3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 VS 260.5 285.5 21 273 No.

RSH/RS1H

6 !7 !8 !

RSH/RS1H

6 !7 !8 !

End Lock Cylinder Series CBG1

I J to 350 20 18 15.5 13 14 8 12.5 12 2 12 12 35 5 25.3 37 26 M4 x 0.7 depth 7 to 400 25 22 19.5 17 16.5 10 12.5 14 2 12 12 40 6 28.3 40 31 M5 x 0.8 depth 7.5 to 450 32 22 19.5 17 20 12 12 18 2 12 12 40 6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200

99

or 13 m (Filtration efficiency 99%) FGD High precision filtration: 99% or more FGE FGG FGA FGC High accuracy filtration is achieved by using a HEPO1 1element with filtration accuracy of 2, 4, 6 or 13 m (Filtration efficiency 99%).

Compact Electric Actuator Series LG1

(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16

Cylinder

CIhm) . ... . , ."~" ." t LZ . '"' 17 M3 xO.5 M10 x l.0 7 6.5 10.5 11 6 7 9 14 14 3 10.5 8 6 6 3.4 1.6 20 28 7 Mi2 Xl,Q 12 8 , 12 4.5 13 ~ '1 .6 24 33 ..H i 17 ~ , 20 ,', 1V14 XO.7 10 ' ... " .. ~ , ~ . .. r. 13 & :1 .:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange

Angular Air Gripper Series MHC2/MHCA2/MHCM2

With M3 port 23mm x 15mm x 10mm 9.5g (Full size) Variations P .5 P .5 P .13 MHC2-6 MHCA2-6 MHCM2-7S Model Cylinder bore 6 6 7 Double acting Action Single acting (normally open) Single acting (normally open) 30 to 10 Opening / Closing angle (both sides) 20 to 7 0.038Nm (double acting ) 0.024Nm (single acting) Holding moment (at 0.5 MPa) 0.017Nm Repeat ability Maximum operating frequency Weight

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

AC Servo Motor Driver (CC-Link Type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-W0-01 Applicable cable O.D. 3.5 to 7 Approx. 300 (Lead wire length) 82.9 125.2 Max. 10 75.4 50.1 [57.1] 64.1 34.7 54.6 49 M8 x 1 37.1 61.2 [68.2] Approx. 300 (Lead wire length) Pg7 6 6 6 6 107 [111.4] 87.4 [91.8] 65.2 58.7 18.7 45.5 45.5 45.5 45.5 105.2 17 17 17 17 17 17 17 17 42.7 127 2.7 6 6 6 6 25.2 32.6 8.5 8.5 8.5 8.5 42.6 43.5 21.5 21.5 21.5 21.5 23.7 [25.9] 33.5 [35.7] Refer to the

AC Servo Motor Driver (CC-Link Type)

Lists the history (Maximum 6 cases) of alarms that occurred in the past.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 9 12 13 13 16 16 12 16 20 20 25 30 32.5 38 46.5 56.5 72 89 46 52 65 75 95 114 10 14 18 18 22 26 22 30 35 35 40 40 Wl Stroke range (mm) Bore size (mm) ZZ S ZZ WL W V S RF P NB N

MXH Series Compact Slide

MXH10 (10) 20 6 21 17 2 1 19 5 18 8 10 20 6 21 16 2 1 19 5 18 10 8 3 24 13 9 7 22 14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

VK3000

ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

ZSE2/ISE2

3.5 Mounting hole 2-3.5 Mounting hole Piping port M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 13 01: R 1/8 T1: NPTF 1/8 01: R 1/8 T1: NPTF 1/8 IF Data 16-6-13

MXF

M 12 Operating port 2-M5 x 0.8 0.5 25 (Table length) N 2 ( 1): The number of pitches 27 7 12 J 3 Z Max. 9.5 ZZ H G 33.5 (mm) 6 Z M J NN H G N ZZ Model 5H9 +0.030 0 depth 5 MXF20-30 91 91 57 4 30 29 4 104 MXF20-50 113 113 77 4 45 36 4 126 MXF20-75 162 162 125 6 45 40 6 175 MXF20-100 211 211 175 6 60 59 6 224 8-6-13 14 Series MXF Proper Auto Switch Mounting Position (Detection at stroke

MHF2

71 6 62 86 2-M6 x 1 thread depth 6 33 56 Finger closing port M5 x 0.8 Mounting thread E 13 25 25 30 41 E 0 -0.1 2-5.2 through (mounting hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-M6 x 1 thread depth 6 40 8-M4 x 0.7 thread depth 4 Mounting thread Attachment mounting thread 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 16

VK300

(Bracket mounting screw) L Dimension n L n: Stations 1 35 27 20 396 388 13 32 51 70 89 108 127 146 165 184 203 222 241 260 279 298 317 336 355 374 2 54 46 3 73 65 4 92 84 5 111 103 6 130 122 7 149 141 8 168 160 9 187 179 10 206 198 11 225 217 12 244 236 13 263 255 14 282 274 15 301 293 16 320 312 17 339 331 18 358 350 19 377 369 L1 L2 L3 1414 A VK300 Series 3 Port Solenoid Valve Direct Operated

XG_-OMV0028

XGT 3 1 2 50336 1 C O 1:FKM 2:Kalrez R 4079 Kalrez R DuPont Performance Elastomers 50336 50mm 336mm 2: 3: 1:1 3:300mm A :0.5m D-A93 C 6 (C016 30C006 100 12:AMP ) (2 ) F 9 D CDE-9PF05 5 - 3. 6 - 3-1 1AB 23 2 3 19 2A 21 23 2B 1B 2C 2 2 3 19 3-2 1A 1B 26 8 9 22 13 12 18 9 27 12 13 18 9 18 , 21O 5 6 7 ASSY O 4 3-3 2A2B CLOSEOPEN 8 9 9 13 12 18