CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

, 100 64 53.5 10 to 50 63.5 17.5 depth 13.5 80 73.5 63.5 21 25 98 12.5 M16 x 2.0 132 6 22 10 77 11 3/8 16 112.5 57.5 26 63.5 75, 100 73.5 63 10 to 50 75 17.5 depth 13.5 100 85 73 27 30 117 13 M20 x 2.5 156 6.5 27 12 94 11 3/8 23 132.5 67.5 26 73 75, 100 85 10-4-8 9 Smooth Cylinder Series CM2Y 20, 25, 32, 40 Specifications and auto switch information not provided below are the same as those

MVGQ

CC 25, 50, 75, 100 125, 150, 175, 200 M L MVGQ 80/100 RB Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

75, 100, 125, 150, 175 200, 250, 300 350, 400, 450, 500, 600 700, 800, 900,1000 Data Intermediate strokes and strokes shorter than 75 mm are also available.

smcmaintenancepartslist

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

•

C 54 56 ZPR10C I 56 ~PRllII ZPR10 ZPR16U 16 18 12.5 21.5 30.4 46.5 57.5 80.5 91.5 3.5 1.2 C Deep type 54 ZPR13 54 54 mml 54 'y o ' O A ~B Ij G 75 ~ 1 2 10 60 83 94 6 76 2; '" ZPR16D 16 18 15 6 5l 61 84 Z ~6 ~O 75 75 ZPR?S 76 76 76 Apphcable tube mm ZPI!~2 ZPR40 128 Q O P R .S 129 128 04 4. 20.6 15.6 10,4 130 .6 ' . 16.6 6 21.6 12.8 Applidal\le lWe 0.0 128 1 30 ZI!J!

REA/REB

75 30 62 12.5 22.5 0.5 1 72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting

REA/REB

75 30 62 12.5 22.5 0.5 1 72 97 REAS20 Rc 1/8 40 70 90 90 38 73 16.5 25.5 87 115 REAS25 Rc 1/8 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 REAS32 Rc 1/8 40 75 122 110 50 91 18.5 28.5 0.5 1 119 138 REAS40 Rc 1/4 65 105 145 120 64 99 20.5 35.5 1 1 142 155 PA dimensions are for split from center. 10-2-34 34 Sine Rodless Cylinder Slider Type: Slide Bearing Series REAS Proper Auto Switch Mounting

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

Compact Cylinder with Solenoid Valve/

D (mm) (mm) Cylinder model C D Mounting bolt size Cylinder model C D Mounting bolt size CVQM5010 CVQM325 45 M5 x 45L M6 x 60L 60 15 10 45 x 45L x 60L 60 20 15 50 x 50L x 65L 65 25 20 55 x 55L x 70L 70 30 25 60 x 60L x 75L 75 35 30 65 x 65L 12.5 x 80L 80 9 40 35 70 x 70L x 85L 85 45 40 75 x 75L x 90L 90 50 45 80 x 80L x 95L 95 75 50 85 x 85L x 120L 120 -100 75 110 x 110L x 145L 145 CVQM6310

0.4

398 410.5 423 448 460.5 473 485.5 510.5 523 559 VQC Series S VQC1000 Series Kit (Serial transmission) For EX500 Gateway Decentralized System (64 points) IP67 compliant IP67 compliant VV5QC11 S kit (Serial transmission kit: EX500) (L4) (L3) (5.25) L2 L1 42.5 28 1.5 P = 10.5 21 7 Manual override 63.5 1.5 Indicator light 13 (12) (5.5) B A B A B A B A B A A A PWR 93.5 COM (35) 64.4 43.2 66 75

air-filter-e

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

Air Preparation Equipment

Main applications Nominal filtration accuracy (m) Material Core material Stainless steel 304 0.5, 1, 5, 10, 20, 50, 75, 100 Cotton 0 to 60 0.5, 1, 5, 10, 20, 50, 75, 100 0.2 MPa 0.1 MPa Polypropylene Polypropylene 0 to 400 Glass fiber Stainless steel 316 1, 5, 10, 20 Note) Size for all is 65 x L250.

Vacuum System Peripherals:

Note 5) Please contact SMC regarding indication with other units of pressure. 0 25 50 75 100 Input signal (% F.S.) Hysteresis 1 Output deviation (% F.S.) 0.5 Out Out How to Order 0 Return Return ITV 209 0 0 1 2 5 S 0.5 Pressure display unit Pressure range 5 kPa 9 1.3 to 80 kPa 1 0 25 50 75 100 Cable connector type Input signal (% F.S.)

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

High Vacuum Angle Valve

Table 1: Suffix Symbol for Seal Material Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for Plasma Compound no. 2101-80*1 70W 4079 SS592 SS630 SSE38 1232-70*1 3310-75*1 *1 Produced by Mitsubishi Cable Industries, Ltd.

XM, XY

flange) (mm) Model A 75.8 102.5 119 B 48 66 79 C 1 2 2 D 23.5 38 53 E 40 55 75 Fn 26 41 52 G 40.5 57 70 H 21.5 30 35 J XYH-25 XYH-40 XYH-50 100.2 130 178 494 XMH, XYH Series Glossary 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing.

CJ5-S

ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-14-3 4 Stainless Steel Cylinder Series CJ5-S 10, 16 How to Order Bore size Standard stroke (mm) 10 16 10 16 10 mm 16 mm 15, 30, 45, 60, 75, 100, 125, 150 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Intermediate strokes by the 1 mm interval are available without using spacers for stroke adjustment.

CXS

Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.