0.01

P P P P T T T T U T U U U U E L E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3

Vacuum Unit Ejector / Vacuum Pump System

Note 13) When D is selected, select P for (8) Options for the single unit model. Cannot be selected when (4) Wiring is N.

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

HRX-OM-T002

Setting of the selected alarm Setting range: AL.01 to AL.51 to 63. Press the [MENU] key once. Returns to the main display (which shows the circulating fluid temperature).

Digital Pressure Switch ( compatible)

Direct parameters page 1 DPP1 address Access Parameter name Initial value (dec) Contents 0x07 R Vendor ID 0x0083(131) SMC Corporation 0x08 0x00022A(554) 0x00022B(555) 0x00022C(556) 0x00022D(557) 0x00022E(558) 0x00022F(559) 0x000230(560) 0x000231(561) ISE20C-L(-M)-* ISE20C-L-P-* ZSE20C-L(-M)-* ZSE20C-L-P-* ZSE20CF-L(-M)-* ZSE20CF-L-P-* ISE20CH-L(-M)-* ISE20CH-L-P-* 0x09 R Device ID 0x0A 0x0B

Series AK1000

Refer to gauge guide (P.94,95).

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

Soft Start-up Valve

The combined sonic conductance of the inlet sides (P port sides) piping or equipment should be equal to or larger than the values below.

Guide Cylinder Series MGG

M 4 x O T Q 2 x P (Rc, NPT, G) AH AG S W K B U L I AL 4 x AK hole AP A R AA J V AI X AB Y + Stroke AJ Z + Stroke AG For 4 x AO MGJ AN MGP AI Cutout window AM MGQ 100 piston rod end connection MGG Mounting dimensions MGC MGF MGZ (mm) MGT Bore size (mm) 63 80 100 Stroke range (mm) A AA AB AG AH AI AJ AK AL AM AN AO AP B I J K L M N O P 75, 100 125, 150 200, 250 300 200 25 25 228 250 158 180

LX Series Compact Electric Actuators

$0Pi8$ I)(P _ uomlam neouil nctun loxt Fifl.[r[ $$or tE L X P B T I o.l O",u*o, "r,"p"f i?'Ic.dffiAil a Number ot auto switch t1--'l-G'l [?

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

MGG

BA 32 BA 04 BA 05 BA 06 BA 08 BA 10 BA 01 BA 02 BM1 01 BM1 02 BM1 32 BM1 04 BM1 05 BM1 06 The following stainless steel mounting screw kits (including set screws) are available for use depending on the operating environment. (Order the mounting band separately, as it is not included.)

AWG

Port size Symbol 20 30 40 Mounting Angle of Pressure Gauge 01 02 03 04 1/8 G4 G3 G2 G1 Symbol 1/4 270 180 90 0 Mounting angle 3/8 1/2 MPa IN OUT IN OUT IN OUT IN OUT Mounting angle view MPa MPa MPa JIS Symbol P P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to AWG20K/30K/40K Possible to change to the optional mounting angles.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

How to Order Series ZSE40A(F)/ISE40A 2-Color Display High Precision Digital Pressure Switch ®

2-Color Display High Precision Digital Pressure Switch How to Order Series ZSE40A(F)/ISE40A Rated pressure range ISE40A 14.5 to 145.0 psi ISE40A 01 X P For positive pressure For vacuum/ compound pressure ZSE40A 01 Y P Made to Order Specifications/Description Lead wire length 3 m M12 4-pin pre-wired connector (Lead wire length 100 mm) Symbol X501 Rated pressure range Option 2 ZSE40A ZSE40AF

Digital Pressure Switch

vacuum) (compound) (positive pressure) Rated pressure range 0.0 to -101.0 kPa -100.0 to 100.0 kPa -0.100 to 1.000 MPa Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Withstand pressure 500 kPa 500 kPa 1.5 MPa Minimum display unit 0.1 kPa 0.1 kPa 0.001 MPa Applicable fluid Air, inert gases and incombustible gases Power supply voltage 12 to 24 VDC 10%, ripple (p-p

VER2000/4000

OFF state { A R1 (Exhaust air) P B (Supply air) F1 < F2 condition: See figure q. ON state { { Immediately after turning on F1 > F2: See figure e.

VCL

LVC DIN terminal: D Conduit terminal: T Cable 6 to 12 LVA F S Q 27.5 34 F (Q) LVH LVD LVQ LQ R C U 25 LVN C (44) R E R TI/ TIL G1/2 E PA G1/2 A H D (S) B B A H D 2-P Port size 2-P Port size PAX 2-M Thread depth N 2-M Thread depth N PB L L K K N.C.

Ionizer

Nil P NPN specification PNP specification Cable full length 1 m 2 m Symbol 01 02 Individual Special Order (Please contact an SMC sales representative.) Note 1) 11 m or longer power supply cables are not CE Marking-compliant. Note 2) Use standard power supply cables for 3 m and 10 m lengths.

Vacuum Unit Ejector / Vacuum Pump System

Note 13) When D is selected, select P for (8) Options for the single unit model.