tightening torque for piping Connection threads 7 to 9 Rc 1/8 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 5. Connection of piping to products When connecting piping to a product, refer to its instruction manual to avoid mistakes regarding the supply port, etc.

AR20-B to AR60-B

E Square embedded type pressure gauge (with limit indicator) G Round type pressure gauge (with limit indicator) M Round type pressure gauge (with color zone) Option *3 Nt b E1*6 Output: NPN output, Electrical entry: Wiring bottom entry E2*6 Output: NPN output, Electrical entry: Wiring top entry E3*6 Output: PNP output, Electrical entry: Wiring bottom entry E4*6 Output: PNP output, Electrical

Pin Clamp Cylinder Series CKQ/CLKQ

7 @5 #8 #6 #4 @6 @7 @8 @4 Auto switch $1 #5 #9 #8 #2 @3 !9 $0 $2 !1 !8 !6 #7 !0 @9 A @0 !5 A !

VM

(PT) (8A), EXH port Rc(PT) (6A) 1 4 1 8 Piping possible to any EXH port.

Thermo-chiller

6 !2 x 4 !3 w Parts List (170) No.

Compact Cylinder with Air Cushion Series RQ

1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 9 for details on rod end nut and accessories.

ZMA

K With air supply valve, Vacuum release valve Thread type Nil Rc T F NPTF G Table (1) Combination of Nozzle Diameter and Standard Supply Pressure Standard supply pressure (MPa) Nozzle diameter M (0.35) S (0.45) H (0.5) 0.5 0.7 1.0 1.3 1.5 Table (2) Lead wire with 4-wire connector P5022-6-1 (0.6 m) P5022-6-2 (3 m) 13-4-23 4 Series ZMA Model H M Standard supply pressure Nozzle diameter (mm)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

3.2 D-M9B (2-wire) OUT Black Most sensitive position 6 DC(-) Blue 22 D-M9B OUT(+) Brown OUT(-) Blue 18

CC

Rc 1/8 Pilot air port port (Stip valve side) RS H A Manual push button RZQ MI W S CEP1 CE1 CE2 Oil port size Rc Oil draining hole Rc 1/4 Throttle valve locking screw ML2B C J G5-S CV MVGQ (mm) Model Air port size Rc Oil port size Rc A B C DA DB DL EA EB EL F H GA GB GL KA KB KL M CC CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G 186 64 86 88 53 121.8 98 151.5 35 18 35 104 45 86 45 83 60 3/8 1

SYJA3000

(PT)1/8 (Non-locking) Manual override 33.5 (Piping port) 5-M5 X 0.8 21.5 2-1.8 (Bleed port) With filter (80 Mesh) (Piping port) 6 6 24 15 R1 P 17 17 8.5 R2 45.5 1.8 (Bleed port) With filter (80 Mesh) 21 32 23.1-19 4/5 Port Air Operated Valve Series SYJA7000 Model (3) (2) Valve model Configuration Port size Rc(PT) Effective area (mm2) (Cv) Weight (g) Pilot port size 11 (0.6) 2 position single

•

l~1 "fd" , ,01 R(PT)1IB M5 X 0.8 With One-touch fillings R{PT)1/4 Rc(PT)lIB 03 'I R(PT)318 02 Rc(PT)1/8 R(PT)1/2 Rc{PT)1/4 04 R(PT)lf4 F02 G(PF)118 f03 R(PT)3/8 G(PF)lIB F04 R(PT)112 G(PF)li4 NOI NPT1/8 lO-32UNF N02 NPTl14 NPT1/8 NPT3/8 N03 NPT1/8 NPT1/2 NPTli4 1'04 Needle Valve/Flow Rate Characteristics ASP330F ASP430F 400 6 'E o,7,08,OY; E 06 12 ~300 200 3 'E ( 0 4 % r !

Process Valve

(mm) Symbol Symbol Symbol Port size Rc Nil: Non-locking push type 1 2 3 Note) N.C. N.O. C.O.

TA301

Refer to pages 5-11-2 to 6 for Safety Instruction and Solenoid Valve Precautions. VVTA300 05 1 01 Exhaust type Thread type Stations 02 1 Nil F N T 2 stations Individual exhaust 3 Common exhaust Rc G NPT NPTF For manifold Caution 20 20 stations 1. Each valve is fixed on the manifold with two M4 mounting screws. Please tighten the screws properly when valves are reassembled.

Series CE1

6 NBR Valve seal #6 Port joint 40 to 63 Stainless steel !

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

, NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7 1 2 3 4 AMC520 102 173.5 193.5 3.2 Depth 8 20 20 30