CU

11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions and Heights for Stroke End Detection D-A9 D-F9 D-F9W A 22 (24.5) 2.8 0.5 B W The dimension in ( ) is for D-A93 type.

Mechanical Valves Series NVM, NVFM, NVZNI

) r 0 6 l27l 1 2 6 (32\ 1 4 2 136t 1.20 30 5, , 2 4 (6) Millimoters in Parentheses Millimetec in Parenlheses NVFil2so-N024 NVFIrt250-N02-36 F O_F.. 5.07lbs. (2 3 Ks) T T '75 PSIG (5 Kgt/cm2) A H c D tr F u H J K M N o 6 6 8 160 6\ 5 4 6 138 6) 1 5 7 (40) 1 2 2 (31) 0 0 6 (1 5) o 1 2 (3) 0 9 4 23 9) 1 5 7 (40) 1 0 6 (271 1 4 2 (36) 1 2 6 t32\ 1 2 0 30 5) , 2 t (6) A B D E F G H J K M N 6 8

High Vacuum Angle Valve

0 CE-compliant u Electrical entry y Rated voltage i Light/surge voltage suppressor CE-compliant 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC Nil Q CE-compliant Nil None S With surge voltage suppressor Z With light/surge voltage suppressor G Grommet (Lead wire length 300 mm) H Grommet (Lead wire length 600 mm) L L type plug connector

HRX-OM-O021

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-O021 Contents 6.2.1 Option M [DI water (Pure water) piping] . 6-2 6.3 Optional Accessories [Electric resistivity /conductivity sensor set] . 6-2 6.3.1 Optional Accessories [Electric resistivity/conductivity

AR20-B to AR60-B

and pressure gauge in SI units: MPa g Pressure unit f Pressure unit Z*5 Name plate and pressure gauge in imperial units: psi *6 *6 *6 *6 *6 Z*4 Name plate and pressure gauge in imperial units: psi *5 *5 *5 *5 *5 *5 *1 Options B, G, H are not assembled and supplied loose at the time of shipment. *2 Assembly of a bracket and set nuts (AR25-B to AR40-B) Including 2 mounting screws for the AR50

KP/KPQ/KPG

D Plug-in Reducer: KPR D Applicable tubing Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPR04-06 3 20.1 39.4 6 4 10.4 18 4 4 KPR04-08 4 41.9 20.2 8 KPR06-08 42.5 20.8 4 6 12.8 19.5 10 10 Applicable fitting size d KPR06-10 21.2 5 45 10 KPR08-10 5 23.2 47 8 15.2 21.5 26 18 KPR08-12 6 48 23.2 12 d 10 KPR10-12 18.5 24 41 29 50.5

Series KP/KPQ/KPG

D Plug-in Reducer: KPR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPR04-06 6 4 10.4 18 4 4 41.9 20.2 4 KPR04-08 8 42.5 20.8 4 KPR06-08 6 12.8 19.5 10 10 Applicable fitting size d 45 21.2 5 KPR06-10 10 47 23.2 5 KPR08-10 8 15.2 21.5 26 18 48 23.2 6 KPR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPR10

Series KP/KPQ/KPG

D Plug-in Reducer: KPR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPR04-06 6 4 10.4 18 4 4 41.9 20.2 4 KPR04-08 8 42.5 20.8 4 KPR06-08 6 12.8 19.5 10 10 Applicable fitting size d 45 21.2 5 KPR06-10 10 47 23.2 5 KPR08-10 8 15.2 21.5 26 18 48 23.2 6 KPR08-12 12 d 10 18.5 24 41 29 50.5 25.7 9 KPR10

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c e p S h c t i w S t

Title not found

One of countless combinations is shown below. 11/16 1/2 Number of Branches Barb Size May be #4 thru #10 Fitting Series IRM6 to 2 x 3 4 x 2 15/32 Mixed Barb Sizes available #1 thru #4 15/16 Ordering example above shows #6 barb inlet with 5 outlets three #2 branches; two #4 branches IRM 6 to 2 x 5 IRM 6 to 4 x 3 IRM 6 to 4 x 4 13 60 Y Fittings Note: Other Y sizes are available 80 60 7/16

VT317

VQ VKF Surge voltage suppressor mounting part (For G) VQZ VZ VS VFN Surge voltage suppressor Electrical entry G Grommet, 300 mm lead wire H Grommet, 600 mm lead wire C Conduit JIS Symbol T Conduit terminal D DIN terminal Rated voltage 50 60 1 2 3 100 VAC, Hz 200 VAC, Hz 110 VAC, Hz 220 VAC, Hz 50 60 50 60 4 50 60 5 6 24 VDC 12 VDC 7 240 VAC, Hz 50 60 9 Other Option Manifold Accessory

Series VCL

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

VK300

[Option] Electrical entry D: DIN terminal DO : DIN terminal (Without connector) G: Grommet (Lead wire length: 300 mm) H: Grommet (Lead wire length: 600 mm) Rated voltage Valve option Rated voltage Nil V Y W E DC AC CE-compliant 1 2 3 4 5 6 7 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz For the connector part number, refer to page

CL

128 142 3 3 3 3 50 57 60 68 62 70 74 84 25 28 28 33 6 6 6.6 6.6 4 4 4 4 63.5 74.5 74.5 83 3 3.5 3.5 4 10 10 10 10 15 15 16 16.5 7 7 8 8.5 20 25 32 40 For long stroke, refer to page 9-2-32.

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

High Pressure Coolant Valve

VNH1 VNH2 VNH3 VNH4 VNH1-16 VNH2-16 VNH3-16 VNH4-16 Description Bracket (With bolt and washer) B How to Order Pilot Solenoid Valves VO307 1 Q D 5 CE-compliant Nil Q CE-compliant Rated voltage 2 200 VAC 50/60 Hz 1 100 VAC 50/60 Hz Light/surge voltage suppressor CE-compliant 3 110 VAC 50/60 Hz D DIN terminal DZ DIN terminal with light/surge voltage suppressor 4 220 VAC 50/60 Hz 5 24 VDC 6

HRX-OM-W060

6.

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

flats C G E H B NN Effective thread length T (R) NA Q N F NA I F N CC 0.1 + 12-CY3B50, 63 12-CY3B6 to 15 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting