JXCx-OMT0062

RESET Ctrl Comm ALM (1-150) D SVON Input *1) Cause of The abnormal LED communication station detection Alarm clear method error (LRUN) RWr0,bit F (Upper-level device) Turn on RWw0, bit 2: Reset flag, and then turn ON Ry0B: RESET.

SMC Wireless System EtherNet/IP ® compatible

DY#B (Unit 3) byte 9 Remote registration information (Wireless channel 8-15) Reserved DY#B (Unit 3) byte 10 DX#D (Unit 1) Remote (Wireless channel 002) byte 11 Reserved Base byte 12 Reserved byte 13 Reserved byte 14 DX#D (Unit 1) byte 15 byte 16 AXA (Unit 2) byte 17 Remote (Wireless channel 001) byte 18 byte 19 byte 20 Reserved byte 21 Reserved DX#D (Unit 1) byte 22 byte 23 DX#B (Unit 2)

SMC Wireless System PROFINET compatible

DY#B (Unit 3) byte 9 Remote registration information (Wireless channel 8-15) Reserved DY#B (Unit 3) byte 10 DX#D (Unit 1) Remote (Wireless channel 002) byte 11 Reserved Base byte 12 Reserved byte 13 Reserved byte 14 DX#D (Unit 1) byte 15 byte 16 AXA (Unit 2) byte 17 Remote (Wireless channel 001) byte 18 byte 19 byte 20 Reserved byte 21 Reserved DX#B (Unit 1) byte 22 byte 23 DX#D (Unit 2)

CEx-OMB0060

For longer input time, processing takes approximately 150 ms from startup of reset signal and it increases total reset processing time.

High Vacuum L Type Valve

H 4 S y m b o l Initial power/ Power 100 VAC 600/150 800/220 1200/350 200 VAC 2400/150 3200/220 4800/350 consumption (W) Heater assembly number XLA25-60S-2 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 2 pcs. 3 pcs. 4 pcs.

-- NCM seies

'trllrF I s NPrF NCME 150 'Noter For Din hole location see NCMC dimensions lfrw XK A a I K L LB N Nll w l Y 7A 0.250 Y4-24 0.50 o.624 0.86 0.38 0.251 o.34 3.75 o.75 Va-18 0.50 0.95 o.62 4.03 w& 1a.50 o.sc 034 o.t51 o.34 3.56 o.?5 7*tA 0.50 io.95 o.62 3.84 106 (17e) 0.312 5.+24 0.50 o.6240.25 1.12 0.38 0.251 0.12 0.34 3.84 0.84 Ve-18 0.62 t.17 0.62 4.12 o.4sl1*n o?

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p to 18 socnoids possbe '_!

3 Port Solenoid Valve SYJ300/500/700 Series

18

Manifold Specifications

VVZS3000-4-1 VVZS3000-4-2 18 x 15 x 1.5 7.5 x 4.5 x 1.5 VVZS3000-5-n (1) Seal B Seal A NBR NBR NBR NBR Carbon steel Carbon steel w e O-ring O-ring r t Tie-rod y Tie-rod for station addition VVZS3000-5-1-1 (2) Note 1) n: Stations Note 2) Manifold block assembly is attached with tie-rod for increasing stations. Assembly part no.

JXCx-OMT0028CN

19 (1) (GW [IN Data] Address.18, bit0) LEC 1(ON)0(OFF) (2) (GW [IN Data] Address.18, bit1) LEC 0(OFF)1(ON) (3) (GW [IN Data] Address.19, bit0) (GW [OUT Data] Address.2, bit0)1(ON) LEC 1(ON)0(OFF) (4)(GW [IN Data] Address.19, bit1) LEC 1(ON)( GW [OUT Data]Address.2, bit0)00(OFF) 11.3 (IN Data) GW bit 7 6 5 4 3 2 1 0 Address 250 ALARM READY 251 252 253 (1) 250 bit1 Bit0 0 0 0 1 1 0

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

ZY ZFA100 Port size Symbol Model A B 18 20 28 ZFA200 1 8 1 4 ZF Manifold ZP SP ZCUK AMJ AMV Pitch AEP HEP Related Equipment (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 ZFA200 1 8 1 4 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228

7.4

L3 60.5 73 85.5 98 110.5 123 135.5 135.5 148 160.5 7.5 29 18 n L 11 12 13 14 15 16 17 18 19 20 L1 141 152 163 174 185 196 207 218 229 240 L2 162.5 175 187.5 187.5 200 212.5 225 237.5 250 250 L3 173 185.5 198 198 210.5 223 235.5 248 260.5 260.5 How to Order Single unit, double check block 2-position 1(P) 5(R1) 5(R1) VQ1000 FPG C4 M5 F 1(P) 3(R2) 3(R2) OUT side port size Option IN

Step Motor Controller (Servo / 24 VDC)

Product Specifications . 15 3.1 Basic specifications . 15 3.2 Parts description . 16 3.3 Outside dimension diagram. 17 (1) Screw mount type (LECP6-) . 17 (2) DIN rail mount type (LECP6D-) . 17 3.4 How to install . 18 (1) How to install . 18 (2) Ground wire connection . 18 (3) Installation location . 19 4.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET#type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v Applicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication function USB

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

62 47 9.0 10 30 138 6.0 47.5 40 64 65 24.0 10 32.0 8.5 240 92 66 14.0 14 40 223 7.5 80.0 60 112 94 37.0 15 46.0 10.0 320 136 99 20.0 16 64 300 10.0 110.0 84 162 139 58.0 29 70.0 8-14-18 18 Mechanically Jointed Rodless Cylinder Series MY3A/3B Basic Type: 16, 25, 40, 63 MY3B Bore size Stroke G G NG NG MX 2-P MTS (Hexagon socket head taper plug) MY CY (LL) L LD through hole 4-B depth 4-MM depth

Series AP500

psig (1.0 MPa) 100 0.69 80 0.55 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 40 0.28 20 0.14 0 0.00 0 50 100 150 200 250 300 350 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

240

0.8 1 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 Me 150 150 150 150 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 100 100 100 100 Wall Y L5 50 50 50 50 0 0.2 0.4 0.6 0.8 1 0 0 0 0 0 0.2 0.4 0.6 0.8 1 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] 0.0 0.4 0.8 1.2 1.6 2.0 Work load [kg] Work load [kg] Work load [kg] 200 200 200 200 160 160 160 160 L6 L6 [mm] L6 [mm] L6 [mm] L6

SI unit for EtherNet/IP TM

Connection Parameter Assembly Instance values: Description Decimal Comm Format "Data-INT" "Data-SINT" Input 100 100 Output 150 150 Configuration 1 1 Size: Description Size Comm Format "Data-INT" "Data-SINT" Input 3 words 6 bytes Output 2 words 4 bytes Configuration 0 word 0 byte -19No.EX-OMK0004-B Maintenance How to replace SI unit Remove screws mounted on the end plate, and separate it from

Process Pump

12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 7.5 52 37 20 2 x M4 x 0.7 Female mounting threads Thread depth 6 2 x 4.5 Mounting hole 66 14 14 Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 AIR SUP Rc, NPT, G 1/8 FLUID IN Rc, NPT, G 1/8 20 8.5 15 8 10 18 Caution 1.

VS7-6

Unit n: Station L: Dimensions n L L1 L2 Equation L1=43n+64 L2=43n+76 L3 297 340 383 426 469 512 555 598 641 L3=43n+211 2 150 162 3 193 205 4 236 248 5 279 291 6 322 334 7 365 377 8 408 420 9 451 463 10 494 506 ( ): In case of direct manual override style.