Vacuum Pad 15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
15 18 22 34.5 41 51 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."
MGF 100 B0.2 MGZ 80 63 100 MGT 50 40 A0.2 D By-pass port dia. 32 25 Load mass (kg) 10 20 16 A0.2 12 D(mm) MGQL 8 10 12 15 18 18 22 22 28 33 A (mm) B (mm) C (mm) Bore size (mm) Hexagon socket head cap screw MGQM 10 12 14 18 22 22 27 27 31 39 1 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 40 42 52 62 80 90 100 110
B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8
KE [mm] Bore size A B D E F G H J K M N O P Q T V Y Z W Rc NPT G Rc NPT G 16 59.5 41.5 10 29 6 3 18 18 28 3.5 6.5 depth 4 M5 x 0.8 M5 x 0.8 M5 x 0.8 17 20 18 37 0 0 0 20 67 45 12 36 8 4 22 22 36 5.5 9 depth 7 1/8 1/8 M5 x 0.8 20 24 22 47 1.5 1.5 0 32 68 48 20 45 7.5 8 20 4.5 32 34 5.5 9 depth 7 1/8 1/8 1/8 20 36 20 14 40 80.5 52.5 25 52 8 10 28 5 41 40 5.5 9 depth 7 1/8 1/8 1/8 24.5
Dimensions (mm) Grommet: G Conduit: C DIN terminal: D Conduit terminal: T P Port size A B C D E F H K L M N Model Note) Note) Q R Q R Q R S Q R S U 22 (23) 45 (52) 44 43 58 40.5 46.5 99 43 66 83 13.5 28 64 31 6.5 12.5 27 14 12.8 M4 4.5 1/8 VCL21 22 (23) 46 (53) 44 44 58 41.5 46.5 99 44 66 86 18 36 67.5 31 8.5 12.5 27 18 12.8 M4 6 1/4 24 (25) 56.5 (63.5) 46 54.5 60 52 48.5 101 54.5 68 99 22
L10-03 L10-04 L12-02 10 76 96 86 L12-03 L12-04 17 14 19 31 42.4 43.5 44.9 45.6 46.7 23.3 17 38.9 41.9 39.9 40.9 43.9 17 22 17 19 94 118 12 17 22 43 24.3 17 22 Swivel Extended Elbow: LL H1 (width across flats) H2 (width across flats) H3 (width across flats) H4 (width across flats) Applicable tubing O.D.
) [] 2.5 1.2 (3) [] 20 1 [J] 5.6 22 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.
No Key operation LED Display (1) Deactivate the key lock if necessary (see page 22). (2) Press S-key (3) Set the minimum pressure by using the and keys.
19 41 562 -X Switch groove (Both-side type) 90 12 9 11 9 20 105 MHKL2-12S Normally open Normally closed Without magnet MRHQ 16 17 14 14.6 28.6 165 MHKL2-16S EPDM seal/Fluorine grease 20 32 18 16 34 314 MHKL2-20S Fluorine grease MA 25 53 22 19 41 565 MHKL2-25S Finger: Side tapped mounting 12 11 11 9 20 105 MHKL2-12C DFinger: Through-hole mounting 16 22 14 14.6 28.6 166 MHKL2-16C Dust cover
D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63
H G I J K L A B C D E F M R Size Tolerance +0.058 0 -0.1 -0.2 -0.1 -0.2 -0.1 -0.3 -0.1 -0.3 AD-FI-20 AD-FI-25 AD-FI-32 AD-FI-40 +0.027 0 +0.027 0 +0.027 0 +0.027 0 9 9 16 16 36 38 55 55 16 18 22 22 9 9 12 12 20 25 32 40 10 10 15.5 15.5 20 20 24 24 14 14 20 20 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 46 46 56 64 28 30 40 43 60 60 80 88 22 22 30 30 16 16 16 24 10 10 12 12 30 30
38.9 41.9 39.9 40.9 43.9 17 31 23.3 42.4 43.5 44.9 45.6 46.7 17 14 19 17 12 19 94 118 17 43 24.3 17 22 22 Swivel long elbow: LL Effective orifice (mm2) Applicable tube O.D.
18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.
B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special wiring specifications (options) COM () (+) 26 Positive COM spec. Negative COM spec. COM COM 25 26 COM COM 23 24 Note) When using the negative COM specification, use valves for negative COM. 21 22 Mixed single and double wiring are available as options.
S) (mm) Dimensions (mm) Dimensions W W Model LVA20 LVA30 LVA40 LVA50 LVA60 S Model LVA2m LVA3m LVA4m LVA5m LVA6m 66.5 12.5 89.5 24 110 29 A B A B 140.5 34.5 148 36 (mm) Dimensions A B Q R P C E F G H K L N Model LVA1m 20 33 49.5 10 M5 x 0.8 27.5 11 13 27.5 4.2 Rc 1/8, 1/4 NPT 1/8, 1/4 M5 x 0.8 LVA2m 30 33 57 10 M5 x 0.8 31 13 22 22 26 M3 x 0.5 Rc 1/4, 3/8 NPT 1/4, 3/8 LVA3m 36 47 78.5 13
Procedures to Operation . 22 2-1. Flow chart to operation . 22 2-2. Initial setting (IZT41/42) Initial setting is not necessary for IZT40) . 22 3. Installation and wiring . 23 3-1. Installation of Ionizer . 23 3-1-1. Precautions for Installation . 23 3-1-2. Adjustment of Pressure (Flow adjustment) . 23 3-1-3. Selection of piping port size . 23 3-1-4.
Automatic monitoring Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts. Alarm monitoring starts when the set time has passed. Monitoring start timer Alarm will not be generated until it reaches the time set for the AS.22 "Monitoring start timer" after the operation starts.
Dimensions [mm] Model L1 L2 A B C D E F G LEPY6-25 125.6 135.6 15 21 23 28 15 28 36 LEPY6-50 156.6 166.6 22 45 30 52 22 52 60 LEPY6-75 188.6 198.6 29 70 37 77 29 77 85 381 LEPY Series Step Motor (Servo/24 VDC) Dimensions LEPY10 D E C B 2 x M5 x 0.8 x 9 2 x 4.3 through 4 22 14 +0.025 0 3H9 ( ) depth 3 +0.025 0 3H9 ( ) depth 3 Note 4) 28 Motor cable mounting direction: R (Entry on the right
5.0 3.5 5.0 8 12 24 14 12.8 23 17 6 25.5 26.5 1 8 1 4 17 23 23 29 38 56 64 82 76 93 14 8.6 8.6 4 K 26 26.5 29.5 31 34 35 38 36.5 39.5 30 31 32 37.5 38 39.5 40.5 42 1 8