High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3

Compact Cylinder

M9B M9NWV M9PWV M9BWV M9NAV M9NW M9PW M9BW M9NA IC circuit 5 V, 12 V Relay, PLC Diagnostic indication (2-color indication) Grommet 24 V Yes 12 V IC circuit 5 V, 12 V Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V 3-wire A96V A96 (NPN equivalent) 5 V IC circuit Yes Grommet A93V A90V A93 A90 IC circuit 100 V Relay, PLC 2-wire 24 V 12 V No 100 V or less Solid state

SYJ300/500/700

circuit 0.35 (With indicator light: 0.4) Power consumption (W) DC 0.1 (With indicator light only) External pilot 1.4 (With indicator light: 1.5) 100 V 110 V [115 V] 200 V SYJ31 R 2 4 SYJ32 R 2 4 1.6 (With indicator light: 1.7) (A) 2 (A) 2 Apparent power (VA) AC [1.7 (With indicator light: 1.8)] X X 2.3 (With indicator light: 2.4) 220 V [230 V] 2.5 (With indicator light: 2.6) 1 (P) 3 (R)

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

state switch PLC 5 V, 12 V MDSUA3 S9PV S9P 3-wire (PNP) T99V T99 12 V 2-wire Grommet R73 Reed switch 100 V 2-wire Connector R73C MDSUA7 Relay, S79 3-wire (NPN) IC circuit Heavy-duty cord MDSUA20 24 V 5 V, 12 V PLC Solid state switch Grommet S7P 3-wire (PNP) T79 2-wire 12 V Connector T79C Auto switches marked with are made-to-order specifications.

Compact Vacuum Unit Ejector/ Vacuum Pump System

V port At least 1mm V port Spacer Spacer (Flat washer, etc.) (Flat washer, Exhaust port etc.) 18 - Doc. no. ZB-OM00201-B (3) Secure the space for connecting piping on the supply side when installing the product.

RSQ

3-wire (NPN) 3-wire (PNP) J 5 V, 12 V IC circuit Grommet 2-wire 12 V DConnector 3-wire (NPN) 3-wire (PNP) Relay, PLC 24 V IC circuit Diagnostic indication (2-color indication) 5 V, 12 V -X Grommet Water resistant (2-color indication) 12 V 2-wire 20H7BA 4-wire (NPN) With diagnostic output (2-color indication) H7NF IC circuit 5 V, 12 V Data Solid state switches marked with are produced

Round Type Hydraulic Cylinder

Solid state auto switch Connector IC circuit 3-wire (NPN) 2-wire 5 V, 12 V 12 V Terminal conduit Relay PLC Yes 24 V 3-wire (NPN) Diagnostic indication (2-color indicator) IC circuit 5 V, 12 V 12 V 3-wire (PNP) 2-wire Grommet 3-wire (NPN) IC circuit Water resistant (2-color indicator) 5 V, 12 V M9PAV1 M9PA1 3-wire (PNP) 2-wire M9BAV1 M9BA1 12 V 5 V, 12 V 5 V H7NF A96 A93 A90 B54 B64 C73C

Base Mounted Metal Seal/Rubber Seal Series VQ

G T L S M kit (Flat ribbon cable with terminal block) kit (Terminal box) kit (Lead wire) kit (Serial transmission unit) kit (Multi-connector kit) Number of pins: 20 (VQ2000 only) 2-4-113 Valve Specifications Sonic conductance Type of actuation Voltage Electrical entry Manual override C [dm3/(sbar)] 4/2 5/3 (A/B R1/R2) 12 V 24 V DC 100 V 110 V AC 200 V 220 V AC 50/60 Hz 50/60 Hz Push type

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

12 V Reed switch Solid state switch 12 V IC circuit 5 V,12 V Yes Grommet Diagnostic indication (2-color indication) Relay, PLC 24 V 12 V IC circuit 5 V,12 V Water resistant (2-color indication) 12 V 3-wire (NPN equiv.)

Magnet: D (Built-in Magnet), Series: J2, Mounting: B (Basic), Bore Size: 10mm, Stroke: 60mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: None, Rod End Bracket: V (Single Knuckle Joint), Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical, Lead Wire or Prewired Connector: M (1m), Number: 2 pcs.

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: M9NV, Lead

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 60, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～1, Cushion: Rubber cushion, Auto Switches: M9NV, Lead

•

(NPN) b-v G39 1 e , i,,",, 2-wi," K39 -1 i DiagnostiC Indication I'" 3-~,e (NPN) 1 5V, 12 \ M9NW Relay, PLe 3-w", (PNP) It . ~ .. (2-ColOr indication) 2-~-,"24 V I ( ~ .' Grommet , , 3-wi,.

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

101 kPa C 10.1 kPa Rated pressure range Range Analog output [mA] 5 20 Analog output [V] For vacuum For compound pressure 100 kPa to 100 kPa 100 kPa 100 kPa 0 to 1 MPa 0 1 MPa 0.1 MPa For positive pressure 0 to 500 kPa 0 500 kPa 50 kPa 1 0.6 4 ZSE ISE A C B A B Pressure Pressure ZSP Dimensions PS PSE56, PSE5601 02 N01 N02 ISA A 11.5 3025 37.5 24 5.5 30 24 PSE 14 B 5.1 20 5 IS ISG Air tube

Digital Flow Switch (Manifold type)

] Model Minimum Maximum PF3W704/PF3W504 0.5 4 PF3W720/PF3W520 2 16 PF3W740/PF3W540 5 40 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6 mA -61No.PF-OMW0004-B Dimensions Position of the front/mounting hole Integrated type (basic type): PF3WB (mm) A B Flow range a (L/min) Open Close Open Close 0.5 to 4 (symbol 04) 33 14 33

Air Slide Table Series MXW

, D-A93 (V), D-A96 (V) Stroke (mm) Model 300 250 275 50 75 100 200 225 25 125 150 175 A 31.5 27.5 27.5 52.5 27.5 27.5 B 100.5 125.5 150.5 79.5 175.5 200.5 B A MXW8 W 11.5 7.5 7.5 32.5 7.5 7.5 V 120.5 145.5 170.5 99.5 195.5 220.5 A 51 31 31 31 31 B 104 124 149 174 199 MXW12 W 31 11 11 11 11 V 124 144 169 194 219 W V A 34.5 34.5 59.5 34.5 34.5 34.5 B 235.5 260.5 135.5 160.5 185.5 210.5 MXW16

MHZ

MHZ MHF MHL MHR Hysteresis Hysteresis Switch operating position (ON) Switch operating position (ON) MHK Switch reset position (OFF) Switch reset position (OFF) MHS Hysteresis (mm) D-F9W(V) D-F9BAL D-Y7W(V) D-Y59A/B D-Y69A/B D-Y7P(V) MHC D-M9(V) D-F8 ON position set when red light is turned on ON position set when green light is turned on ON position set when red light is turned on ON position

MHZ

12 V IC circuit 3-wire (PNP) Solid state switch Relay, PLC 2-wire 24 V Grommet Yes 12 V 3-wire (NPN) 5 V, 12 V IC circuit 3-wire (PNP) Diagnosis (2-color indicator) 2-wire 12V Note 2) Add -61 at the end of the part number for the flexible lead wire.

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"