3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

Digital Flow Switch (Integrated display type)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

reduces flow setting time

AS-FG AS301FS, AS311FS AS401FS, AS411FS AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic curves

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

AS-FG AS-FG AS301FSG, AS311FSG AS401FSG, AS411FSG AS-FP Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-FM 10, 11, 12 10, 11, 12 12, 13, 16 12, 13, 16 1500 1000 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 08, 09 AS-D 06, 07 1000 AS-T 500 ASP 500 ASN 0 0 5 0 10 5 0 10 AQ Number of needle rotations Number of needle rotations ASV Note) The numbers above the flow rate characteristic

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(For M8: 0.05 Nm, For M12: 0.1 Nm) EX9-AW ES 11 14 Connector type ES M8 connector (For socket), 10 pcs.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Digital Flow Switch (Remote type sensor unit)

Width across flats of attachment 3/8 24 mm 1/2 27 mm 3/4 32 mm 1 41 mm 11/4 54 mm 11/2 54 mm Tighten to the specified torque for piping. The tightening torque for connection threads is shown in the table below.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Locking style (Slotted) Except for VQZ 1000 0.6 0.7 (A) 4 1 (P) 5 (R) Except for VQZ 1000 N.O.

Multi-channel Digital Sensor Monitor

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).

PA3000/5000/PAX1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

Digital Pressure Switch

No.PS-OMX1005 PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20AF-#-#-X576/X577/X578/X579/X580 Table of Contents Safety Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 15 Installation 15 Piping 17 Wiring 18 Outline of Settings [Measurement mode] 21 Pressure Setting 22 3 Step Setting

PSxx-OMU0008CN

No.PS-OMU0008CN-D // ZSE20C(F) ISE20C(H) 2 9 11 12 16 16 19 21 [] 24 25 3 26 28 30 30 30 F0 32 F1 OUT1 33 F2 OUT2 36 F3 38 F4 39 F5 FUNC 41 F6 43 F10 44 F11 50 F80 51 F81 52 F82 54 F90 55 F96 57 F97 58 F98 60 F99 62 63 67 67 68 77 77 79 -1No.PS-OMU0008CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

PSxx-OMS0006CN

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

Dedicated Controller Series LC1 Uniaxial Type

BUSY (11) Operating signal COM +24V 1 COM 11 GND NO.0 When this signal is off, an alarm is being generated for the actuator/controller.

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Series PB1000 Built-in Solenoid Valve Type/Air Operated Type Dimensions/Built-in Solenoid Valve Type/Air Operated Type (mm) 1in = 25.4mm PB1000 FLUID OUT 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Circuit example/Built-in solenoid valve Ball valve FLUID OUT Regulator AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 19 Process Pump Built-in Solenoid Valve Type/Air Operated Type Series PB1000 Dimensions/Built-in Solenoid Valve Type/Air Operated Type PB1000 FLUID OUT Rc 1/8 11 OUT 11 84 72 Mount with this surface (OUT port side) on top 7.5 41 60 45 UP SIDE

Digital Pressure Switch

(Example: When the value can be displayed down to 0.001 MPa for the product for 0 to 1 Mpa, the resolution is 1/1000) Display resolving power Displayed pressure value can be adjusted within the range of 5%R.D. (5% of displayed value).