Clean Air Module

Nil Without restrictor With restrictor S Digital flow switch ON/OFF valve Nil Without digital flow switch NPN open collector 1 output + Analog output (1 to 5 V) PNP open collector 1 output + Analog output (1 to 5 V) NPN open collector 2 outputs PNP open collector 2 outputs NPN open collector 1 output + Analog output (4 to 20 mA) PNP open collector 1 output + Analog output (4 to 20 mA) P1

Digital Flow Switch (Remote type sensor unit)

1 V 1.8 V 5 V Current output 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C Voltage output 1 V 1.48 V 5 V Current output 4 mA 5.92 mA 20 mA Rated flow [L/min] Sensor model Minimum Maximum PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0010-J Dimensions PF3W504

HRL

ion (SO42) [mg/L] 50 or less v Acid consumption amount (at pH4.8) [mg/L] 50 or less v Total hardness [mg/L] 70 or less v Calcium hardness (CaCO3) [mg/L] 50 or less v Ionic state silica (SiO2) [mg/L] 30 or less v Standard item dV dt = Voltage increase ratio dV Iron (Fe) [mg/L] 0.3 or less v v Copper (Cu) [mg/L] 0.1 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (

Digital Pressure Switch

Auto-shift input mode) With auto-shift switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -X (Copy function switch output) NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less -20No.PS-OMM0007-I -V/-T (Analogue output mode) Switch output PNP open collector output type-2 output Max. 80 mA Residual voltage 1 V

ChemicalThermo-con

Heat Exchanger Specifications HED003-HW13 HED003-HW19 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 Heat exchanger model Cooling capacity (Water) Note 1) 500 W 300 W 750 W Heating capacity (Water) Note 1) 1000 W 600 W 1800 W Cooling/Heating method Peltier device (Thermoelectric device, Thermo-module) Radiating method Water-cooled Operating temperature range 50 to 140F (10 to 60C) (depending

LEF-OM002xx

) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500 600 0 100 200 300 400

3 Port Solenoid Valve SYJ300/500/700 Series

4" one-touch fitting) M5 0.8 1/8 NPTF Port size M5 0.8 A port X port Note1) M5 0.8 M5 0.8 M5 0.8 Body ported type SYJ5 2/SYJ5 2R 3.4 (0.19) Note 2) Valve effective area mm2(Cv) M5 : 3.3 (0.18) 1/8 : 4.8 (0.27) N3T, N7T: 3.8 (0.21) Base mounted type SYJ5 4/SYJ5 4R M5 : 3.8 (0.21) 1/8 : 4.7 (0.26) Note 1 : Only for external pilot Note 2 : Value when used on a manifold Proper Combinations of

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

0.4

DC (17 mA), 0.95 W DC (40 mA) (4) Power consumption (Current) 12 VDC 0.4 W DC (34 mA), 0.95 W DC (80 mA) (4) (R1)5 1 (P) 3(R2) Note 1) Use dry air to prevent condensation when operating at low temperatures.

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

Serial Transmission System Series EX250 Series EX500

Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

KJS04-M5 4 (Straight) Single unit KJS06-M5 6 (Straight) KJL04-M5 4 (Elbow) Note 9) For filter only (Without vacuum pressure switch) When neither V port fitting nor P port fitting are needed, enter nothing or 00 in the dotted line above How to Order. 2

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 772

VQ20/30

Power wave form of power-saving type (Rated voltage at 24 VDC) Applied voltage 24 V Applicable cable Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2 2-core and 3-core wire equivalent to JIS C 3306. 0 V 10 to 20 ms 2.9 W Ground nut Tightening torque 1.65 to 2.5 Nm Washer Power-saving Tightening screw Tightening torque 0.3 to 0.4 Nm 0.6 W 0 W AC circuit Grommet (Rubber) Housing Lead wire color DIN

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

Model Selection 1

Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power dissipation (W): For AC , W = V/A cos. For DC, W = V/A. (Note) cos shows power factor. cos = 0.6 2. Surge voltage A high voltage which is momentarily generated in the shut-off unit by shutting off the power. 3.

Series VCL

62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3/8 VCL41 111.5 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 30 50 93.5 41 13.5 17 36 25 23 M5 8 1/2 119 26 26.5 70 48 68 62 65.5 50.5 103 68 70 35 60 101 41 17.5 17 36 30 28.2 M5 8 3/4 Note) For class H 4 Direct Operated 2 Port for Oil Series VCL How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C L 2 02 01

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

V 2.5% F.S.

Series 10-V100 Rubber seal 3 port direct operated solenoid valve

x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 N.C.

CXT

cord 2.7 0.15mm2 X 3 cores (brown, black, blue) D-A96(V) D-A72(H) D-A73(H)(C) D-A76H D-A80(H)(C) D-A79W D-J79(C)(W) D-F7BV D-F7BWV D-F7BAL Oil proof vinyl cab tire cord 3.4 0.2mm2 X 2 cores (brown, blue) D-F79(W) D-F7P(V)(W) D-F7NV D-F7NWV D-F7NTL Oil proof vinyl cab tire cord 3.4 0.2mm2 X 3 cores (brown, black, blue) D-F7LF D-F79F Oil proof vinyl cab tire cord 3.4 0. 2mm2 X 4 cores (brown