SMC Corporation of America
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Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

SYJA5120-M5-F JIS Symbol Body ported Fluid Specifications 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 (0.4 X P+0.1) to 0.7 P: Operating pressure 0.1 to 0.7 0.15 to 0.7 Max. 60 2 position single Operating pressure range (MPa) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 2 position double 3 position 3 position closed center 3 position exhaust

Pressure Switch: For Air ISE70/71 Series How to Order p. 6 Options/Part Nos. p. 6 Specifications p. 7 Set Pressure Range and Rated Pressure Range p. 10 Internal Circuits and Wiring Examples p. 10 Dimensions p. 11 Function Details p. 12 Safety Instructions Back cover 5 RoHS 3-Screen Display High-Precision Digital Pressure Switch: For Air ISE70/71 Series How to Order ISE70 02 M L2 Pressure

Seal kits consist of items 12, 13, 14 and 16 contained in one kit, and can be ordered using the order number for each respective tube bore size. 13 Series MB1W Standard Type MM MM G VW 2-Rc(PT)P G Cushion valve Port Basic type/(B) E D D E e MB Effective thread Effective thread 13 f 16 l h 9 2 x 4-J N F H + Stroke A K ZZ + 2 strokes S + Stroke H A K F N C B With rod boot MM 2-Rc(PT)P G G MM

Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.

Display panel 50,000 hours (approx. 5 years) End life of backlight of LCD. 183 Series HED Applicable Fluids Chemical CompatibilityTable against the Wetted Parts Material in Chemical Thermo-con Chemical Operating temperature range Compatibility Concentration p Note 2) 50 to 104 F(10 to 40C) Hydrofluoric acid HF: 10% or less p Note 2) 50 to 104 F(10 to 40C) Buffered hydrogen fluoride HF: 10%

Visible Visible Air suction side Filter Filter holder LED Indicators PWR Power supply indicator ION/HV Static neutralization operation/ Incorrect high voltage indicator ALM Error indicator NDL Maintenance indicator 4 Fan Type Ionizer IZF Series Models and Functions New New IZF21 IZF31 IZF10 IZF10R P.11 P.11 P.21 P.21 Size (Depth x Width x Height) (mm) 40 x 104 x 155 40 x 144 x 195 39 x 80

Hose elbow (H) For nylon, soft nylon and polyurethane tubing 4/2.5 x R 4/2.5 x M5 LQ M-5HLH-4 M-01H-4 M-5P 1 8 P.199 MQR 6/4 x R 6/4 x M5 M-5HLH-6 P.198 M-01H-6 P.196 1 8 T Elbow One-sided 90 elbow M5 female x M5 female IDK M-5L P.198 195 M Series M3 Series Barb Fitting for Soft Tubing: M-3AU-3 Barb Fitting for Soft Tubing: M-3AU-4 Width across flats 5 Width across flats 5 M3 x 0.5 M3 x 0.5

/8 M6 x 1 1/2 Hex 10-32 Thd. 1/2 Hex M6 x 1 1/2 M6 x 1 10-32 to M5 (F) EX-M6 (M-F) 92 10-32 to 1/8 (F) M6 to 1/8 BSPT (F) M6 to 1/8 (F) 1/2 1/8 NPT 11/16 13/16 Ref. 13/16 Ref. 5/16 9/32 5/16 1/2 5/16 1/2 7/16 Hex 45 1/4 .314 Major Dia.

How To Order,/NVV4Zl Manifold Nvv4zl ::P r =*na, acc$ory F : Mounting brackets 'A .v?

Unit switching Real-time switch output ( ) For air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON YES CFM x 10-2, CFM x 10-1 ft3 x 10-1 OFF P-1 P-2 High flow rate CFM=ft3/min "P" Window comparator mode H : Hysteresis High Flow Rate Type (For Air) H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON NO OFF P-1 P-2 ft3, ft3 x 103, ft3 x 106 CFM

P: PTFE F: FKM For VCS30 OR-2380-130P P: PTFE F: FKM For VCS40 OR-2600-180P P: PTFE F: FKM Manifold For VCS20 e OR-1400-178P P: PTFE F: FKM OR-2670-178P r P: PTFE F: FKM Wave washer For VCS30, 40 When the loosened clip is pulled out in direction e using pinchers, etc., the coil can be removed and replaced in direction r.

Note 2) Dimension when the rod is extended is to be added to clamp stroke plus rotary stroke. 7 Rotary Clamp Cylinder: Standard Series MK Head end flange: MKG With boss on head end +0.15 2 x 6.3+0.05 4 x G (Special cap bolt) Ah9 B E D C A 4 x F R + Clamp stroke (mm) (mm) Ah9 A D E G F C B Model MK32-F MK40-F MK -F Model MKG32 MKG40 MKG50 MKG63 0 0.052 5.5 48 65 8 0.15 56 0.1 34 21 M6 x 1.0

4-LD QW PB N E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P (port h)] HI HP H HL HG HT HS HB HA HB HA HG HT HI WB 4-J Depth JK Plug [P (port f)] WB WA TA TA WA R TB Plug TB R W [P (

... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

<> (19) 1 [P_1][n_1] 1 1 2[P_2][n_2] 2 (P1L P1H ) P1L()P1H() (n1L n1H) (24 ) 1 -20No.PS-OMM0002CN-F 2 [F 0] [F] 2 2 [F][-] [F 0] 23 ISE80(H) MPa ""M ZSE80(F) kPa ISE80(H) P ZSE80(F) psi [F 1] OUT1 24 ISE800.500 MPa ZSE80-50.5 kPa ZSE80F50.0 kPa ISE80H1.000 MPa ON OFF ISE800.050 MPa ZSE805.1 kPa ZSE80F5.0 kPa ISE80H0.100 MPa ON OFF -21No.PS-OMM0002CN-F [F 2] OUT2 27 [F 1]OUT1