LJ1H

Cable entry direction D E 25mm 40mm 2m 3m 4m 5m 2 3 4 5 Motor output: 200W Axial Right Left Top Bottom F R L T B Lead screw type Refer to Table below. Power supply voltage Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Non-standard motor Nil W None N.C.

Prevents Micro-Bubbles

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

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P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

o

P=0 41 (1 2 Mounlin9 holes L2 0 1 4 ( 3 . 5 ) Tgpe 541,/ Sitle Ported , r r ' : , a M Type Plug Connector(M) 11YY3,13-941-g"-'s;i.;l-M3 L Type Plug Connector(L) 0.1413.5) Dia.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A A1 RR1 A1 E1 L1 MM RR1 U1 NZ L Part no.

E-P HYREG

(MPa) Port 1 (P) pressure 0.9 MPa Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa (L/min(ANR)) (L/min(ANR)) Exhaust Flow rate Reduced pressure supply Exhaust Flow rate Reduced pressure supply VY150 0 1 VY170 0 1 Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa Port 2 (A) pressure (MPa) Port 1 (P) pressure 0.9 MPa (L/min(ANR)) (L/min(ANR)) Exhaust Flow rate Reduced pressure supply

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Digital Flow Switch

) Air N2 1 L/min 10 100 2 L/min 20 200 5 L/min 50 500 PF3A7 H Thermal type (Platinum sensor) 2 L/min 30 3000 p. 9 Air N2 PFG300 5 L/min 60 6000 p. 14 12000 Bypass flow type 10 L/min 120 0.2 PFM 0.01 L/min 10 Dry air N2 Ar CO2 0.5 25 Thermal type (MEMS) 0.1 L/min 1 50 2 100 PFMB 2 200 Thermal type (MEMS) 5 500 Dry air N2 1 L/min Bypass flow type 10 1000 PFG300 20 2000 PFMC 5 500 Thermal

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

air-filter-e

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

Air Preparation Equipment

m 100 L/4000 cm2 Pure water cleaning Others Note 1) Filtration accuracy: tested with ultrapure water, flow rate at P = 0.01 MPa.

MG

distance l (mm) (3) 50 Stroke or Less, V = 400 mm/s (4) Over 50 Stroke, V = 400 mm/s 300 300 200 200 80 80 100 100 Load weight m (kg) Load weight m (kg) 50 50 50 50 40 40 30 30 20 20 10 50 100 200 10 10 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) 8-19-52 MGPS50/80 (5) l = 50 mm, V = 200 mm/s (6) l = 100 mm, V = 200 mm/s 100 80 50 80 80 80 40 Load weight m (kg) 30 50

modular-press-e

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Modular F.R.L. Pressure Control Equipment

Contact SMC regarding the specifications for psi unit and F. 229 Filter Regulator with Built-in Pressure Gauge with Backflow Function AWG20K/30K/40K Construction AWG20K AWG30K/40K B D P A A K U C C C S O P H L to K U C S O H L to B D D-D C-C A-A B-B !0 o !1 !0 o !1 y y !2 !

Tie-rod Type Hydraulic Cylinder

Cushion adjustment screw V T GA 4 x J GB Air release CHQ Width across flats G CDH9 CHK MM R (max.) d CHN W D E W CHM CHS a MA CH2 CX 0.3 F NA NB U A K C L 0 0.3 S + Stroke H CHA CHA B Z + Stroke RR Related Products ZZ + Stroke DWith rod boot e 10 l f h + l Z + l + Stroke ZZ + l + Stroke (mm) Bore size (mm) A B C CDH9 a CX D E F d G GA GB J K L MA MM NA NB P R RR S +0.043 0 +0.043 0 +0.043

CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Shock Absorbers and Rate Controls

(otaloq l{0, lltlodell trl tl P 0 R 5 T U v w x CR 6.59 ?

39

M N O P Q J K L M N O P Q Part no.

Cylinder with Lock Series CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.