5 Port Solenoid Valve Series SV1000/2000/3000/4000

B C Base mounted plug-in Note) Refer to the S0700 series catalog (CAT.NAS11-88) for symbol.

HRX-OM-X010

7 System Maintenance . 7-1 7.1 Water Quality Management . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily inspection . 7-2 7.2.2 Quarterly inspection . 7-3 7.3 Storage . 7-3 7.3.1 Draining of circulating fluid out of tank . 7-4 HRZ Series TOC-3 HRX-OM-X010 Table of Contents 7.3.2 Draining of facility water. 7-5 7.4 Periodic Replacement Parts . 7-6 Chapter 8 Appendix . 8-1 8.1 Specification

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

5 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !6 MOT c Motor power connector (6 pins) !7 ENC v Encoder connector (16 pins) Axis 4: Connect the actuator cable. !8 MOT v Motor power connector (6 pins) !

Magnetically Coupled Rodless Cylinder

3 4.5 6 3 4 6 3.5 4.5 11 4.5 7 8 2.5 4 8 3 4 A B 9 10 9 9 11 6 6 5 5 6 C D Switches cannot be mounted in some cases.

Electric Actuator

6 @4 @7 o @0 $4$5 !0 !0 !3 u @3 !2 i e !7 r t w q y @6 When selecting the grease holding function LEYG Mll -llF: 50st or less 25 32 A B C LEYG M: 50st or less 16 25 32 LEYGlM #3 #4 #5 #6 #1 #8 #7 #2 LEYG Mll -llF: Over 50st 25 32 A B C LEYG M: Over 50st 16 25 32 Note) Felt material is inserted to hold grease at the sliding part of the slide bearing.

•

Width across flats 8 Wid th across flats 8 "1 WiJ :~coss f'ats 12 J~lross flats 1 0 If\ Ifl Wid w "' 'r ~ Miniature tube fitting(Series M5) \ Miniature tube fitting(Series M5) ", .,; ", w ~( Width across flats 7 C\J ~ Width across flats 7 ul>-I ;C 'J. f~ I~ ~ ~ c&.

0.4

%(#"& #7-#! 7-#! 7-#! 7-#! 7-#! 7-#! 7-#! : ( ! &"'6 &"'6 3!$ 3!$ 3!$ &"'6 &"'6 : ( ! 7-#! 7-#! &"'6 : ( ! : ( ! 3!$ 3!$ : ( ! 7-#! ++%A $ , . * ! !" #" ! -##!' -% !%(#"& #!"& &!#* (#$('" (-# 9-&"%( 2 !%(#"& #!"$ )(%! '-&-% "%6(#* $ -&$!$ '-1!% 4 5 &"'6 7-#! 4 5 8!&&-) &"'6 " (-# %& -##!' -% @7 "#.,"' .%!$ 02 B"+"# 1(" (-# C&!' %-#(' D#$. %2/ $ 4 5 %-)# 7-#!

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Cable length (L) [m] 3 3 5 5 A 10 C 20 LE-CYM-llA-l: Motor cable L 50 7 U V W G M4 Crimped terminal LE-CYB-llA-l: Motor cable for lock option L 50 7 3-M4 Crimped terminal LE-CYE-llA: Encoder cable L (60) (100) 12 (7) (32) D 19 5 3 1 6 4 2 25 Battery case Depth dimension: 25 mm Product no.

CV/MVGQ

7 !8 !

CV/MVGQ

7 !8 !

Series SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Base Mounted Metal Seal/Rubber Seal Series VQ

SI unit output and coil numbering 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

End 7 8 7.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Compatible cables Cord O.D.: 3.5 to 7 (Reference) 0.5 mm2, 2-core or 3-core, equivalent to JIS C 3306 Ground nut Tightening torque 1.65 to 2.5 Nm Holding screw Tightening torque 0.4 Nm Washer Grommet (Rubber) Housing (Rating symbol) Refer to table of DIN connector part no.

High Vacuum Angle Valve

Quantity Without auto switch Valve open/closed Valve open Valve closed Mounting position Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 External XLA Nil 1.3 x 10-9 (FKM) 1.3 x 10-7 None A B C A B C r 2-1 7-1 i 7-2 XL XL 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 2-1 7-1 1.3 x 10-9 (FKM) r i 7-2 XLQ Note) Values at normal temperature, excluding gas permeation.

Compact 5-Port Solenoid Valve

PROFINET 3A M12 connector (4-pin, Socket, D-coded): 2 pcs. 7/8 inch connector (5-pin, Plug): 1 pc. 7/8 inch connector (5-pin, Socket): 1 pc.

Electric Actuator

P C Regeneration option U C V Servo motor power (U) Servo motor power (V) Servo motor power (W) U V W W Connect to motor cable (U, V, W).

10

A B C 2 3 5 Grommet Size 1 Resin A 24 VDC Size 2 B E N.C. N.O. A B 4 7 Resin B C D E F G H J K L M N P Q R S T U V W 100 VAC Grommet With surge voltage suppressor Size 3 C F N.C. N.O.

REA/REB

REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless Cylinder Basic Type Series REAR Proper Auto Switch Mounting Position (Detection at stroke end) A B RE A B REC C D CX 10 to 20 CY Auto switch model Bore size (mm) D-A9 A dimension