LFE-OMZ0011

. -33No.LFE*-OMZ0011 # List of output mode Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) Instantaneous flow Accumulated increment output mode Accumulated flow Count up from "0". Turns ON when the set value is reached Return to the set value by reset.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M RHC Boss-cut MK(2) RS Q G RS H A RZQ ZZ + Stroke MI W S CEP1 CE1 (mm) CE2 AL B1 B2 D E F G H H1 H2 I K MM N NA NN P S ZZ A Bore size (mm) 20 25 32 40 0 0.033 0 0.033 0 0.033 0 0.039 18 15.5 13 26 8

CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CM2YB Width across flats B2 2-P (Port size) (Rc, NPT, G) 2-NN H1 H2 G G RE A B Width across flats B1 I REC 2-Eh8 D CX MM AL A F F NA 1.5 1.5 CY N N K H S + Stroke ZZ + Stroke MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Boss-cut MK(2) RS

Speed Controller with

Applicable tube Inch Size Tube size 5/32" 1/4" 5/16" 3/8" 1/2" 01 03 07 09 11 13 Applicable series 1/8" TMH-01J TMH-03J TMH-07J AS1002F AS2002F AS2052F AS3002F AS4002F TMH-07 TMH-09 TMH-10 TMH-13 Dimensions Model Metric size Inch size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Symbol TMH-01J TMH-03J TMH-23J TMH-04J TMH-06J 1/8J 4 5/32J 6J 1/4J 6 1/4 8 5/16 10 12 1/2 8.5 9.4 11.7 12.1 13.1 13.5 15.5 18.8

,,: ,.

.81 .220 g8 1t4 5/8.18 .89 .86 .283 U8 3i8 5/8-18 .91 .93 .283 3ri8 112 Consult factory tor inlormation 112 3/8 u4-16 1 .06 .95 .408 112 1t2 3V416 1.00 .97 .406 5/8 112 7lS-14 1.21 1 . 1 6 .502 Steel Terminal Bolt: FEMALE BULKHEAD' * Zinc Dichromate Plating '-Consult tactory lor inlormation SteEI Terminal BoIt: MALE BULKHEAD* * Zinc Dichromate Plating "Consult lactory for information \ H1 H2

Proposals for Energy Saving

D M L2 L1 (mm) H1 Width across flats Minimum bore H2 Width across flats Effective area mm L2 When connected Model Applicable hose I.D.

Smooth Cylinder/Low Speed Cylinder

-X 1191 Series CM2Y Basic Style (B) CM2YB Bore size Stroke H1 H2 G G 2 x NN 2 x P (Rc, NPT, G) Width across flats B2 Width across flats B1 I 2 x Eh8 NA D Effective thread length 2 x FL Width across flats KA MM AL A F N N K NA 1.5 1.5 S + Stroke F H ZZ + Stroke Boss-cut ZZ + Stroke (mm) B1 FL K KA N NA NN P S B2 D H2 I MM ZZ E A F AL G H H1 Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20

CV/MVGQ

RB J Stroke range QY H H1 H2 HX I K MM N NA NN S ZZ F Q Eh8 B1 B2 D AL A Bore size (mm) 20 25 32 40 Up to 300 19.8 14 41 5 8 65.3 28 5 M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12

Table of Contents

(Hexagon width across flats) (Hexagon width across flats) H2 H2 (Hexagon width across flats) (He (Hexagon width across flats) xagon width across flats) (Hexagon width across flats) D3 L5 A1 D1 A2 T1 Metric Size L4 Weight (g) AS A2 A1 M L3 L2 L1 d T1 D1 D2 H2 H1 Max.

Floating Joint

Dimensions Center of sphere M H2 M D2 D1 J F H1 B E P R G Rod end nut A One rod end nut is supplied with the JS series. If additional nuts are needed, please order them using the part no. shown below. (mm) d: Nominal thread size Model M22 x 1.5 M26 x 1.5 H 13 16 32 41 B C 37 47.3 Order no.

XLAQ/XLDQ

High-temperature type (Temperature specifications/ H0, H2, H3) 1. In models with heater (thermistor), take care not to damage the insulation components of the lead wires and connector section. 2. The setting temperature for models with heater should be established without a draft or heat insulation.

One-touch Fittings

-02m1 M14 x 1 17 17 28.4 14 9.7 12 15 13.3 13.1 10.4 4.5 32.4 3/8 KQ2E06-03m1 M14 x 1 19 17 30.7 16.3 9.7 12 15 13.3 13.1 10.4 4.5 35.9 Connection thread Rc L1 M L2 m: A (Brass), N (Brass + Electroless nickel plating) Release button dimensions X Y Bulkhead Male Elbow: KQ2LE 2 x Applicable tubing B M H1 (Width across flats) H2 (Width across flats) B E D Effective area [mm2] Min. port size

CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

AS

L5 (1) L5 (1) L4 Mass (g) Mass (g) Panel-cut dimensions Panel-cut dimensions H1 H2 d D1 D1 L1 L2 L3 M d H1 L1 L2 L3 M H2 Model Model Max. Min. Max. 34.4 Min.

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

RB/RBL/RBQ

With cap SR 6.8 8.7 12 18 25 B 6.5 9 12.5 16 21 A MM h M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 B 4 4 6 6 6 C 12 14 19 27 36 MM B M8 x 1.0 M10 x 1.0 M14 x 1.5 M20 x 1.5 M27 x 1.5 C h1 h2 d f RBC08C RBC10C RBC14C RBC20C RBC27C RB08J RB10J RB14J RB20J RB27J RB08S RB10S RB14S RB20S RB27S 6 7.5 10 20 25 12 14 19 27 36 13.9 16.2 21.9 31.2 41.6 6.5 8 11 16 22 23 23 31 40 51 9 11 15 23 32

Air Slide Table Series MXP

Tapped on Body Side MXU MXP6, MXPJ6 MXP8, 10, 12, 16 l D D H1 H1 MXS Body MXQ Max. tightening torque N m Max. screw-in depth l (mm) Model Bolt D D H2 H2 MXF MXP8 MXP10 MXP12 MXP16 1.2 1.2 2.1 4.4 M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 4 5 6 8 MXW Pinhole diameter Pinhole depth Model H1mm H2mm D 2.5 2.5 3 3 3 4H9 0 +0.030 MXPJ6 MXP6 MXP8 MXP10 MXP12 MXP16 MXJ 2.5 2 1.

Speed Controller with

D1 D2 H1 H2 H3 H4 H5 L1 L2 L3 Symbol Metric size Inch size TMH-23J TMH-01J 8.5 3.3 4.5 4.6 7.5 6 12 7.2 6.6 18 1/8J TMH-04J TMH-03J 9.4 4 5/32J TMH-06J 11.7 3.3 6.3 6.4 9.3 7.7 15.4 8.5 8.3 21 6J TMH-07J 12.1 1/4J TMH-06 13.1 4.3 7.1 7.2 11.1 10 20 11 10.6 26.5 6 TMH-07 13.5 1/4 TMH-08 TMH-09 15.5 8 5/16 TMH-10 18.8 4.3 9.5 9.6 13.5 14 28 14.2 14.6 34 10 TMH-12 21.2 12 TMH-13 22 1/

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Ar CClF3 Argon Halocarbon 13 C2Cl2F4 CF4 Halocarbon 114 Halocarbon 14 C2ClF5 CH2F2 Halocarbon 115 Halocarbon 32 C2F6 CH4 Halocarbon 116 Methane C2H2 CHF3 Acetylene Halocarbon 23 C2H2F4 CO2 Halocarbon 134A Carbon Dioxide C2HF5 H2 Halocarbon 125 Hydrogen C3F8 He Halocarbon R218 Helium C3H6 Kr Propene Krypton C3H8 N2