CE 0 i @3 o @4 @8 @7 u @2 r y RE A B REC !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J B C D A A COM COM COM B 12 VDC GND F.G.
A B C D F H HX MM NA NB ND S Z 90 [91] NN Bore size (mm) 10 8 0 0.022 10 0 0.022 15 12 14 4 8 28 35 M4 x 0.7 12.5 9.5 46 M8 x 1 91 [92] 16 15 18 20 5 8 28 41 M5 x 0.8 12.5 9.5 47 M10 x 1 10-15-7 Series CVJ5 Axial Foot Style (L) CVJ5L M5 x 0.8 M5 x 0.8 53.5 [54.5] 28 [34.5] M5 x 0.8 Manual override Width across flats B1 16 [17] S + Stroke Z + Stroke Mounting hole Rod End Nut H1 B1 Bore
DA00032 Applicable bore size (mm) 12 20 M5 x 0.8 7.8 9.2 8 3 DA00040 M8 x 1.25 12.5 15.0 13 5 Electrical Wiring Input/Output The input/output of the stroke reading cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.
A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38
3 Replacement Parts: Seal Kits Bore size (mm) Kit No. Contents 25 32 40 50 63 MUB25-PS MUB32-PS A set of above numbers !1, !2 and !3. MUB40-PS MUB50-PS MUB63-PS Seal kits consist of items !1, !2 and !
A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x
3 Chromated Aluminum alloy MUW40-PS Piston e Hard chrome plated Carbon steel MUW50-PS Piston rod A r Hard chrome plated Carbon steel MUW63-PS Piston rod B t Oil-impregnated sintered alloy Bushing Seal kit includes !1 to !3.
3 Chromated Aluminum alloy MUW40-PS Piston e Hard chrome plated Carbon steel MUW50-PS Piston rod A r Hard chrome plated Carbon steel MUW63-PS Piston rod B t Oil-impregnated sintered alloy Bushing Seal kit includes !1 to !3.
(D-M9A(V)L can be used with a lead wire of 0.5 m and 3 m.) Note 3) 1 m (M): D-M9(V), M9W(V), M9A(V)L only.
on the left side) 14.5 A E D B C 4 Manual override screw 16 29 L2 L1 14.5 Stroke Motor cable mounting direction U (Bottom entry) ( ) +0.025 0 3H9 depth 3 2 x M5 x 0.8 thread depth 9 19 J F G 4 5 ( ) +0.025 0 3H9 depth 3 Note 1) Range within which the table can move when it returns to origin.
Bracket A or D (Model: ZS-24-A/ZS-24-D) [01/N01 type] [W1/WF1 type] Note For products with M8 (3 pin) connector, reserve a space for the lead wire and connector. Bracket B (Model: ZS-24-B) -16No.PS-OMM0007-I Mounting with panel mount adapter Note Products with M8 (3 pin) connector cannot be panel mounted.
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
Tube size/ Connecting thread size Body size KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 R(PT) 1 8 Male connector socket: KBB Female connector socket: KBS Part No. T Connecting thread KBB1-M5 KBB1-M6 KBB3-R1 KBB4-R2 Rc(PT)1 4 Rc(PT)1 8 M6 X 1 M5 X 0.8 T Connecting thread Part No.
Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with
Note 3) When selecting a power supply voltage, refer to How to Order on page 2. Note 4) Install a circuit breaker with a sensitivity of 30 mA or less.
A side B side COM 3 VFR540 5 A side B side COM Ground 3-5-3 4 Series VFR2000/3000/4000/5000/6000 Precautions Be sure to read before handling.
9 to @2 20Solenoid valve with adapter assembly SYJ3 3-M VZ5 4 -M VF3 4 -M VZ3 4 -M A B A B A B A B @3 Data Note 1) Seal kit includes !9 to @2. Order the seal kit, based on each bore size.
Released Workpiece 1 Workpiece 2 Workpiece n Atmosphere A B 4 Max. A: Max. pressure value when a workpiece is adsorbed. ON = A A B 4 Min. B: Min. pressure value when a workpiece is not adsorbed. OFF = B + 16-2-21 8 Series ZSE40/ISE40 Calibration Procedures Auto Preset (In the case of confirming the supply pressure) 1. Auto preset mode 2. Preparation for auto preset 3.