AS-FG

Note1) Metric size Inch size 02 2 23 3.2 Note 2) 01 1/8" 03 5/32" 07 1/4" 04 4 06 6 Note 1) For selecting applicable tubing O.D., refer to the Model on page 667. The color of the release button is white (metric, inch). Note 2) Use 1/8" tube.

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17 I I 28 Fitting View A TSJ'/4 50 (44) (Tube Swaged Joinl) 4-%4.5 With bracket 39 , ~ oiL ' -"t~l=r 12.3 l 28 ,-16-4,SHIMBASHI,MINATO-KU,TOKYO 'OS,JAPAN Tel:03-3502-2740 Fax:03-5251-7240 SMC CORPORATION l si printing June 1995.0-036,P-56(M) Augus< 1996, 45(RP) Specllications are subJeclto change without poor notICe Printed in Singapore and any obhgatlOn on the pari of the manufacture.

Manifold Regulator ARM1000/2000 Series

Note 4) When a regulator is not mounted on the manifold, use the following blank plate assembly (with mounting screws and O-ring) For ARM1000: Part no. 136114A For ARM2000: Part no. 136214A VBA VBAT AP100 ARM2000-4A2-01G Option / Pressure Gauge: G15-10-01 How to Order Symbol Individual IN Common IN G15 10 01 IN 1 Max. display pressure OUT IN 2 1 2 OUT 10 1.0 MPa Not able to set the pressure

AS-X785

200 S AS 01 X785 Pilot port Port size Body size Thread type Seal method 2 1/8, 1/4 3 3/8 4 1/2 Nil R, Rc G G Nil Without sealant (for G) S With sealant (for R) Cylinder side 01 1/8 02 1/4 03 3/8 04 1/2 * R thread type: With sealant G thread type: Without sealant Valve side Cylinder side 04 F 10 S AS4201 X785 Pilot port Thread type Seal method Nil R, Rc G G Nil Without sealant (for G) S With

Air Suction Filter ZFA Series

Example: In case of 6 stations of air suction filter ZFA100-01 ZZFA1-06 1 pc. (Brackets for 6 stations) ZFA100-01 6 pcs. (Air suction filter) 276

AS

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

5

= 2, 3, 4, 5) D-M9V 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9V 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9 D-A9 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9W 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9A 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7/A80 D-A7H/A80H D-A73C/A80C 5 10 15 + 10 (n 2) (n = 4, 6) Note 4) Rail mounting

Swivels

Nitrile Seals EP Seals Fluorocarbon Seals Size Kit Number Size Kit Number Size Kit Number -4/-6 RK-4/6N -4/-6 RK-4/6E -4/-6 RK-4/6V -8/-10 RK-8N -8/-10 RK-8E -8/-10 RK-8V -12 RK-12N -12 RK-12E -12 RK-12V -16 RK-16N -16 RK-16E -16 RK-16V D Swivels Quick Coupling Division 8145 Lewis Road Minneapolis, MN 55427 www.parker.com/quickcouplings D-33

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

(Pitch) P = 10 12.8 34.3 23.6 32.1 15.4 15.6 3/5 3/5 3/5 2 2 2 2 2 2 2 30.6 46.2 54.5 1 1 1 58.2 4 4 4 4 4 4 4 D D D M5 x 0.8 [4(A), 2(B) port] One-touch fitting [4(A), 2(B) port] Applicable tubing O.D: 2, 1/8" 4, 5/32" 6, 1/4" One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D: 8, 5/16" One-touch fitting (PE: Pilot EXH port) Applicable tubing O.D: 4, 5/32" 20.5 6.2 One-touch fitting

Fieldbus system EtherNet/IP compatible SI Unit

Content (IO size at each port) IO-Link master size setting No Process data size at each communication port Port 1 Port 2 Port 3 Port 4 44 byte 70 byte 134 byte 1 2/2/2/2 byte 2 2 2 2 2 4/4/4/4 byte 4 4 4 4 Can be selected 3 8/8/8/8 byte 8 8 8 8 4 16/16/2/2 byte 16 16 2 2 Can be selected 5 32/2/2/2 byte 32 2 2 2 Can be selected 6 16/16/8/8 byte 16 16 8 8 7 16/16/16/16 byte 16 16 16 16 8 24

Prevents Micro-Bubbles

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 VN Symbol 01 02 01 02 02 03 03 04 04 06 10 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Body class Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

High Purity Chemical Valve

Double acting Body Applicable option Actuator section End plate PPS Diaphragm Port size Symbol Note 1 2 3 4 Port size 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 1/2 3/4 1 Symbol 01 02 01 02 02 03 03 04 04 06 10 Body class LQ3 Stainless steel PTFE A 1 Note) Refer to Variations in the table below for valve type combinations.

Plug-in Unit

3(R) port 2-Rc 1/2 1(P) port 4-G 1/2 Conduit port VQC SMC SMC SMC SMC SMC SMC SMC SQ 95.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 77.5 90 72 VQ0 13 55.5 42.7 43.5 20.5 VQ4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 33.5 11.5 15.7 12 2-Rc 1/8 (Pilot exhaust port) VQ5 (6.5) 21.5 2-Rc 1/8 (External pilot port) 27 2n-Rc 1/4, 3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4

One-touch Fittings

[mm] Weight [g] X Y Nylon Urethane 4 M5 x 0.8 KQ2H04-M5G1 8 7.9 7.7 10 17.7 14.7 13.3 4 4 2.5 3.3 6 M5 x 0.8 KQ2H06-M5G1 10 9.9 9.7 12 17.7 14.7 13.3 4 4 2.5 4.1 *1 D Oval type M A L 4, 6 H *1: D is the body diameter.

S Couplers Series KK/KKH/KK13

R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1/4 1 1/4 Female thread type Female thread type Body size Port size Part no.

45

exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.

A-HEC-OM-J004

Set-up . 4-1 4.1 Set-up, Transport and Transfer. 4-1 4.1.1 Transport and Transfer . 4-1 4.1.2 Environment . 4-1 4.1.3 Set-up in Clean Room . 4-2 4.2 Piping . 4-2 4.2.1 Preparation of Cooling Water . 4-3 4.2.2 Quality of Cooling Water . 4-5 TOC-1 A_HEC-OM-J004-4 Table of Contents 4.2.3 Preparation of Recirculating Fluid .4-6 4.2.4 Draining the Recirculating Fluid .4-7 4.3 Wiring. 4-9 4.3.1

45

exhaust center One-touch fitting for 4 C4 5 3 position pressure center One-touch fitting for 6 C6 SX3000 Mixed M One-touch fitting for 4 C4 SI Unit Part No.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)