ZQ

above dimensions are for ZQ11U-J2 L-F.

AC Servo Motor Driver (CC-Link Type)

selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

N T, F, N are order made specifications.

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

2 x M5 x 0.8 (Vacuum port) 6.5 12 12 11 10 10 1 24 14 S O 20 46 24 30 K 15 (70) 10 24 24 12.5 4 12.5 4 10 30 When open F 17 17 54 4 x M6 x 1 through (Thread for mounting attachment) When open G (mm) J 32 68 88 H 176 276 316 G 138 238 278 F 98 158 178 E 38 80 100 D 87 129 149 B C 58 100 120 A MHL2-20D MHL2-20D1 MHL2-20D2 112211221122136 211 251 54 96 116 MHL2-25D 1122D A B C 12.5 +0.030 4H9

ChemicalThermo-con

Display panel 50,000 hours (approx. 5 years) End life of backlight of LCD. 183 Series HED Applicable Fluids Chemical CompatibilityTable against the Wetted Parts Material in Chemical Thermo-con Chemical Operating temperature range Compatibility Concentration p Note 2) 50 to 104 F(10 to 40C) Hydrofluoric acid HF: 10% or less p Note 2) 50 to 104 F(10 to 40C) Buffered hydrogen fluoride HF: 10%

MHL2

F = one finger thrust.

RB/RBL/RBQ

Specifications and operational instructions Confirmation of specifications 0.3 < 5 (max.) t 10 (min.) < 25 < 80 (max.) F F1 628 < 1961 (max.) CEP1 3.

RB/RBL/RBQ

Specifications and operational instructions Confirmation of specifications 0.3 < 5 (max.) t 10 (min.) < 25 < 80 (max.) F F1 628 < 1961 (max.) CEP1 3.

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

Plug-in Unit

: Serial transmission L Kit: Lead wire F, L, M and P kits 1 to 12 stations M Kit: Multiple connector C8 (For 8) C10 (For 10) T kit 1 to 10 stations 4150 S kit (without unit) Solenoid weight is not included.

Electric Actuator / Low profile slider type

Origin offset-10 Origin 50mm Motor side End side 0 10 20 30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

Compact

circuit verro*,14\ I Y"tto*ld Without brake Nole) Conlact protecUon circuit i5 rcquired when connecting F-Ms Thread 10 Deep F/2 l)xc 25 t\rotor Photo micro sensor wire(3oomm) [ ] shows lhe localion al which ongtn pornr sw cn operates. o+ts *!

Compact Vacuum Ejector Series ZQ

) Note 4) PE (M5 x 0.8) 29.4 3 20.2 P 20.3 9.7 V Exhaust part 0.8 17.7 22.8 87.2 10 Note 1) The above dimensions are for ZQ11U-J2 L-F.

Series MLGP

Extension locking (type F) 6-2. Retraction locking (type B) 7. Installation P9 7-1. Air supply 7-2. Piping 7-3. Operating environment 7-4. Mounting 7-5. Preparation before operation 8. Pneumatic circuit P12 9. Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2.

CG5-S

(mm) Applicable fitting size 6 8 10 4 8 10 12 10 12 12 16 16 KGE10-02 R 1/4 Model 10 -03 R 3/8 KGR04-06 KGE12-03 R 3/8 12 4 -08 -04 R 1/2 -10 KGE16-03 R 3/8 16 KGR06-04 -04 R 1/2 -08 6 Tube Cap KGC -10 -12 KGR08-10 Applicable tubing O.D.

Bag Filter

Material FGFC3-40 Carbon steel F-86S FN AL-79S AL-80S FGF3-40 FGFR3-40 FGFC3-40 159 115 3 10(4B) F-90S F-86S V#6500 210 175 115.4 19 18 FGF5-60 FGFS3-40 FGFR3-40 220 167 3 Stainless steel F-87S AL-79S AI-17S EB ES FGFL3-40 FGFS3-40 Note) 2 pieces are required per filter unit.

Magnetically Coupled Rodless Cylinder

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder

CJ5-S

Applicable bore size (mm) Flat type + 0.048 0 + 0.048 0 CJ-T010SUS 10 3.3 A D L MM N R W 4.5 29 18 3.1 2 40 22 32 12 9 Round type CJ-T016SUS 16 Data 5 5.5 35 20 6.4 2.5 48 28 38 16 14 CJ-CF010 CJ-CR010 10 8 10 13 M4 x 0.7 6 10 8 CJ-CF016 CJ-CR016 16 10 12 15 7 12 10 M5 x 0.8 10-14-9 10 Stainless Steel Cylinder Series CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order Stainless steel cylinder