Large Size Vacuum Module: Series ZR

ZR1-F-100 to 100 kPa 500 kPa 5 to 50C 30 m PVF Refer to page 949 and 952 regarding pressure switch for vacuum.

Pin Clamp Cylinders

CKQ CLKQ Round type Diamond type R D CK CLK CK CLK CKQ Table 1.

Compact Type

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Modular F.R.L. Unit

Note 2) Use a bushing (part no: 131368) when connecting R 1/8 pressure gauge to R 1/16 gauge port. Note 3) Not applicable to AW10. Accessory part no.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r a a ti r n n g n a o e g n o t ti r a ti o n a a 2 e g t r t o 7 e o 1 r y 0 r 9 8 y e 0 y +4 0 e 0 Key K e K +4 0 +4 0 K +4 0 Key Key 0 (45) 9 Key e Standard Optional g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 a r n n n r o a g

1.1

A sensor with the specification Pt 100 has a resistance of 100 at 0C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

(Tighening torque of 0.3 to 0.4 Nm) VZS A VFS Circuit with light VS AC circuit DC circuit VS7 1 2 1 2 NL: Neon light R: Resiser LED: Emitting diode R: resister NL R R LED Valve Mounting B Fitting and Silencer Part No. for P, R Ports When Using Valve as an Individual Unit After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque

Compact Type Dual-Rod Cylinder Series CXSJ

5 t @0 @3 r !9 !8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Electromagnetic Digital Flow Switch

Fluid Passage Structure q r r No.

KG

22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

Clamp Cylinder with Lock

-100/CLK2Pl50-100 CLKG50-R100 CLK2Gl50-125/CLK2Pl50-125 CLKG50-R125 Common CLK2Gl50-150/CLK2Pl50-150 CLKG50-R150 CLK2Gl63-50/CLK2Pl63-50 CKG40-R050 CLK2Gl63 series CLK2Pl63 series CLK2Gl63-75/CLK2Pl63-75 CKG40-R075 CLK2Gl63-100/CLK2Pl63-100 CKG40-R100 CLK2Gl63-125/CLK2Pl63-125 CKG40-R125 Common CLK2Gl63-150/CLK2Pl63-150 CKG40-R150 Switch mounting bracket (Band mounting) Round head Phillips

IP8001 Series

position = 100.0% ( ) 100% 100 Quick opening 50 Linear Stroke (Y) User Equal percentage 50 0 0 100 100% 0% Input current (X) Fig. 30 7: Be sure to set all 11 date items.

Cylinder with lock

Pneumatic circuit W a r n i n g Use the pneumatic circuit which applies balance pressure to the both sides of the piston when locking.

Cylinder with lock

Pneumatic circuit W a r n i n g Use the pneumatic circuit which applies balance pressure to the both sides of the piston when locking.

ZR

06 ZZR1 R 1 R1 ZR1 1 1 RV ZR1 Port location Stations R L Left side Right side 01 1 Arrangement (Right valve station which is looked from valve side is first station.) Arrangement (Right valve station which is looked from valve side is first station.)

Clean Regulator/Fluororesin Type

Integrated fittings 80 Pilot port Rc, NPT 1/8 12 R 132 100 42.3 91 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 OUT IN 100 6 HEX.35 (178) With nut 80 Pilot port Rc, NPT 1/8 12 R 132 100 116 1 2 SMC 4 x 6.5 (Mounting hole) 80 100 SRF50 19 Model A1 A2 B1 B2 OUT IN SRF50S-1S19 SRF50S-1S1925 SRF50S-1S25 SRF50S-1S2519 SRF50S-2S19 42.3 91 58 91 58 91 55 98 55 98 55 98 A1 A2 58 91 6 B1 B2 56 95 56

Rotary Table/Rack & Pinion Style Series MSQ

n r ti CRA1 o n an e n d tio ge 95 ta 10 20 30 50 70 100 200 10.2 7.2 6.5 8.2 7.0 6.1 4.9 ro m mu xi Ma CRQ2 MSQ Note) The drawing shows the rotation range of the positioning pin hole.

Air Slide Table

100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read this before handling the products.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

(mm) 4 6 8 10 12 (1) AS221FE-01 AS231FE-01 20, 25, 32 R 1/8 AS221FE-02 AS231FE-02 20, 25, 32, 40 R 1/4 AS321FE-03 AS331FE-03 40, 50, 63 R 3/8 AS421FE-04 AS431FE-04 63, 80, 100 R 1/2 Note 1) Elbow type only Note 2) Distinction between meter-out/meter-in types by appearance Those are distinguished by the lock nut.