0.55

speed Series (mm/s) 6 10 16 20 25 32 40 40 50 63 80 100 125 140 160 180 200 1000 Perpendicular, upward actuation Horizontal actuation 800 600 400 200 VF3140-03 0 1000 800 600 400 200 VF5144-04 0 With : when using steel piping Front matter 1 Cylinder Speed Chart @ Use as a guide for selection.

10

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] 0.8 Subsonic 0.9 0.6 Critical pressure 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 2 50 100 150 200 250 300 400 350 3 100 200 300 400 500 4 400 600 800 1,000 1,200 5 200 1,400 600 1,000 7 350 700 8 400 700 1,000 1,300 10 (Connection: 1/4) 500 700 10 (Connection: 3/8, 1/2) Flow rate Q [L/min (ANR

Air Slide Table Series MXQ

500 100 200 300 400 500 800 200 400 600 Load (N) Load (N) Load (N) D-X Individual -X 97 Series MXQ Dimensions: MXQ6 For detailed dimensions about the stroke adjuster, refer to the option for the stroke adjuster.

AC Servo Motor Driver (CC-Link Type ）

Hence, if a home position return is made at the creep speed of 100r/min, an error of 400 pulses will occur in the home position. The error of the home position is larger as the creep speed is higher.

AC Servo Motor Driver (CC-Link Type)

The highest value in the past 15 seconds is displayed relative to the rated torque of 100%. 0 to 400 % 14 Instantaneous torque Torque that occurred instantaneously is displayed. The value of the torque that occurred is displayed in real time relative to the rated torque of 100%. 0 to 400 % 15 Within one-revolution position Position within one-revolution is displayed in encoder pulses.

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

Single Axis Electric Actuator Series LJ1

Mitsubishi Electric Corporation Yaskawa Electric Corporation LJ1H202NA 100W to 500 LJ1H303SE 200W to 500 to 500 to 500 LJ1H202PC 100W to 1000 to 740 to 930 to 600 to 500 LJ1H202NC 100W to 740 to 930 to 600 to 500 to 1000 LJ1H303PD 200W to 1000 to 1000 to 1000 to 700 to 500 LJ1H303ND 200W to 1000 to 1000 to 700 to 500 to 1000 LJ1H102PH-K 100W to 400 LJ1H102NH-K 100W to 400 LJ1H202PF-K 100W

Air Slide Table Series MXQ

600 0 100 200 300 400 500 100 200 300 400 500 (1N = Approx. 0.102kgf) Load N (1N = Approx. 0.102kgf) Load N Load N (1N = Approx. 0.102kgf) 6 Series MXQ Model Selection Model Selection Procedure Formulae/Data Selection Examples Operating conditions 1 Model to be used Type of cushion Work piece mounting position Mounting orientation Average speed Va (mm/s) Load weight W (kg) Overhang

Electric Actuators

104 110 LJ1H102NH-K 28 70 to 400 LJ1H202PA-K 34 76 to 500 106 112 LJ1H202NA-K 38 80 to 500 LJ1H102PB-K 26 68 to 600 145 104 110 LJ1H102NB-K 30 72 to 600 LJ1H202PF-K 32 74 to 250 106 112 LJ1H202NF-K 36 78 to 250 LJ1H303PA-K 40 82 to 500 108 114 LJ1H303NA-K 42 84 to 500 Page Standard stroke (mm) and Speed (mm/s) Nonstandard motor Model Standard motor Deflection 100 200 300 400 500 600

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

C 1 LE N 1 P Controller Actuator part number Option (Except cable specifications and actuator options) Example: Enter LEFS16A-400 for the LEFS16A-400B-R11N1.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Base Mounted Bore size Series CJ2 Pressure 0.5 MPa Load rate: 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm 6 10 16 20 25 32 40 Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Vertical, upward actuation Horizontal actuation 10-SYJ3143-M5 Cylinder is in extending.

CG5-S

1.5 0 20 to 63 to 1000 mm, to 1200 mm Stroke length tolerance 80, 100 to 1000 mm, to 1500 mm Basic type, Axial foot type, Front flange type, Rear flange type, Integral clevis type Mounting JIS symbol Double acting/Single rod Standard Strokes (mm) Note 1) Standard stroke Long stroke Bore size 20 25, 50, 75, 100, 125, 150, 200 201 to 350 Minimum stroke for mounting auto switches 25 301 to 400

CJ5-S

R V Rod side flange style (F): CG5FNS GA GB 2-Rc P FT H1 Width across flats B1 D I MM AL A Width across flats NA K KA 8-J 4-FD C0.1 FX0.15 S + Stroke ZZ + Stroke H M B Stroke range A Bore size (mm) AL B1 B C D FX FD FT GA GB H H1 I J K KA M MM NA P S ZZ 20 Up to 350 18 15.5 13 50 16.5 8 36 5.5 6 18 12 35 5 31 M4 x 0.7 5 6 3 M8 x 1.25 29 1/8 83 121 25 Up to 400 22 19.5 17 50 18.5 10 36 5.5

Aluminum High Vacuum Angle Valve

Heater assembly quantity 200/40 400/70 400/80 600/130 800/180 1200/300 1600/400 100V H5 120C 800/40 1600/80 1600/80 2400/130 3200/180 4800/300 6400/400 200V The inrush current of the heater flows for several ten seconds when using 100V while it flows for several seconds when using 200V. However, this inrush current decreases momentarily.

CJ5-S

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Standard Stroke MK(2) Standard stroke Long stroke Note) Bore size (mm) RS Q G 20 25, 50, 75, 100, 125, 150, 200 201 to 350 25 301 to 400 RS H A 32 301 to 450 40 301 to 800 Made to Order Specifications (For details, refer to page 10-21-1.) 25, 50,

RSH/RS1H

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1100 1100 0.5 RHC 1000 1000 0.4 900 900 0.3 MK(2) 63 80 Load weight m [kg] Load weight m [kg] Load weight m [kg] Load weight m [kg] 0.2 800 800 50 0.1 700 700 RS Q G 600 600 0 500 100 200 300 400 RS H A 63 Lateral load F [N] 500 500 50 400 400 RZQ RS1H50

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

48 20 41 39 17 24 31 25 Up to 1800 295 Lube Non-lube 277 225 226 182 115 280 150 335 18.5 M20 x 1.5 111 M45 x 1.5 135 90 45 153 3/4 1 63 60 50 74 48 20 46 39 17 31 24 25 Up to 1800 352 336 275 277 225 140 355 180 420 23 M24 x 1.5 141 M56 x 2 160 105 55 176 71 60 86 25 49 67 60 20 56 35 29 30 Up to 2000 0.17 x Stroke Long Stroke With Auto Switch: 125 to 200 Only 384 369 55 330 330 270 140 400

PFxx-OMX0002

(Page 82) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -78No.PF-OMX0002-B Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:

PFxx-OMX0007

(Page 47) WH1 (Window comparator hysteresis) Setting of OUT1 hysteresis (Window comparator) 5 R/W U16 400 Y Settable values 0x0 to 0x1770 (0 to 6000) 6 R/W dt1 (Delay time) U16 0 Y Setting of OUT1 delay time 10 ms increment -43No.PF-OMX0007-A Product individual parameters (continued) Data Data Index Sub Access Initial value type storage 1 Parameter Set value 4 Remarks index 2 3 dec hex 0:

HRX-OM-M090

[] 60Hz 50Hz Fig 9.5-1 Heating capacity(HRS012--10, HRS018--10) 9.5.2 HRS012--20,HRS018--20, HRS024--20 1000 1000 Ambient Ambient temperature temperature 800 800 5 20 25 5 Heating capacity [W] 20 25 32 40 [W] 600 600 32 40 400 400 200 200 0 0 5 15 25 35 45 5 15 25 35 45 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig 9.5-2 Heating capacity(HRS012--20, HRS018