Applicable Auto Switch Model

9 9 10 10 11 11 11 11 11 10 10 10 10 OUT() 2nd terminal 9 9 9 10 10 11 8 9 9 Note) Average value at normal temperature including hysteresis.

Vacuum Pad

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

AC

gauge B B AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 81.5 122 142 177 177 254 268 162 197 197 274 288 Model Port size A B C D LL M P E F G H J K Bracket mounting dimensions N 324(374) 334(384) 334(384) 336(386) 336(386) 38 41 39 45 45 53 70 75 90 95 106 106 106 106 106 11 11 11 11 11 25 18 16 35 35 66 66 66 66 66 70 70 70 70 70 210 210 210 210 210 90 90 90 90 90 13 13 13 13 13 3.2

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

CNA

11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 6 7 7 11 11 14 18 18 22 26 With Rod Boot ZZ ZZ Bore size (mm) 40 50 63 80 100 Bore size (mm) 40 50 63 80 100 Stroke range (mm) e l M MM N P Q H S T V W ZZ f h (Both sides) (One side) 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 11 11 14 17 17 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 27 30 31 37 40 1/4 3/8 3/

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Table of Contents

50 70 93 44.5 84 16 303 11 6.4 115 3.3 277 43 20 191 11 20 50 98 70 84 44.5 11 6.4 117.5 16 3.3 316 280 46 20 196 11 20 98 50 70 44.5 84 13 319 11 6.4 117.5 3.3 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

MY1

For MY1M50, 63 Work piece EY SMC EC a FH a 5 4.5 6 4 9 9.5 W 58 70 88 104 128 152 TT 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 7 12 15 15 25 25 S 46.7 67.3 73.2 73.2 99 99 h 3.5 4.5 5.5 5.5 11 11 FW 66 82 95 FH 16 22 22 FC 14 17 22 22 30 35 FB 52 67 78 F 5 6 8 8 8 8 EY 50 57.5 73 87 115 138.5 EC 7.7 9 11.5 12 18.5 19 EB 32 38 50 57 66 77 E 20 24

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Option) JXC-MA1 Page 606-11 VUSB cable (Option) JXC-MA1-2 Cable length: 3 m Page 606-11 VController setting software (Option) JXC-MA1-1 Page 606-11 PC Provided by customer 559-0 A System Construction/Parallel I/O (JXC73/83) Provided by customer. The connected actuators should be ordered separately. Provided by customer.

Modular Design with Uniform Body Style

*11 *11 *11 *11 *1 Set the inlet pressure to at least 0.05 MPa higher than the set pressure. *2 Options B, G, H, and M are not assembled and supplied loose at the time of shipment. *3 The assembly consists of a bracket and set nuts (applicable to the AR20(K)-D to AR40(K)-D).

7ND9071en

CSA C22.2 No. 0-M91, CSA C22.2 No. 94-M91, CSA C22.2 No. 142-M1987, CSA C22.2 No. 157-92, CSA C22.2 No. 213-M1987, CSA C22.2 No. 60079-0:11, CSA C22.2 No. 60079-11:11, CSA C22.2 No. 60079-15:12, CSA C22.2 No. 60529:05, ANSI/ISA 60079-0: 2009, ANSI/ISA 60079-11: 2012, ANSI/ISA 60079-15: 2012, FM 3600 November 1998, FM 3610 October 1999, FM 3611 October 1999, FM 3810-2005, ANSI/ NEMA 250:1991

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

Modular F.R.L. Units

v*11 v*11 v*11 v*11 *1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

CLA

'I. 78 2S 52 14 / 113 21 30 72 23 17 M1 2X l .75 _boot With boot PW S W H 12 ... 1 h f zz j IBore olze k U M MM MM (mm) XIUS N P PG PH PL 40 6 71 11 M1 4Xl .5 7/' 6 20 27 'I, 42 11 20 45 153 8 51 215 43 11 .2 59 223 168 0 I50 58 237 52 11.2 66 245 50 7 80 11 M18Xl .5 30 0/, 46 10 21 V.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(M): 10-SYJ5223-M-M5 DIN Terminal (D): 10-SYJ5223-D-M5 M8 connector (WO): 10-SYJ5223-WO-M5 Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 MAX.10 28.1[35.1] 60.9 53.4 12.7 M8 x 1 32.6 42.1 15.1 39.2[46.2] Approx. 300 (Lead wire length) Pg7 20 20 20 20 107[111.4] 3 3 3 3 87.4[91.8] 105.2 125.2 90.4 77.4 45.4 127 11 11 11 11 23 2-2.6 (For mounting) 2-2.6 (For mounting) 2-2.6

Air Fittings & Tubing

KQ2U23-M5 38 34.5 2.2 2.2 9 M5 X 0.8 10 9.6 41 44 9.6 15.5 37 38 14 3.4 2.9 3.2 1 8 KQ2U23-01S KQ2U23-02S 11 14 1 4 39.5 KQ2U04-M5 M5 X 0.8 M6 X 1.0 4 2.2 2.2 Kl KQ2U04-M6 40 36 10 11 10.4 16 4 10.4 1 8 42 38 KQ2U04-01S 4.2 4.2 11 Ml 1 4 KQ2U04-02S 46 40 20 14 42.5 KQ2U06-M5 M5 X 0.8 M6 X 1.0 2.2 2.2 12 KQ2U06-M6 43 39 13 Hl 1 8 12.8 45.5 41.5 KQ2U06-01S 12.8 11 17 6 1 4 49 43 17

Table of Contents

(Refer to page 14-19-11.)

KJ

(inch) Min. port size D Note) L Q M2 M1 Weight (g) Model Applicable tubing KQ2T01-03 KQ2T01-07 KQ2T03-05 KQ2T03-07 KQ2T05-07 KQ2T07-09 KQ2T07-11 KQ2T09-11 KQ2T09-13 KQ2T11-13 10.4 13.2 11.4 13.2 13.2 15.2 17.9 17.9 21.7 21.7 18 20.5 19.5 20.5 20.5 23 26 26 29 29 4.5 5.3 4.8 5.3 5.3 6 6.6 6.6 7.8 7.8 16 17 16.5 17 17 18.5 21 21 22 22 5 8 6 8 8 11 17 17 26 28 5 32 2.5 15.5 1 8 1 4 3 16 3