MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

Stopper Cylinder Adjustable Mounting Height Type Series RSG

U A 38.2 Auto switch mounting positions Auto switch mounting height (mm) D-C7 D-C8 D-H7 D-H7W D-H7F D-H7BAL U D-C7 D-C8 D-C73C D-C80 Auto switch model D-H7W D-H7F D-H7BAL D-H7 D-H7C D-C73C D-C80C D-H7C Bore size (mm) A B A B A B U U 40 22.0 26.0 21.0 25.0 19.5 23.5 35.0 38.0 37.5 50 30.0 18 29.0 17.0 27.5 15.5 40.5 43.5 43.0 26 Series RSDG Auto Switch Internal Circuits Lead wire colors inside

AC Servo Motor Driver (Pulse input type)

(N) and (P+) (N-)) of the main circuit converter is displayed. 0900 V 62 - 6.

COQ2BP

S: B Throo h hole standard A Both ends ta d L Foot mount F Rod side Iia e Head side flan e Type of Auto Switch , No auto SWitch built in (high magnetic Bore Size D Clevis mount . ~ field resIstance ma net 50 50mm P7G 0P10 63 63mrn l'l14C D-P74 80 80mm i P7 D-P75 Cylinder Stroke D-PS P8!

CXS

75 45 8 16 4 30 16 18.5 56 80.5 10 Symbol Z Stroke Bore size (mm) 10, 20 30, 40, 50 75 100 15 20 25 32 25 35 45 55 30 40 60 60 30 40 60 60 40 50 70 70 8-28-26 26 Series CXSJ Dual Rod Cylinder: Compact Type Proper Auto Switch Mounting Position (Detection at stroke end) CXSJ6/10 Auto switch model Bore size (mm) Operating Range B D 32 9 6 5 10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5

CXS

) Operating Range B D 32 9 6 5 10 6 15 6 20 7.5 25 8 D-A9/A9V D-F9W D-F9WV 4.5 2.5 3 3 5 5 5 D-F9BAL D-M9, D-M9V 2.5 3.5 3.5 5 5 2 2.5 3 4 4 4 MX The operating ranges are provided as guidelines including hystereses and are not guaranteed values (assuming approximately 30% variations).

Series 10-, 21- AF-A Air Filter

Fittings & Tubing Air Cylinders Rotary Actuators Bracket (Option) Bracket (Option) R R V Q V Q IN OUT B C IN OUT Clearance for maintenance G B C 2 x P (Port size) 2 x P (Port size) Hexagon width across flats 14 1/8 Drain Hexagon width across flats 17 1/4 E A Clearance for maintenance G Drain A AF50/60-A 1021J D M U S N T Bracket (Option) R V Q C B IN OUT 2 x P (Port size) Hexagon width across

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

40 30 20 10 Step 1 Check the speedwork load.

Vacuum Filter AFJ Series

Optional specifications Bracket mount P A B C D E G J M N Q R S T U V AFJ20 1/8, 1/4 40 79.2 9.8 20 25 20 30 27 22 5.4 8.4 40 2.3 28 AFJ30 1/4, 3/8 53 104.1 14 26.7 30 35 26.7 41 35 23 6.5 13 53 2.3 30 AFJ40 1/4, 3/8, 1/2 70 136.1 18 35.4 38.4 40 35.4 50 52 26 8.5 12.5 70 2.3 35 785 AFJ Series Specific Product Precautions 1 Be sure to read this before handling the products.

LG1H

D: Resting time (0.4sec.)

High Vacuum L Type Valve

Bonnet assembly/Part indication number (1) Temperature specifications Indicator Valve size 16 25 40 50 General use Without XLA16-30-1-2 XLA25-30-1-2 XLA40-30-1-2 XLA50-30-1-2 With XLA16A-30-1-2 XLA25A-30-1-2 XLA40A-30-1-2 XLA50A-30-1-2 High temperature Without XLA16-30-1H-2 XLA25-30-1H-2 XLA40-30-1H-2 XLA50-30-1H-2 With XLA16A-30-1H-2 XLA25A-30-1H-2 XLA40A-30-1H-2 XLA50A-30-1H-2 Temperature

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

System construction status No.0 No.1 No.2 No.3 No.4 No.5 No.6 No.7 No.8 No.9 End EX600 EX600 EX600 EX600 EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -DX#D EX600 -SEN3 plate -LAB1 -LAB1 -LBB1 -LBB1 -127No.EX-OMX1011 (6) When unit diagnostics is generated, the diagnostic information is displayed on the [SYSTEM CONFIGURATION STATUS] screen.

CYV

Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

VT307

with VT301 for mounting) VV307-01-3--F P = 26 (Applicable cable O.D.)

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, D-F9WV D-M9 , D-F9W D-A9V D-F9V D-M9N B P D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.

CJ2Q

-3. 10 15, 30, 45, 60, 75, 100, 125, 150 Refer to p.0-39 to 0-46 before handling. 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 16 1.3-53 Series CJ2Q Mounting Accessories/Refer to p.1.3-12 for details.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

External gripping force Internal gripping force MHS2-16D MHS2-16D 30 Pressure 0.6MPa Pressure 0.6MPa 30 0.5MPa 0.5MPa Gripping force N Gripping force N 20 20 0.4MPa 0.4MPa 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa F 0 0 15 20 15 5 5 10 10 20 25 25 30 30 F Gripping point L mm Gripping point L mm MHS2-20D MHS2-20D 60 60 Pressure 0.6MPa Pressure 0.6MPa Gripping force N External gripping Gripping force

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

HRX-OM-T004

31 30 33 46 42 0D 0A Read Address Quantity to Read Hi Lo Hi Lo 30 30 30 30 30 30 30 31 Response message (Slave to Master) Start Slave Address Function Data LRC End 3A 30 31 30 33 30 43 0D 0A Byte Count Read Data1 Hi Lo 30 32 30 30 45 45 HRS090 Series 4.5 Message configuration 4-9 HRX-OM-T004 Chapter 4 MODBUS communication function 4.6 Function codes Table 4.6-1 shows function codes to read