Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11- Example) For 10-CQSXB25-47D, a 3mm spacer is installed inside a standard stroke 10-CQSXB25-50D cylinder.
Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:
B (+) COM C(+) C (-) Reset Single solenoid type (AC) Latching solenoid type (AC) A (-) Set A (-) SOL. B (+) COM SOL. C (-) Reset C(+) Note3) The solenoid valve channel is, A-(set):P A B-(reset):A R Note4) Applicable to negative COM specification model. Note1) Single type : non-polar ON : light (orange) illuminates.
Remote modeOpen A The time of FLT alarmClose FLT Operation stop FLT alarm status signal B The time of FLT alarmOpen A The time of WRN alarmClose WRN Continuing operation WRN alarm status signal B The time of WRN alarmOpen ALM Alarm status signal A The time of alarmClose B The time of alarmOpen RDY TEMP READY signal A TEMP READY statusClose B TEMP READY statusOpen A EnabledClose FREZ Anti-freezing
FA 3m 27 (M230) 2 O 1 No.ZB-OM00301 Assy ZB1ZS A M G A E 0.0~-101.0KPa G (2m) F -100.0~100KPa ZS-39-5G A NPN2 B PNP2 1) M SI2) P (psi)1) 1) (M230) 2 2)kPa O 1 V Assy 45 2 V Assy 45 (V Assy ) A ) 28 - No.ZB-OM00301 A R R Nm 0.0540.08 R R ON OFF R 29 - No.ZB-OM00301 3 P911 Nm 0.075~0.096 M2 / 3 Assy Assy / / O (/) O 30 - No.ZB-OM00301 [L/min(ANR)] V
double P, R ports 0.25 to 0.7 Port size 3 position A, B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 C4 (4 One-touch fitting)/C6 (6 One-touch fitting) C8 (8 One-touch fitting) C6: PA/B4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B12.6 (0.7) A/BR 12.6 (0.7) SX5000 2 position single, double 3 position Max. operating frequency Hz Manual override Pilot exhaust SX3000 SX5000 Note 2) Valve
Min. 207 Panel 54 72.5 10 69.5 2 R1/8 74 40 7 30 OUT OUT IN 2 x M6 depth 10 2 x Rc1/4 Pressure gauge port Rc1/8 78 70 A 160
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge
Regulator Unit Combination: [Other FRL Combination Devices] Soft Start Up Valve, Port Size: Rc1/4, Filter Rating: 5μm, Compressed Air Quality: General Dry Air, Maximum Operating Pressure(MPa): 1, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge