PF3A8xxH.eng

S S S Flow direction (1) Press the SET button once when the item to be changed is displayed on the display. The set value on the sub display (right) will start flashing. The output will not operate for 3 seconds after supplying power. The identification code of the product is displayed.

Escapements Series MIW/MIS

Scraper Cylinder bore 8 12 20 25 32 8 mm 12 mm 20 mm 25 mm 32 mm Nil S No Yes Number of auto switches Nil S 2 pcs. 1 pc. Stroke adjuster Type of auto switch Without auto switch (built-in magnet) Nil Nil A No Yes Refer to the table below for auto switch part numbers.

2-Color Display High Precision

It is also used for switching to the bottom display mode. 3 Series ZSE40A(F)/ISE40A Internal Circuits and Wiring Examples -R NPN (2 outputs) + Analog voltage output -R/-S NPN (2 outputs) + Auto-shift input -S NPN (2 outputs) + Analog current output Brown DC (+) Brown DC (+) Brown DC (+) Gray Gray Gray Analog output Analog output Auto-shift input Main circuit Main circuit Main circuit Load

Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Electric Actuator/Slider Type Ball Screw Drive Secondary Battery Compatible 25A-LEFS Series LEFS16, 25, 32, 40

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Micro-Mist Separator with Prefilter Series AMH

l'::: 0 200 400 600 800 1000 1200 Air flow rate Qlmin (ANR) c :~: 0 AMH450 I I Inlet air pressure 0.3MPa / 0.5MPa 0.7MPa / V V '" 0.06 a. ::;; I '/V //V ~ ~ 0.04 1000 1500 2000 2500 Air flow rate Qlmin (ANR) 3 SeriesAMH Construction AMH150 ~ AMH650 AMH850 OUT OUT IN IN ... ... ...

BP1000

PTFE (TF) option available for the AP 500, AP, AZ & AK 1000 & 1100 and AZ & AK 1300. The primary application for this material is for pressure regulators inside process tools. [Vespel] Trademark of DuPont Plastic with excellent heat resistance (polyimide resin). This material has excellent heat and wear resistance.

For post-stoppage positioning and locking

Clamping Force Specifications W-R1-S2Type Type 1 Type 3 Mass of transferred object 1000 kg or less 3000 kg or less 5000 Possible amount of positional correction 50 mm or less 4000 Clamping force 4430 N 4070 N Clamping force [N] Operating time 1.0 s or more 0.8 s or more 3000 Cylinder operation stroke 83.5 mm 140 mm Bore size 100 mm 2000 Cylinder proof pressure 1 MPa Max. operating pressure

Compact Cylinder

CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built in magnet Nil S n 2 pcs. 1 pc. n pcs.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

3 Port Solenoid Valve

(Double solenoid) S D Rated voltage 24 VDC 12 VDC 5 6 Common Specification +COM. COM.

EXxx-OMO0027

Mount the marker (EX600-ZT1) into the marker groove as required. -14No.EX-OMO0027-A SI unit Model Indication and How to Order EX600-S SI unit Polarity of output Symbol Content Protocol 1 PNP (-common) Symbol Content 2 NPN (+common) EC EtherCAT Summary of Product parts No.

LEC-OM038xx

mm/s USB cable A-miniB type 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN2 Communication cable PC PC is prepared by customer) Refer to 8CN2 TB/PC Power supply connector(P.23) for usage.

HRX-OM-I051

(Only for HRZ010-W*S) 0, 15 to 40 LPM 0, 4 to 10.6 GPM 6 LOW FLOW 0, 8 to 40 LPM 0, 2.1 to 10.6 GPM (Only for HRZ010-W*S) 7 FLOW UNIT LPM, GPM Allows the selection of the unit of flow rate. 8 PRESS UNIT MPa, PSI Allows the selection of the unit of pressure. 9 SLAVE ADRS. 1 to 16CH Allows the selection of the slave address for serial RS-485 communication.

Dedicated Controller

SETUP I PORTOPORTLOOP SEC mm2/s LABEL PRO Main modes ALM mm/s L C Directs a program operation. RUN Operation mode ACTUATOR & CONSTRUCTION SYSTEM CONTROLLER POWER ALARM STOP Executes a JOG operation.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

C92

700 500 300 200 160 140 125 100 80 63 50 40 32 m(Kg) 100 70 50 30 20 10 7 200 250 300 350 400 450 500 550 600 V(m/s) Example: Load limit at rod end when air cylinder 50 is actuated with max. actuating speed 325mm/s.

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

SMC Pneumatic Clean Series

X W V U Q R T (mm) (mm) Rod end male thread Applicable bore size V W X U R S T Q Part no.

RSH

Option (1) D C S Without option With locking mechanism With cancel cap With lever detection switch Action (2) D B T Double acting (1) The options can be combined, provided that the priority order is indicated as D, C, S.

PFMC.eng

Then turn the power ON again. [ P_1] Set value of OUT1 [ 500] 500 L/min (PFMC7102) [ 1000] 1000 L/min (PFMC7202) [F 1] OUT2 over current error The switch output (OUT2) load current has exceeded 80 mA. 90o Do not use the product for flammable fluid. Fire or explosion can result.