21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Series AR-B 10- 21- Regulator Series ARK-B 10- Regulator with 21- Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

KQ2

Size 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Symbol Accessory TW 01 03 05 07 09 11 13 Name Nipple Reducer nipple Tube cap Plug U KQ2N KQ2C KQ2P 34

PF3A7

Port size Symbol Port size Rated ow range 03 06 12 10 1 14 1 1/2 20 2 Output specification Symbol OUT FUNC2 Applicable monitor unit model CS NPN Analog voltage output3 External input4 PFG300 series DS NPN Analog current output External input4 PFG310 series ES PNP Analog voltage output3 External input4 PFG300 series FS PNP Analog current output External input4 PFG310 series 2 Analog output

Metering Valve with Silencer Series ASN2

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1

Table of Contents

Qty. 1 1 2 2 2 2 4 2 !4 !

Compact 5-Port Solenoid Valve

68.6 D D B 2 S B 2 B 2 B 2 B 2 1 P P 1 A 4 A 4 A 4 A 4 A 4 * These figures show the JJ5SY3-10F2-05DR-C8.

5 Port Solenoid Valve

) 52.8 26.9 A 4 A 4 BUS OUT (91.3) E X 78.9 76.9 76.7 P 1 P 1 8.7 (69.7) 73.2 1 B 2 B 2 B 2 B 2 B 2 BUS IN 56.6 P 3/5 E 3/5 E PWR B 2 2 A 4 A 4 A 4 A 4 A 4 (For DIN rail mounting) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] 7.5 11.8 Applicable tube O.D.: 4, 5/32" [Communication connector D-sub] BUS OUT BUS 1 P P 1 B 2 B 2 2 2 BUS IN 3/5 E E 3/5 PWR PWR A 4 4 A 4 4 Note

0.4

VP4 MODEL SB RD SD VQ 1/2 VQ 1/2 VQ 4/5 EX124: 4 x G1/2 Electrical entry Use a drip proof plug assembly (AXT100-B04A) on the unused conduit port (G1/2).

High Vacuum Angle Valve

None XLF16-30-1-2 XLF25-30-1-2 XLF40-30-1-2 XLF50-30-1-2 XLF63-30-1-2 XLF80-30-1-2 Yes XLF16A-30-1-2 XLF25A-30-1-2 XLF40A-30-1-2 XLF50A-30-1-2 XLF63A-30-1-2 XLF80A-30-1-2 XLF High temperature None XLF16-30-1H-2 XLF25-30-1H-2 XLF40-30-1H-2 XLF50-30-1H-2 XLF63-30-1H-2 XLF80-30-1H-2 Yes XLF16A-30-1H-2 XLF25A-30-1H-2 XLF40A-30-1H-2 XLF50A-30-1H-2 XLF63A-30-1H-2 XLF80A-30-1H-2 XLFV General use

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Electric Actuator

B > 2 : . ; = 8 A A @ A-A No.

Battery-less

Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.

Cylinder with Lock

4, 6, 8)*1 2 (Different surfaces, same surface) 1 15 10 D-A5m D-A6m n 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 10 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 20 15 D-A59W n 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 25 20 D-F5NTL n 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6,

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Fieldbus System

) 52.8 26.9 A 4 A 4 BUS OUT (91.3) E X 78.9 76.9 76.7 P 1 P 1 8.7 (69.7) 73.2 1 B 2 B 2 B 2 B 2 B 2 BUS IN 56.6 P 3/5 E 3/5 E PWR B 2 2 A 4 A 4 A 4 A 4 A 4 (For DIN rail mounting) One-touch fitting [PE: Pilot EXH port] [X: External pilot port] 7.5 11.8 Applicable tube O.D.: 4, 5/32" [Communication connector D-sub] BUS OUT BUS 1 P P 1 B 2 B 2 2 2 BUS IN 3/5 E E 3/5 PWR PWR A 4 4 A 4 4 Note

10

Applicable fluid 1 Model Air Water Oil Steam Medium vacuum For Air For Air VX2 0 Page 5 2 For Medium vacuum For Medium vacuum VX2 4 Page 10 2 For Water For Water VX2 2 Page 14 2 2 For Oil For Oil VX2 3 Page 16 Can be used with heated water. 2 2 2 For Steam For Steam VX2 5 Page 18 1 For details, refer to pages 45 and 46. 2 Refer to the individual specifications for each fluid.

Electric Actuator with Integrated Guide

2) Note 2) Be sure to use a regenerative absorption unit (LC7R-K1A) with this controller (with brake).

Electric Slide Tables

2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.