MU

-X +0.058 0 +0.058 0 +0.058 0 +0.070 0 3 4 5 6 13 14 17 23 18 22 26 32 9 11 13 16 8 10 10 14 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 8 10 10 16 21 24 27 39 8.5 10 11 16 11 14 15 20 8.5 10 11 16 19.5 24 26 36 CD-MU02 CD-MU03 CD-MU04 CD-MU05 9 11 13 16 20Knuckle pin and snap ring are included.

CG1

A CM2 NZ L NX A1 E1 U1 L1 MM R1 ND +0.058 0 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 20 25, 32 40 50, 63 80 100 8.5 16 20 22 28 38 44 25 30 30 40 50 55 M8 X 1.25 10.3 11.5 14 14 20 27 31 34 41 42 56 71 79 8 10 10 14 18 22 8 10 18 22 28 32 10.5 14 18 21 21 M10 X 1.25 M14 X 1.5 M18 X 1.5 M22 X 1.5 M26 X

CY1

6 e #1 @9 #0 i !0 !3 !1 !

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Table of Contents

The system comes in an type SA (generic for small scale systems) for equipment with a small number of I/O points, or 32 points max., type SB (applicable to Mitsubishi Electric models) for controlling 512 I/O points max., type SC (applicable to OMRON models), and type SD (applicable to SHARP models; 504 points max.). 16 stations max.

VQ7-6/7-8

0 t t r i w e r i u w y e q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

Rotary Clamp Cylinders

2 @0 i o e @3 @1 !1 o t y u w q r !9 @2 @5 @4 !

CE

0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

1

Voltage drops at the value of r x I. PS1000, PS1100 Caution 1 to 5 [V] Current I Lead wire resistance r The load current range for a PS1000 and PS1100 is between 5 [mA] to 40 [mA]. If 40 [mA] is exceeded the output transistor could be damaged. Besides, do not connect a PLC, which can detect 1 [mA], since there is a leak current of 1 [mA] in OFF state.

Siiiil"Tivrc

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Rotary Table/

(mm) I. D.

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

Speed Controller: Standard Type Series AS In-line Type

0 i y r u e t r i !0 q y !3 !2 !1 o w !3 e t w o u !4 y q !2 AK ASS ASR ASF Meter-in type M5 type U10/32 port AS3210-02 Component Parts No. Description Material Note No. Description Material Note Body A O-ring Zinc alloy NBR q i Body B O-ring Electroless nickel plated Brass NBR w o Needle Bushing Electroless nickel plated Brass PBT e !

VQ7-6/7-8

0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

DOC1020530

Wiring . 6 2.1 Power supply wiring . 6 2.2 I/O signal connection . 8 2.3 Forced stop deceleration function . 9 3.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Ambient Dryer Series AMG

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Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

CV/MVGQ

A1 L1 MM U1 A E1 R1 C J G5-S Polished round 12 50, 63 Y-05C 3 x 18l 16 + 0.3 + 0.1 27 28 60 M18 x 1.5 15 55.5 27 12 38 I-04 I-05 I-08 I-10 40 50, 63 80 100 + 0.070 0 12 0.1 0.3 16 69 22 24 55 M14 x 1.5 15.5 20 CV Polished round 18 80 Y-08C 4 x 25l + 0.070 0 12 0.1 0.3 16 74 27 28 60 M18 x 1.5 15.5 20 28 + 0.3 + 0.1 37 36 71 M22 x 1.5 19 76.5 28 18 55 + 0.070 0 18 0.1 0.3 28 91 37 36 71 M22