3

It is calculated using the following formula: 1 x 105 Kv = Q (8) P 1000 Kv : Flow coefficient [m3/h] Q : Flow rate [m3/h] P : Pressure difference [Pa] : Density of fluid [kg/m3] (3) Formula of flow rate It is described by the practical units. Also, the flow rate characteristics are shown in Graph (2).

Aluminum High Vacuum Angle Valve

(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65

100

Set pressure range/Display pressure range 10 to 101 kPa 105 to 105 kPa Withstand pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas VPressure switch correspondence table Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Compact digital pressure switch ZSE10 series Current consumption

Stability of suction position,

ZP3EA-H6A [Weight: 105 g] ZP2V ZP ZPT ZPR 16.5 16.5 XT661 8.6 8.6 77.8 93 Applicable pad part no. ZP3E-125UM ZP3E-100BM Applicable pad part no. ZP3E-125BM 481 A ZP3E Series Female Thread Plate Part no. ZP3EA-PT1-B8 [Weight: 9.9 g] ZP3EA-PT1-B10 [Weight: 8.5 g] Part no.

ZP

3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37 64 5 27.5 125 128.5 88.6 135 56 44 105

CRB2/CRBU2/CRB1

SMC Corporation 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved 1st printing March, 2002 D-SMC.L.A. P-80 (D) All specifications in this catalog are subject to change without notice. Printed in Japan.

Compact Cylinder with Air Cushion

Mounting bolt C D Mounting bolt Mounting bolt D 65 70 75 85 95 120 145 85 95 105 130 155 90 100 110 135 160 105 115 140 165 120 130 155 180 Model C D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 Model C R(D)QB20-15 -20 -25 -30 -40 -50 R(D)QB25-15 -20 -25 -30 -40 -50 R(D)QB32-20 -25 -30 -40 -50 -75 -100 R(D)QB40-20 -25 -30 -40 -50 -75 -100 R(D)QB50-30 -40 -50 -75 -100 R(D)QB63

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

D-H7C D-B5, D-B6, D-B59W Auto switch Auto switch Hs Hs Single Acting, Spring Return Single Acting, Spring Extend Bore size (mm) A B All stroke A Bore size (mm) B Auto switch model Auto switch model 150 200 Hs Hs All stroke 150 200 125 125 50 100 50 100 25 75 25 75 20 20 30 105 95.5 55 80 45.5 70.5 55 80 45.5 70.5 24.5(27) 24.5(27) 20.5 D-C7 D-C8 D-C73C D-C80C D-C7 D-C8 D-C73C D-C80C 25 25

CM2

105 109.5 201 to 300 126 130 130 134.5 301 to 400 151 155 155 159.5 401 to 500 176 180 180 184.5 51 to 100 156 160 162 194 101 to 150 168 172 174 206 151 to 200 181 185 187 219 201 to 300 206 210 212 244 301 to 400 231 235 237 269 401 to 500 256 260 262 294 20 25 32 40 With Air Cushion Built-in One-touch Fittings Boss-cut Style G 8 8 8 11 P 6 6 6 8 Q 21.5 24.5 27 32.5 Bore size (mm) 20 25

CP95

Area: (800) 258-9200-www.stevenengineering.com L8 + Stroke H MB ZZ + Stroke MB1 CA2 CS1 CP95SB Bore size Stroke W C76 C85 C95 CP95 NCM NCA DVD -X AM WH WH + Stroke L8 + Stroke H 20ZY + Stroke Data Bore size (mm) AM KK L8 SW B D G EE BG (MIN) PL RT I12 E R VD VA I9 WA WB WH ZZ ZY I2 M10 x 1.25 32 6 16 94 22 30 10 27 12 G 1/8 13 M6 x 1 4 15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105

Free Mount Cylinder

38 48 3 4 6 8 10 12 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 7 7 7 9 10 11 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M4 x 0.7 depth 6 M5 x 0.8 depth 8 M5 x 0.8 depth 8 M6 x 1.0 depth 9 3.2 3.2 4.5 5.5 5.5 6.6 12.5 14 18 22 5 6 8 10 4 9 9 13.5 2 4.5 4.5 4.5 19 21.5 23 Note) 5 stroke (CUW16-5D): GA = 14.5 Without auto switch With auto switch Bore size (mm) R SA W T Z 70 74 79.5 93 105

MG

Over 200 st to 300 st Over 300 st 12 16 20 25 14 110 60 48 3 22 3.5 56 M5 x 0.8 41 10 50 5 37 20 40 15 25 16 110 200 60 105 24 54 3 25 3.5 62 M5 x 0.8 46 10 56 5 38 24 44 17 27 18 120 200 77 117 167 28 70 3 30 3.5 81 M6 x 1.0 54 12 72 17 44 24 44 300 29 39 26 120 200 77 117 167 34 78 4 38 4.5 91 M6 x 1.0 64 12 82 17 50 24 44 300 29 39 MGPM (Slide bearing) A, DB, E Dimensions MGPL (Ball

MGC

Data View A-A Mounting dimensions Bore size (mm) Stroke range (mm) N M L K J I B AP AO AN AM AL AK AJ AI AH AG AB AA A 20 25 32 40 50 75, 100, 125, 150, 200 25 38 80 60 44 25 106 22 M6 110 55 9 6.6 90 75 120 105 13 11 84 32 46 95 70 52 30 120 27 M8 125 65 9 9 100 84 136 120 13 15 89 75, 100 125, 150 200, 250 300 32 50 105 80 60 35 135 32 M8 140 75 9 9 108 92 150 134 13 15 94 38 60 125 95

CL

30 to 1200 1/4 1/4 1/4 1/4 1/4 1/2 1/2 3/4 40 50 63 80 100 125 140 160 59 44 52 64 78 92 115 128 144 69 16 20 20 25 30 36 36 40 30 35 35 40 40 50 50 56 40 50 55 65 80 90 90 90 27 32 32 37 37 47 47 53 32 40 40 52 52 60 70 86 102 116 145 161 182 6.5 6.0 6.0 8.0 8.0 43 43 43 22 27 27 32 41 14 14 14 71 81 101 119 133 145 160 180 9.0 9.0 11.5 13.5 13.5 19 19 19 12 12 15 18 18 14 20 20 80 90 105

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

MTS 105 Particle concentration (particles/m3) MY Special cylinder tube 104 Class M3.5 [Class 100] CY A special cylinder tube is employed using extruded aluminum material. Even long strokes are not subject to deflection because of direct attachment to the cylinder body, and non-contact construction is achieved through combination with a linear guide.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2-P (Hexagon socket head taper plug) 2-P (Hexagon socket head taper plug) 1 XX SS NE PP QQ RR SS H SMC TT UU VV UU PH RW A G T-slot for body mounting N Z + stroke J M4 x 0.7 M6 x 1 M8 x 1.25 MM M5 x 0.8 M8 x 1.25 M10 x 1.5 GB 17 19.5 31.5 H 28 37 58 L 80 110.8 180 LA 70 100 158 NE 27 35.5 56.5 NH 3 4 5 NT 4.7 6.5 9 G 8.5 10.7 15.5 LW 120 176 229 M 9 12 16 N 20 25 40 NC 14 21.3 32.4 A 80 105

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, CLAMP, ACTUATOR, 40MM CKZN SLIM LINE CLAMP CYL, 4.06045 lb

The CK1 series is a clamp cylinder available in two styles of clevis widths *. It is a non-lube, compact, lightweight cylinder with a built-in speed controller. Gaiters are unnecessary because a heavy-duty coil scraper is provided as a countermeasure against spatters. The CK1 is available in 3 bore sizes with stroke lengths up to 150mm. Options include rod attachments and auto-switch capabilities.Two

This is a legacy product. Please contact us for the latest version.sales@ocaire.com, CYL, CLAMP, ACTUATOR, 40MM CKZN SLIM LINE CLAMP CYL, 4.01730 lb