XL

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

CQM

30 x 35 x 40 x 45 x 50 x 55 M3 x 30 x 35 x 40 x 45 x 50 x 55 M5 x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 7-5-6 7

Electric Actuator

M4 x 0.7 thread depth 6.4 28 ( ) 0.025 0 3H9 depth 3 3.5 39.4 (L) Cable length y 250 (37) A (Table traveling distance) Note 2) (113.5) 37 27 40 (41) [39] 39 [(41)] Stroke 4 [2] 2 [4] (2.4) 7 65 9.2 [Origin] Note 4) Origin Note 3) Motor cable (2 x 5) 46 6 20 33 40 Vacuum port M5 x 0.5 x 5 6.5 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Step motor Servo motor Cable length y 250 (155.5) 65 Motor

Escapements Series MIW/MIS

(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

With gasket is provided as standard. 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Symbol Cylinder side In the side of solenoid valve M5 01 M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) Elbow 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 F02 R 1/4 G 3/8 Note 2) Caution Control F03 F04 U10/32 N01 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 Note 1)

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

, M5 60.3 C3: One-touch fittings for 3.2 Manual override C4: One-touch fittings for 4 C6: One-touch fittings for 6 M5: M5 thread (C3,C4,C6) 47.5 9.5 (M5) 26.5 25.5 5.4 18.5 5 23.2 Mounting holes 10 (47.5) 3-M5 X 0.8 P, R port 9.9 9.9 5 1 3 2-PE port 22.2 Die cast hole For manifold gasket positioning L plug connector (L): VQZ122 wLwC3, C4, C6, M5 0 1 M plug connector (M): VQZ122 wMwC3, C4

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

head set screw) 450.2 450.2 48 56 25 58 6.3 5 2-M4 x 0.7 thread depth 6 1 M4 x 0.7 x 14.5L and M4 x 0.7 (Hexagon bolt) (Hexagon nut) 9 M5 x 0.8 x 10L (Hexagon socket head cap bolt) 2-M5 x 0.8 (Through-hole) (Z) 2M5 x 0.8 thread depth 4.5 Note) 30 4M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46

Microspeed Cylinder

1.25 M14 x 1.5 JIS class 2 Standard stroke: mm M5 x 0.8 (10-32 nominal), Rc 1/8 M5 x 0.8 (10-32 nominal) 6 M3 x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 12 M6 x 1.0 M10 x 1.25 Female threads Rod end threads Female threads Rod end threads Male threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 Rod end thread tolerance

Compact Guide Cylinder

25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75

Compact Cylinder/Guide Rod Type Series CQM

85 90 115 140 55 60 65 70 75 80 85 90 95 120 145 M3 x 30L x 35L x 40L x 45L x 50L x 55L M3 x 30L x 35L x 40L x 45L x 50L x 55L M5 x 35L x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L M5 x 40L x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 110L x 135L M5 x 45L x 50L x 55L x 60L x 65L x 70L x 75L x 80L x 85L x 90L

EX120/121/122

M5 (mounting hole) 4 x M5 (mounting hole) Position indicator LED M3 Ground terminal Position indicator LED LINK OUT GATEWAY UNIT EX500 SERIES IN EX500 SERIES GATEWAY UNIT (M12, 5 pins, socket) LAN PE PE PWR PWR LINK LINK SOL 100 L RUN OUT Power source connector Note 1) MS L ERR.

High Vacuum Angle Valve, XL Series

10 -6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DNA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

J (mm) DRB 7 8 12 12 17 NA Model PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 42 50 69.5 PB 24 27 44.5 55 75.5 PC 8 10 11.5 14 14.5 PD 4.5 6 7 8.5 11 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 14.5 19 28.5 35.5

Magnetically Coupled Rodless Cylinder

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

B Counter bore depth C 2-P (Piping port) T Y HP L 0 -0.1 4-J x E TC X F WP D GW QW PW 7 GP 4-LD 2 x 4-MM Thread depth M Switch rail W K Plug HS Q + Stroke G G HR CR Z + Stroke CY3R25, 32, 40 CY3R15, 20 (mm) Model CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 J x E M5 x 0.8 x 7 M6 x 1 x 8 M6 x 1 x 8 M8 x 1.25 x 10 M8 x 1.25 x 10 A 10.5 9 8.5 10.5 10 HC 31 38 43 54 66 HP 17 24 23.5 29 36 HR 30 36 41 51

Modular Type Air Filters Series AF

0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

34 18.5 12.6 9.2 35 4.5 7.5 29h9 29.5h9 14H9 5.3 2.5 4.2 10 3.3 6 3.5 2.2 5.3 4 M5 x 0.8 M4 x 0.7 3 5.5 38 23 15.5 10.5 40 4.5 9.5 33h9 34 h9 17H9 5.3 2.5 4.2 10 4.2 7.5 4.5 2.5 6 4 M5 x 0.8 M5 x 0.8 7 5.5 45 30 18.4 12.2 50 5 7 39h9 40 h9 20H9 6.5 2.5 4.5 11.5 4.2 7.5 4.5 2.5 6 5 (mm) JJ M3 x 0.5 M3 x 0.5 M3 x 0.5 M4 x 0.7 JK JU M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 P M3 x 0.5 M3 x 0.5 M3 x

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200