EX510

Internal Circuit (Brown) +5 V +24 V TD+ TD0 V q w e r VP R x D/T x D-N DGND R x D/T x D-P SHIELD q w e r t OUTPUT Internal circuit COM A +24 V RD+ RD0 V q w e r INPUT GND FG DC-DC converter (insulated) GND +24 V TD+ TD0 V q w e r OUTPUT Power supply for output +24 V 0 V q w COM D Power supply for the input and for the control unit of the Gateway +24 V 0 V q w +24 V RD+ RD0 V q w e r INPUT

Bernoulli Gripper

V V V V V KQ2H06-M5G1 V KQ2H06-01GS1 V V KQ2H08-01GS V V Male connector Stainless steel One-touch fittings KQ2S04-M5G1 V V V V V V V KQ2S06-M5G1 V V V KQ2S06-01GS1 V V KQ2S08-01GS V V Hexagon socket head male connector Male connector KQG2H04-M5 V V V KQG2H06-01S V V KQG2H08-01S V V One-touch fittings/ Stainless steel 316 KQG2S04-M5 V v V V V V V KQG2S06

Guide Cylinder/Compact Type Series MGC

Rear plate N C D T A 2 x P (Rc, NPT, G) Q B E W S U M K L R I AP AB J AA A V Y + Stroke X Z + Stroke 8 x AF AC AD AE WH (Max.)

High-Precision Digital Pressure Switch

ZSE20(F)/ISE20 ZSE20(F)/ ISE20 ZSE30A(F)/ ISE30A 17.5 mm (20/20A) M5 female thread ZSE30A(F)/ISE30A M5 female thread Grommet type Lead wire ZSE/ISE40, 80 Series 3 High-Precision Digital Pressure Switch ZSE20m(F)/ISE20m Series 3-Screen Display Available Mounting Options Mounting Series Bracket A Bracket B Bracket C Panel mount 20 V V V 20A V V V 20B V V V 20C V V V The bracket configuration

Modular F.R.L. Unit

30.5 38.5 K 5 3.5 1.5 N 34 40 54 Q 5.4 6.5 8.5 S 15.4 8 10.5 M 30 41 50 P 44 46 54 Y 14 19 21 Z 6 7 7 V 30 31 35.5 W 28.5 38.5 42.5 B 190 242 278 U 2.3 2.3 2.3 T 55 53 70 AWM20 AWM30 AWM40 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Optional specification With drain guide B With barb fitting B Metal bowl B 173 214 252 Metal bowl with level gauge Model B AWM20 AWM30 AWM40 208 246 209 247 234 272 70

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

V V V V V N1 NPT1/8 V V V V V V F1 G1/8 V V V V V V 02 Rc1/4 V V N2 NPT1/4 V V F2 G1/4 V V C4*1 4 V V V V C6 6 V V V V V V C8 8 V V N7 1/4" V V V V Straight valve Piping entry direction Rated flow range 1 2 5 10 25 50 100 200 Nil None Straight V V V V V V V V S Yes Straight V V V V V V L None Rear ported V V V V V V V V W Yes Rear ported V V V V V V Symbol Flow adjustment Rear

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Relay, PLC 12 V Yes Yes 24 V (B54) B54 100 V, 200 V 2-wire C73C 12 V Diagnostic indication (2-color indication) PLC (B59W) B59W Grommet G79 K79 K79C 3-wire (NPN) H7A1 H7A2 H7B H7C H7NW H7PW H7BW G59 G5P K59 5 V, 12 V IC circuit Grommet 3-wire (PNP) 12 V 2-wire Connector 3-wire (NPN) G59W G5PW K59W 5 V, 12 V Relay, PLC IC circuit Diagnostic indication (2-color indication) 24 V 3-wire

Modular F.R.L. Unit

B B B B B B O S N.C.: Gray N.O.: Black M5 x 0.8 S O 1/4 V Applicable models AC10, AC20 Barb fitting Applicable tubing T0604 Width across flats 17 10 One-touch fitting Bracket mounting size Accessory specifications Standard specifications With pressure gauge With auto drain Model Port size B C D A L 4.5 E 28 F 31 G 25 H 20 J 27 K 7 N 40 Q L 4.5 M 2.8 P 26 T 0 B 104 85 26 50 AC10 AC20 AC25

CJ2X/CUX/CQSX/CQ2X/CM2X

Do not indicate suffix N for no lead wire on D-A3A/A44A/G39A/K39A models. 100 V Reed switch Solid state switch Relay, PLC 100 V, 200 V Connector 12 V Yes 2-wire 24 V PLC Terminal conduit 100 V, 200 V Relay, PLC DIN terminal Grommet Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire

SMC Wireless System EtherNet/IP ® compatible

Signal name 1 24 V 1 24 V (Control and input) (Control and input) 2 24 V (Output) 2 24 V (Output) 3 0 V (Control and input) 3 0 V (Control and input) 4 0 V (Output) 4 0 V (Output) 5 Not used (4) EX600-ED5-# PWR IN: M12 4-pin Plug A-coded PWR OUT: M12 5-pin Socket A-coded Configuration Pin No. Signal name Configuration Pin No.

Compact Type

-color display) 5 V,12 V 2-wire 12 V Water resistant (2-color display) . . .

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

110 V [115 V] 200 V 220 V [230 V] 4(A) (B)2 2(B) (A)4 Apparent power (VA) AC 5(R1) (R2)3 1 (P) (R1)5 1 (P) 3(R2) Diode (DIN terminal, Varistor when non-polar types) LED (Neon light when AC with DIN terminal) 3 position exhaust center 3 position exhaust center Surge voltage suppressor Indicator light 4(A) (B)2 2(B) (A)4 Common between 110 VAC and 115 VAC, and between 220 VAC and 230 VAC.

Table of Contents

B 89 A A B Section BB Coupling P.C.D.

7

I F C e d Grommet (with surge voltage suppressor) E U 300 1.2 7.5 A b a T IN OUT B 2 x P Port size L K D f J I F 4.5 4.5 e d DIN terminal C U V E Cable 6 to 12 G1/2 (44) T 7.5 31.5 1.2 5.5 A b a IN OUT B 2 x P Port size J I F L K D 4.5 4.5 f (mm) Electrical entry One-touch fitting P A B D E F I J K L Model Grommet Grommet (with surge voltage suppressor) DIN terminal C T U T T U U V 10

1

Auto switch model Bore size [mm] 20 25 32 40 D-M9m(V) D-M9mW(V) BM8-020 (A set of a, b, c, d) BM8-025 (A set of a, b, c, d) BM8-032 (A set of a, b, c, d) BM8-040 (A set of a, b, c, d) BM8-025S (A set of a, b, c, d) * S: Stainless steel set screw BM8-032S (A set of a, b, c, d) * S: Stainless steel set screw BM8-040S (A set of a, b, c, d) * S: Stainless steel set screw D-M9mA(V) BM8-020S (A

Cylinder with Turntable Series MGT

, D-Y7NW(V), D-Y7PW(V), D-Y7BW(V), D-Y7BAL Reed D-Z73, D-Z76, D-Z80 Solid state D-Y59 , D-Y69 , D-Y7P(V), D-Y7NW(V), D-Y7PW(V), D-Y7BW(V), D-Y7BAL Reed D-Z73, D-Z76, D-Z80 A B A B A B A B How to Mount and Move the Auto Switch How to Mount and Move the Auto Switch Flat head watchmakers screwdriver Auto switch mounting screw (M2.5 x 4 l) Accessory Auto switch mounting

MXS

Combination of Options v: Possible X: Not possible Functional option F R P FR FP Adjuster option v v v v v v v (3) v (3) v (3) AS v v v X X X X AT v v v (3) X X X X A v X X X BS v v v X X X X BT v v X X X X X B v Note 3) For combination of buffer mechanism style and stroke adjuster at extension end style, the buffer stroke is shortened by the adjusted length with the stroke adjuster at extension

Hydraulic Filters

JIS B2401 -4D-P28 JIS B2401 -4D-V85 AL-130H-V AL-129H-V AL-131H-V JIS B2401 -4D-P42 JIS B2401 -4D-V100 Hexagon socket head cap screw FH990AL-133H-V Relief valve AL-132H-V AL-134H-V Phosphoric ester JIS B2401 -4D-P60 JIS B2401 -4D-V120 Companion flange AL-135H-V AL-135H-V e Seal (O-ring) Case AL-136H-V AL-136H-V JIS B2401 -4D-P90 JIS B2401 -4D-V150 w O-ring AL-137H-V AL-137H-V FH991JIS B2401

Fieldbus system CC-Link IE Field compatible SI Unit IO-Link Master Unit

Settable range of user set value Settable value range Range Lower limit Upper limit -10..+10 V -10.50 to +10.45 V -10.45 to +10.50 V -5..+5 V -5.25 to +5.22 V -5.22 to +5.25 V -20..+20 mA -21.00 to +20.90 mA -20.90 to +21.00 mA 0..10 V 0.00 to +10.45 V +0.05 to +10.50 V 0..5 V 0.00 to +5.22 V +0.03 to +5.25 V 1..5 V +0.75 to +5.22 V +0.78 to +5.25 V 0..20 mA 0.00 to +20.90 mA +0.10 to +21.00

High Vacuum Angle Valve, XL Series

P (L) 15 G(PF)1/2 B (XSA V) Spacer (mm) ( ) are VCR type Bs B Grommet Conduit Terminal E A F C D Model Swagelok type K 81 91.5 97 97 66 G 23 25.5 28 H 56 66 72 72 28 G 39 41 43 H 48 58.5 64 64 43 G 92 95 97 H 48 58.5 64 64 97 J 59 62 66 41(51) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3