1

How to Order X214 01 S AS 2 2 0 0 Body size Option Port size Model Thread type Control method Speed Controller with One-touch Fitting Elbow Type, Metal Body/Series AS Refer to How to Order in page 15-9-43 for standard specifications. How to Order X214 2 2 1 01 06 S AS 1FG Body size Option Applicable tubing O.D.

SMC Wireless System PROFINET compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WPN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (8 points) (with broken line sensor) 1 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#

High Purity Chemical Valve

LVN Valve type Material TL/TIL 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

SMC Wireless System EtherNet/IP ® compatible

Input Output EX600-W### (32 points) 0 1 4 EX600-W### (24 points) 01 3 Wireless unit WEN WSV EX600-W### (16 points) 01 2 EX600-W### (8 points) 01 1 EX600-W### (0 point) 0 1 0 EX600-DX#B (8 points) 1 0 EX600-DX#C (8 points) 1 0 EX600-DX#C1 (16 points) 2 0 Digital input unit DX EX600-DX#D (16 points) 2 0 EX600-DX#E (16 points) 2 0 EX600-DX#F (16 points) 2 0 EX600-DY#B (8 points) 0 1 EX600-DY

Prevents Micro-Bubbles

VX3 Valve type Material VXA 0 1 2 N.C. N.O. Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

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8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

HRX-OM-X010

HRZ Series 5.3 Operation Screen 5-5 5-5 HRX-OM-X010 Chapter 5 System Operation 5.3.3 Status screen 2 POWER ON 2 1 3 4 Figure 5-5 Status screen 2 Table 5-4 Status screen 2 No.

45

8 stations 4 stations 02 2 stations 02 2 stations 02 2 stations (2) (2) (2) Applicable up to 20 solenoids.

IDX-OM-W023

. 2-2 2-2-3 . 2-2 2-2-4 . 2-3 2-2-5 . 2-3 2-3 . 2-5 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 () . 4-1 1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 6 6-1 . 6-1 6-2 GWP . 6-3 6-3 . 6-4 6-4 . 6-5 6-5 . 6-7 7 C 7-1 . 7-1 7-2 . 7-1 8 K 8-1 . 8-1 8-2 . 8-1 9 L 9-1 . 9-1 9-2 . 9-1 9-3 . 9-2 9-4 . 9-2 10 M 10-1

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

HRX-OM-I051

Brake lever Caster w/ brake (2 pcs. on the front) M12 anchor bolt M8 nut (2 pcs.)

4-channel Flow Monitor ( compatible)

seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 -8No.PF-OMA1011-A Summary of Product parts Names of individual parts Operation light (Orange): Lit when OUT is ON.

90

Common supply (PV) port 1 Metric size: 2 x 8 D Inch size: 2 x 5/16" 2 x Common supply (PD) port 4 62 53 37.4 C 38 8.4 B 26.4 2 x Common exhaust (EXH) port 2 3.5 n x Individual exhaust (EXH) port 3 10.5 n x Vacuum (V) port (Built-in suction filter) (n1) x 15 15 33 (mm) Number of stations Hexagon width across flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08 07 09 9.7 12.3 8.3 11.4 10.8

Multi-channel Digital Sensor Monitor ( compatible)

Panel mount adapter ZS-26-B With set screw M3 x 8L (2 pcs.) and waterproof seal Panel mount adapter + Front protective cover ZS-26-C With set screw M3 x 8L (2 pcs.) and waterproof seal Front protective cover ZS-26-01 48 conversion adapter ZS-26-D It is an adapter for attaching PSE200A series in the panel cut size of PSE100 series. -8No.PS-OMW0012-C Summary of Product parts Names of individual

S Couplers Series KK/KKH/KK13

R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

ZQ-OM01401

) (6) (7) D 7)VQ100 Ass yP.41 (2)Q2 (3)LO 8)(2)J1,J2Q2 P.8 (3)C 7 - No.ZQ-OM01401-B ZZQ108A-L O C-A (1) (2) (3) (4) (3) (PD) (1) B (: P ) 01 1 2 (: PD ) C 02 2 2) (10) S (4) : 08 8 (2) (PV) 1) 3 A L 3)Assy R 1) V PV PS 1 1) V V (2)PV (3)PD PS PV PD PS PV PD L B C R B C 8 - No.ZQ-OM01401-B 2. 2.1 () (PE) (2 ) (P) (V) (PS) (PV) V 9 - No.ZQ-OM01401-B

Modular Type Air Filters Series AF

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal AC Metal

One-touch Fittings

(See Fig. 2.)

3 Port Solenoid Valve

(Single) 2 pcs.

ZQ-OM01301

ZQ-OM01301-A Vacuum Pump System Manifold ZZQ108A-S O C-A (1) (2) (3) (4) (3) Vacuum release pressure supply port (PD port) (1) Number of stations B None (Release pressure is 01 1 stations supplied from the P port.) 02 2 stations C Note 2) Provided (Breaking pressure: Supplied : from D port) 08 8 stations Note 2) Select S for the Option Symbol (10). (4) Shipping condition (2) Vacuum pressure