Digital Flow Switches Series PF2A

How to Order Integrated Display Type M PF2A7 10 01 27 Flow rate range 1 to 10 l/min 5 to 50 l/min 10 to 100 l/min 20 to 200 l/min 50 to 500 l/min 10 50 11 21 51 Thread type Unit specification Nil M With unit switching function Fixed SI unit Note) Nil N F Lead wire (Refer to page 35.)

Clean Air Module

F1 F 1 LLB3 Standard (100 L/min (ANR)) LLB4 High flow type (500 L/min (ANR)) F 1 Filter F With filter Port size 1 3 3N 12 One-touch fitting Rc 3/8 NPT 3/8 Restrictor Note) Use a resin fitting (no metal) for Rc and NPT thread.

AR20-B to AR60-B

Knob Nil Downward Y Upward + g Pressure unit Nil Name plate and pressure gauge in imperial units: MPa Z Note 7) Name plate and pressure gauge in imperial units: psi Note 9) Note 9) Note 9) Note 9) Note 9) Note 9) ZA Note 8) Digital pressure switch: With unit conversion function Note 10) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

Rotary Gripper Series MRHQ

MRHQ10D MRHQ10D 20 20 Gripping force N Gripping force N 15 15 Pressure 0.6MPa Pressure 0.6MPa 0.5MPa 0.5MPa 10 10 0.4MPa 0.3MPa 0.4MPa 0.3MPa 5 5 0.2MPa 0.2MPa 0 10 20 30 40 50 0 10 20 30 40 50 F F Gripping point L mm Gripping point L mm F F MRHQ16D MRHQ16D 50 50 External gripping Pressure 0.6MPa Pressure 0.6MPa 40 40 Gripping force N Gripping force N 0.5MPa 0.5MPa 30 30 0.4MPa 0.3MPa 0.4MPa

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

Cylinder with Lock Series CLS

F Front flange type S 1pc. F G Rear flange type n "n" pcs. Steel tubing is not available with auto switches.

With Factory Installed

AR2001/2501/3001/4001 AW200I/3OQI/4001 __ -AC200I/250I/3001/ 4001 Outside diameter: D27.5mm limit indicators ipeci Ica Ions Standard S "f r Model no. GC30-10 GC30-2 Pressure range (MPa kgf/cm2 ) 0 ~ 0 . 2MPa 0 ~ 1 . 0MPa 0~2kgf/cm2 0 ~ 10kgf/cm2 Accuracy 3%F.S.

MLU

MU-D02 MU-D03 MU-D04 MU-D05 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 8 10 10 14 Applicable pin no. CD-MU02 CD-MU03 CD-MU04 CD-MU05 DZ 8 10 10 14 CZ 8 10 10 14 DY 9 11 13 16 CX 9 11 13 16 DX 18 22 26 32 CT 9.5 11 14 17 DT 9.5 11 14 17 CR 5.3 6.4 8.4 10.5 DR 5.3 6.4 8.4 10.5 CL 26 42 54 64 DL 26 42 54 64 Part no.

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

End Lock Cylinder Series CBG1

x 1.5 23 100 1/2 21 130 40 204 4 End Lock Cylinder Series CBG1 With front lock: CBG1BN Bore size Stroke R GB (mm) Bore size (mm) DL1 GB S TB ZZ 20 19.5 10 (12) 80 (88) 11 117 (125) 25 19.5 10 (12) 80 (88) 11 122 (130) 32 20 10 (12) 81 (89) 10 (11) 123 (131) 40 19 10 (13) 87 (96) 10 (12) 139 (148) 50 23.5 12 (14) 102 (114) 12 (13) 162 (174) DL1 63 23.5 12 (14) 102 (114) 12 (13) 162 (174

CE2

200 V Black COM (0 V) G Shield Data A phase output pulse Connector pin arrangement B phase output pulse G A F B H E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

HRX-OM-O021

20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40

Compact Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 20 32 40 50 63 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic Fluid Compatibility 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 Hydraulic fluid Compatibility

Brake mechanism added

0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

VXA21/22

The right side of the common port provides plug. 4.1-75 VVXA31/32 Dimensions Stations 2 3 4 5 6 7 8 9 10 Model L L1 L2 L1 L2 96 84 126 108 132 120 172 154 168 156 218 200 204 192 264 246 240 228 310 292 276 264 356 338 312 300 402 384 348 336 448 430 384 372 494 476 VVXA31 VVXA32 Symbol Model M 45.5 50.5 N 69 76 K 6 9 G 24 25 H 30 40 J 36 46 F 33 34 C 9 10 D 22 24 E 59 66 B 20 22 A 40 44

Series KQG2 is a one-touch fitting made of all stainless steel SUS316, except seal parts. The series is suitable for use with steam and is grease-free. Applicable tubing includes FEP, PFA, nylon, soft nylon, polyurethane and polyolefin. The KQG2 series is available in both metric and inch sizes. The KQG2 is more compact and lightweight, and offers more configuration variations and tube sizes

Series KQG2 is a one-touch fitting made of all stainless steel SUS316, except seal parts. The series is suitable for use with steam and is grease-free. Applicable tubing includes FEP, PFA, nylon, soft nylon, polyurethane and polyolefin. The KQG2 series is available in both metric and inch sizes. The KQG2 is more compact and lightweight, and offers more configuration variations and tube sizes

Series KQG2 is a one-touch fitting made of all stainless steel SUS316, except seal parts. The series is suitable for use with steam and is grease-free. Applicable tubing includes FEP, PFA, nylon, soft nylon, polyurethane and polyolefin. The KQG2 series is available in both metric and inch sizes. The KQG2 is more compact and lightweight, and offers more configuration variations and tube sizes

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

size (mm) MM A NN D F G1 G2 S ZZ I H J N1 N2 NA TN TF 10 15 M12 x 1 4 M5 x 0.8 8 15 6 M4 x 0.7 65 101 18.5 28 16 11 20 16 16 15 M14 x 1 5 M5 x 0.8 10 15 6 M5 x 0.8 74 114 22 30 22 12 21 19.5 20 18 M20 x 1.5 8 Rc1/8 13 NPT1/8 25 G1/8 8.5 M8 x 1.25 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M10 x 1.25 18 M26 x 1.5 10 Rc1/8 13 NPT1/8 30 G1/8 8.5 102.5 160 34.5 44.5 32 20.5 38 32 Refer to page

XLAQ/XLDQ

(FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Seal material XSA Symbol Nil N1 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.