C76

9 @0 q w e r t y u i o !

SI unit for PROFINET

Specification Seal cap EX9-AWTS For M12 connector socket: 10 pcs. -35No.EX-OMO0030-E Power supply connector (1) Cable with power supply connector Part number: EX500-AP0 1 0S Connector specifications S Straight A Angle Cable length (L) 1 1000 [mm] 5 5000 [mm] EX500-AP0#0-S EX500-AP0#0-A Item Specifications Pin No.

Fieldbus system EtherNet/IP TM compatible SI Unit

V output 50005 V output (3)The resolution from 1 to 5 V is 1/1000 based on the calculation. (5 V 1 V) / (5000 1000) = 1/1000 Scale set value (AD value) Input/Output signal range (a to b) Voltage [V] Current [mA] Decimal number 0 to 10 1 to 5 0 to 5 0 to 20 4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 : If the data format is scaled data

MGZ Series

70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.

Compact Rotary Actuator

r n a l s t r u c t u r e a n d o p e r a t i o n p r i n c i p l e C u s h i o n s M a i n t e n a n c e I n s p e c t i o n P e r i o d i c i n s p e c t i o n D i sassem ble and reassem bl e C a u t i o n o f d i s a s s e m b l e D i s a s s e m b l i n g p r o c e d u r e A s s e m b l e p r o c e d u r e T r o u bl e s hoo t i n g Safety Instructions These safety instructions

CKZ2N

A B C D E F G H I J L M Part no.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) Refer to page 568 for How to Order Pilot Valve Assembly. 564 VQ1000/2000 10211021-VQ2000 Plug-in Unit: Main Parts/Replacement Parts Metal seal Rubber seal e q w e q w 1021-VQ2101 (B) 2 (A) 4 1021-VQ2100 (B) 2 (A) 4 r r 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) e q w e q w 1021-VQ2200 1021-VQ2201 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r e q w e q w 1021-VQ2300

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,

Standard Combinations

Replacement Parts Description Material Y200P-060S Y300 Y300P-060S Y400 HNBR Y200 Seal Y400P-060S Spacer with Bracket (Z) G Center of F.R.L. body C E BB (Y200T only) 1 EE (Y100T, Y200T only) X-X RELEASE X B 2 E X G Seal Y200T Y400T F J A H K Spacer width D Model Y200T Y300T Y400T B 82 96 BB 67 C 29 41 48 D 53 68 81.5 E 24 35 40 EE 33 F 12 14 18 G 5.5 7 9 G 5.5 7 9 H 19 21 26 J 3.2 4 4

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

"#$ S Q J K E B ! "#$ A !

Trimmer Auto Switch

For heavy stains, use a cloth soaked with diluted neutral detergent and fully squeezed, then wipe up the stains again with a dry cloth. -8No.D-S-OMG0006-C Model Indication and How to Order Sensor unit : One sensor connector (e-con) is included in each package. : One sensor connector (e-con) is included in each package.

3 Port Solenoid Valve Rubber Seal Series SY100 1

Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

VQ5000

Cylinder Speed Chart Bore size Series CS1 Pressure 0.5 MPa Load factor 50% Cylinder stroke 1000 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Enclosure Series Average speed (mm/s) IP65 compatible T kit (Terminal block box) 5 wiring types have been standardized to facilitate easy wiring work and maintenance.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Lead wire length: 1000 mm ZM-K1LO . 1 pc. VJ10-36-1A-10 . 2 pcs.

3 Port Solenoid Valve Rubber Seal Series SY100

SY1 4, SY1 4A only 1 2 1 2 4-3-6 Series SY100 Construction SY114, SY114A (A) 2 3 (R) i q y e r w V100 SY SYJ VK VZ VT VP A R P !1 o u t !0 VG VP S070 VQ VKF Part no. Material Replacement Parts Material Note Component Parts VQZ No. q w e r t y No. !0 !

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Note) White (Gray) [Gray]: B side solenoid () White: B side solenoid (+) Example) Lead wire length 1000 mm Example) Lead wire length 1000 mm VQ1170-5LO-C6 AXT661-14A-10 3 pcs. 3 pcs. 3 pcs. 3 pcs. VQ1170N-5LO-C6 AXT661-14AN-10 Connector Assembly Part No. (For DC) Connector Assembly Part No. (For DC) Double solenoid part no.

Digital Pressure Switch

(For the product with external input function, output type -C/D/E/F) Press the or button in function selection mode to display [F96]. Press the button. Move on to number of pressurizing errors. Number of pressurizing errors : The maximum number of pressurizing error is 1000 counts. : The number of pressurizing errors counted cannot be cleared. Press the button to set.

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust