Flow Sensor Series PFMV x M5 x 0.8 15.2 18 15 7.1 3 2 x 3.4 14 Both-side bracket One-side bracket 10 x n pcs. + 24 (n = 1 to 5) (25.7) 10 x n pcs. + 14 (n = 1 to 5) 12 10 10 2 x 4.5 5 2 x 4.5 PFM PFMV PF2A PF2W 24 34 34 24 PF2D IF L-type bracket (Tapped finish) L-type bracket (Tapped finish) 20 20 9.1 9.1 2 1 1 2 L-type bracket (Through hole) The dimensions show the PFMV5-1.
Bulkhead union P. 60 KCE Use to connect tubes through a panel. One of two ports has a self-seal function. Bulkhead connector P. 60 KCE Use to connect male thead and tube through a panel. 15-2-67 Series KC Precautions Be sure to read before handling.
(mm) 8 6 4 Connection thread Model 10 12 Male connector KSH KXH M5 X 0.8 M6 X 1.0 1 8 R(PT) R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Male elbow KSL KXL M5 X 0.8 M6 X 1.0 R(PT) 1 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 2 Precautions Be sure to read before handling.
) 7 79.6 Insulation: Black () B 13.6 Manual override Insulation: Red (+) A 2 x 4.2 (Mounting holes for manifold) 2 x 1/4" {A (4), B (2) port} 20 42 (52) (2 x 4.2 Mounting holes) 44 (For E type) 0.3 mm2 (42.5) (49.5) 40 40 24.5 14.7 1.55 (1.2) L 167.8 (Lead wire length) (14) 1/4" {P (1) port} 2 x 1/8" {EA (5), EB (3) port} (83.9) 0.9 18 2 EB P EA (23.9) 36 2 x 2.2 (Positioning for manifold
upward mounting with a speed of 500 mm/s, use graph (2).
are vertical upward mounting with a speed of 500 mm/s, use graph (2).
2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.
Basic (B): CG1WB 1011With rubber bumper 2 x M5 x 0.8 Relief port F GA F GA Port on rod end Port on rod end Width across flats KA 2 2 Width across flats KA RA RA 2 x Rc P 1 1 0 E0.05 MM H1 H1 MM D D I 0 E0.05 C R0.4 R0.4 ZZ + 2 Stroke S + Stroke H A AL Width across flats B1 Width across flats B1 H + Stroke A AL K K 8 x J NA C Female rod end effective depth A1 MM ZZ + 2 Stroke H + Stroke H
2(A) 33 40 4.5 2-5.2 52 Switch mark (Mounting hole) (PA port) Rc 1/8 (Mounting groove for M6 thread) 2-R 3.2 2-5.2 Bracket (Mounting hole) PA 63.9 63 63 56.5 38.5 5.5 31.5 2 52 31 74 60 9 119.5 (Piping port) Rc 3/8, 1/2 42 31 9 3(R) 1(P) 3.5 (Breathing port) M5 x 0.8 108.5 5-5-19 8 Series VPA300/500/700 Dimensions A B Base mounted: VPA744(A port) Rc 3/8,1/2 16 119.5 112.5 (PA port) Rc 1/
OPTIONS AND PERIPHERAL EQUIPMENT (3) Dimensions (a) EMC filter HF3010A-UN [Unit: mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN Approx. 41 258 4 65 4 273 2 288 4 300 5 HF3030A-UN/HF-3040A-UN [Unit: mm] 6-K 3-L 3-L G 1 E 1 D 2 F 2 M J 2 C 1 C 1 B 2 H 2 A 5 Model Dimensions [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 length: 8 M5 M4 HF3040A-UN
A + 2 strokes L Note) The auto switches above are shown for a D-M9(W) solid state auto switch.
pilot port) With connector on D side (FD) 2-6-12 Base Mounted Series VQ5000 Plug-in Unit Bottom ported drawing With connector on U side (FU) 106 46.8 59.2 VQC 83.5 9 9 55.5 M5 ground screw 2n-Rc 1/2 4(A), 2(B) port SQ 34.5 VQ0 n U side X 12 VQ4 B 2 A 4 6 B A VQ5 B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1
(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.
Note 2) Contact P/A regarding the bowl assembly supply for PSI and F unit specifications.
supply port (P) ZF 2 x M5 Common pilot pressure exhaust port (PE) ZP SP A ZCUK 119 AMJ Left Right AMV 77 63 52 AEP 24 HEP 8 2 x Rc1/8 (1/8-27NPTF, G1/8) Vacuum port (V) 10 Related 22 Equipment L2 L3 1/2, 3/4 (Rc, NPTF, G) 29 Common exhaust port (EXH) 91 114 (mm) L1 1 L 2 3 4 5 6 7 8 9 10 Stations 28 1.5 40 1.5 56 1.5 44 1.5 56 1.5 72 1.5 60 1.5 72 1.5 88 1.5 76 1.5 88 1.5 104 1.5 92 1.5
4) RMFES-A(CL3X) AWG19 4 LE-CSM-RB 210 LE-CSB-SA 210 AWG20 2 21/0.18 34.6 1.35 4.70.1 HRZFEV-A(CL3) AWG20 2 LE-CSB-SB 210 LE-CSB-RA 210 (5) AWG20 2 110/0.08 39.0 1.37 4.50.3 (4) RMFES-A(CL3X) AWG20 2 LE-CSB-RB 210 1. d d 2. 10% 3. 4.
Put a flat washer (8 x 3.3) through a hexagon socket head screw (with spring washer, M3 x 0.5 x 5 l) and passing through the hole of a switch mounting bracket, then turning it lightly down to a mounting nut of switch. (2 locations) 5.
Put a flat washer (8 x 3.3) through a hexagon socket head screw (with spring washer, M3 x 0.5 x 5 l) and passing through the hole of a switch mounting bracket, then turning it lightly down to a mounting nut of switch. (2 locations) 5.
Put a flat washer (8 x 3.3) through a hexagon socket head screw (with spring washer, M3 x 0.5 x 5 l) and passing through the hole of a switch mounting bracket, then turning it lightly down to a mounting nut of switch. (2 locations) 5.
4.5 (7) 4.5 (7) 5 (10) 6.5 (11.5) 7 (12) A 10 (12.5) 10 (12.5) 10.5 (15.5) 12 (17) 12.5 (17.5) Hs A 5 (7.5) 5 (7.5) 5.5 (10.5) 7 (12) 7.5 (12.5) A 5 (7.5) 5 (7.5) 0 (4) 1 (6) 1.5 (6.5) A 2 (4.5) 2 (4.5) 2.5 (7.5) 4 (9) 4.5 (9.5) A Hs Hs Hs Hs Hs Hs CU 25 32 33 39 35.5 37.5 34.5 CQS 32 39 40 46 42.5 44.5 41.5 CQM 0.5 (5.5) 2 (7) 2.5 (7.5) 40 56.5 47 48 54 50.5 52.5 49.5 CQ2 50 66 56 57