Vacuum Pad

ZP2A-TF2 ZP63H ZP80H ZP63HB ZP80HB ZP2A-XF2 ZP63H ZP80H ZP63HB ZP80HB Width across flat 22 (Hexagon) M16 x 1.5 M16 x 1.5 Width across flat 22 (Hexagon) Rc1/8 Width across flat 22 (Hexagon) Width across flat 22 (Hexagon) 6 6 25 6 6 25 80.5 Rc1/8 59.5 45 28.5 28.5 19 19 8 8 30 30 9.1 9.1 4 x M4 x 0.7 4 x M4 x 0.7 4 4 34 34 50 50 With four M4 bolts With four M4 bolts Applicable pad part no

Mechanically Jointed Rodless Cylinder Series MY1

FB FC Shock absorber model a Applicable bore size FW W E EA EB EC EY F FH h S T TT MY1M20 5 5 (Max. 11) RB1007 7 46.7 3.5 14 58 50 5 7.7 32 10 20 MY1M25 4.5 RB1412 12 67.3 4.5 16 17 70 6 52 66 5 (Max. 16.5) 57.5 9 38 12 24 MY1M32 6 8 (Max. 20) RB2015 15 73.2 5.5 22 22 88 8 67 82 73 11.5 50 14 29 MY1M40 4 9 (Max. 25) RB2015 15 73.2 5.5 22 22 104 8 78 95 87 12 57 17 35 MY1M50 8 13 (Max. 33)

AC Servo Motor Driver (CC-Link Type ）

App. 22 APPENDIX App. 5.2.3 System configuration example when 2 stations are occupied As shown below, the CC-Link system master local unit is loaded to run one drivers (2 station occupied).

Table of Contents

Brown Brown White White Pink Pink Gray Gray Unused Unused Light green Light green 13 14 15 16 17 18 19 20 21 22 24 Yellow Pink Blue Purple Gray Orange Red Brown Pink 14 15 16 17 18 19 20 21 22 Gray Black White 23 24 25 23 Terminal no.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

[131.4] Approx. 300 83.4 75.9 64.6 Max. 10 145.2 65.4 35.2 50.6 [57.6] 49.5 55.1 37.6 M8 x 1 (Lead wire length) Approx. 300 61.7 [68.7] Pg7 107.4 [111.8] 97.4 28 18 18 18 18 28 18 18 28 18 18 28 125.2 110.4 147 9.5 22 9.5 22 22 9.5 22 9.5 Note) Refer to page 176 for dimensions of connector types. 65 Base Mounted 10-SY3000/5000/7000/9000 Dimensions: Series 10-SY5000 [ ]: AC 3 position closed

51

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

V100

L dimension 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 VS VFN Silencer (For manifold EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer part no.

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

MGP

22 22 27 27 33 39 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 50 80 M8 X 1.25 M10 X 1.5 M10 X 1.5 M12 X 1.75 M14 X 2.0 3.17-3 Compact Guide Cylinder Series MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 How to Order Compact guide cylinder M 25 30 Z73 MGP Number of auto switches Compact guide cylinder 2 1 S Bearing M L Slide Ball bushing Auto switch Without auto switch (Built-in

KR

22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53 42 34 22 1 4 3 8 KRH12-02S KRH12-03S 28.5 23.5 19 22 46.1 58.3 12 1 2 KRH12-04S 22 51 22 Straight Union: KRH M Effective area (mm 2) Weight (g) Applicable tubing O.D.

Air Slide Table Series MXQ

7 11 14 36 1.4 17 23 13.5 13.5 16 21 MXQ-BS16 (L) M6 x 20 MXQ20 (L) M6 x 18 67.3 35 11 13 19 46 12 22 27 17.5 17 22 25 M14 x 1.5 MXQ-BS20 (L) M8 x 20 MXQ25 (L) M8 x 18 67.3 35 12 16 19 54 12 22 33 18 19 22 31 M14 x 1.5 MXQ-BS25 (L) 1) Size of hexagon socket head cap screw 2) It is also available in the symmetric type.

Rotary Actuator

5 to 22 2 to 22 2 to 22 Size: 10 to 30 Size: 40 40 40 18 to 30 6.5 to 30 4.5 to 30 18 to 30 Symbol: A57 Both the long shaft and the short shaft are shortened.

Compact Manifold Regulator Series ARM5

22 26 1/4 1/4 19 20.5 515 Series ARM11A/B End Block Pressure Gauge ARM11E L Part no.

AC Servo Motor Driver (CC-Link Type ）

App. 22 APPENDIX App. 5.2.3 System configuration example when 2 stations are occupied As shown below, the CC-Link system master local unit is loaded to run one drivers (2 station occupied).

0.4

VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Slide Unit Series CX2/CXWM/CXWL

15 17.5 15 17.5 15 22 23 23 24 15 17.5 15 17.5 9 17.5 14 16 Note 2) 2 magnets for auto switches are installed in the housing.

2/3 Port Valve for Various

" # $ # VX21/22/23 VXD21/22/23 $ $ $ $ $ $ VXP21/22/23 VXR21/22/23 % $ $ && &'& && &'& && &'& ($ )* && &'& && &'& !

Dual Rod Cylinder Series CXSJ/CXS

size Model 11-/22-CXS6 6 11-/22-CXS10 11-/22-CXS15 11-/22-CXS20 11-/22-CXS25 11-/22-CXS32 10 15 20 25 32 10, 20, 30, 40, 50 Vacuum suction type Relief type M5 x 0.8 10, 20, 30, 40, 50, 75, 100 1/8 Double acting (Both sides) Non-lube 10-/12-/21-CXS6 6 single rod 10-/12-/21-CXS10 10-/12-/21-CXS15 10-/12-/21-CXS20 10-/12-/21-CXS25 10-/12-/21-CXS32 10, 20, 30, 40, 50 10 15 20 25 32 M5 x 0.8

Miniature Fittings M3, R(PT) 1/8, M5 Series M

10 19 21.5 18.8 14 28.8 17 17 7.5 6.5 25 22 17 7 30 8 22 12 22 23.5 19.3 17 30.3 19 17 9 8 38 22 Reference dimensions after R(PT) thread installation.

KF

10 18.8 28.8 14 17 19 21.5 17 7.5 6.5 25 22 17 30 7 8 22 12 19.3 30.3 17 19 22 23.5 17 38 8 9 22 Reference dimensions after R thread installation.