EX510

to to to 5 5 11 10 9 8 8 9 10 11 1 + 2 + 3 + 4 + 5 + + 5 + 4 + 3 + 2 + 1 6 6 12 13 14 15 15 14 13 12 10 10 6 + 7 + 8 + 9 + 10 + + 10 + 9 + 8 + 7 + 6 PWR PWR 11 11 COM COM 15 15 11 + 12 + 13 + 14 + 15 + + 15 + 14 + 13 + 12 + 11 5A 5A 0V +24V +24V 0V 2 x M4 Mounting hole Shown with cover removed. 60 1711 Series EX510 Parts Description i w t Output Unit No.

MHY2/MHW2

A part z1 m1 = 40 X 7 X 8 X 2.7 X 10-6 Calculation of weight m1 = a X b X c X Specific gravity = 0.006(kg) Iz1 = {0.006 X (40 2+7 2)/12} X 10-6 Moment of inertia around Z1 axis = 0.8 X 10-6 (kgm 2) = 0.8 X 10-6+ 0.006 X 37 2 X 10-6 Iz1 = {m1(a 2+ b 2)/12} X 10-6 IA = 9.0 X 10-6(kgm 2) Moment of inertia around Z axis IA = IZ1 + m1r1 2 X 10-6 z r2 Z2 B part r2 = 47(mm) m2 = 5 X 10 X 12 X

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

Stainless Steel 316

(inch) Connection thread Model KQGL03-00 KQGL07-00 KQGL09-00 KQGL11-00 KQGL13-00 5/32 KQGH03-32 KQGH03-N01S KQGH07-32 KQGH07-N01S KQGH07-N02S KQGH09-N01S KQGH09-N02S KQGH09-N03S KQGH11-N02S KQGH11-N03S KQGH13-N03S KQGH13-N04S 10-32UNF 1/4 5/32 NPT1/8 5/16 10-32UNF 3/8 1/4 NPT1/8 1/2 NPT1/4 NPT1/8 Male Branch Tee Male Branch Tee 5/16 NPT1/4 Applicable tubing O.D.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B LEFS40 H A B [mm] 30 20 10 [mm] 1200 1000 1100 1200 1000 1100 1200 [mm/s] 500 500 410 340 250 200 170 [mm/s] 30 20 10 () [mm/s] 49 33 17 () 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 [mm/s] 400 200 400 200 400 200 [mm/s] 20 10 20 10 20 10 () [mm/s] 25 13 27 14 30 15 () 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 [mm/s] 300 250

JXCx-OMY0006

Outlines of Product 7 2.1 Features 7 2.2 How to Order 8 2.3 Product configuration 9 2.4 Start up procedure 10 (1) Checking the contents of the package 10 (2) Mounting the controller 10 (3) Controller Setting 10 (4) PLC set up 10 (5) Wiring and Connection 10 (6) Supply of power 11 (7) Setting parameters 11 (8) Setup of the operation parameters 12 (9) Test run 12 3.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

X axis Y axis Z axis Z 5 W 5 mm 10 mm 20 mm 0.8 kg 20 Y 10 3.

E-P HYREG

VY1B0-5 VY120-5 1 0 1 2 3 4 5 0 1 2 3 4 5 V V V 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 2 2 2 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15 20 1 3 3 3 A mA mA mA Command signal Command signal Command signal VY1500/1501 VY1400/1401 VY1300

CLQ

) S Stroke range Without auto switch With auto switch Bore size (mm) A B 69 78.5 CL CL B 88 98.5 19.5 22.5 78 88.5 A A + Stroke CL + Stroke RR CW CU 5 79 88.5 29.5 32.5 5 to 50 5 to 50 20 25 L G B + Stroke +0.4 +0.2 -0.1 -0.3 CZ CX Bore size (mm) CD CX G S CW CZ L L1 RR CU 12 14 8 10 27 31 39.2 43.2 18 20 8 10 16 20 4.5 5 18.5 22.5 9 10 20 25 Rod end nut L1 8 Series CLQ Dimensions/32 Double

15

30 20.5 20.5 15.5 8 15.5 M4 x 0.7 M4 x 0.7 11 14 10 3.3 8 2 5 5 27 26 3 40 19 7 3.5 6 CY1H CY1SG10-Z 7.5 8 12 31.5 6.5 40 25 27 17 13.5 17 M4 x 0.7 M4 x 0.7 10.5 16.5 12.5 4.4 10 5 34 33 6 28 2.5 6 45 6.5 4.6 6 CY1SG15-Z 7.5 9.5 16.6 38 6.5 52 28 29.5 20.5 15 20.5 M4 x 0.7 M5 x 0.8 10.5 16.5 11.5 5.4 12 5 40 39 11 28 2 6 60 5.8 8 5.5 CY1F CY1SG20-Z 10 9.5 21.6 44 8.5 62 36 37.5 24 19 20 M6

MVGQ

Minimum Stroke for Auto Switch Mounting (mm) Auto switch Applicable auto switch model No. of auto switches mounted D-Z7, D-Z8 D-Y7W, D-Y7WV D-Y59, D-Y69 D-Y7P, D-Y7PV 5 10 5 10 10 15 1 pc. 2 pcs.

100

opening [Number of rotations] 2 4 6 8 10 11 1 3 5 7 9 12 0 * The flow rate is not the flow rate output from the vacuum port.

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

0.1 ASS 0.2 10 ASR 0 0 0 0 0 0 10 20 5 10 5 10 ASF Number of needle rotations Number of needle rotations Number of needle rotations 15-9-65 Series AS-FM Construction Component Parts No.

Thermo-con/Rack Mount Type

water 0.14 0.25 0.12 Ethylene glycol 20% Ethylene glycol 20% 0.20 0.10 0.08 0.15 0.06 0.10 0.04 0.05 0.02 0 0 1 2 4 7 6 5 3 0 0 1 2 3 5 4 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] Pressure Loss in Facility Water Circuit HECR008-W HECR012-W 0.10 0.10 0.08 0.08 Pressure loss [MPa] Pressure loss [MPa] 0.06 0.06 0.04 0.04 0.02 0.02 0 0 5 10 15 20 0 0 5 10 15 20

PFxx-OMX0002

The time interval for memorizing can be selected from 2 or 5 minutes. Accumulated-value hold time Outputs a value proportional to the flow rate. When the analogue output is in the range 1 to 5 V, it will vary between 1 to 5 V according to the rate of flow. The same for analogue output of 0 to 10 V or 4 to 20 mA.

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

adjuster at retraction end Stroke adjuster at extension end KA 18.5 8.5 5 K 18.5 8.5 4.75 Vacuum suction port M5 x 0.8 5 NA x M4 x 0.7 thread depth 5 8 10 5 9.5 11 I 5.5 J 8 Maximum 11 (With stroke adjuster at retraction end) 9.5 2 Operating port 2 x M5 x 0.8 4H9 ( ) depth 3.5 +0.030 0 2 x M4 x 0.7 thread depth 5 HA GA 4H9 ( ) depth 3.5 +0.030 0 NN x M5 x 0.8 thread depth 10 B A 5 1 20 9

Compact Vacuum Unit

Supply from one side 8 10 10 M5 x 0.8 Supply from both sides 10 12 12 Note) These values are obtained under the standard supply pressure.

HRX-OM-K003

. 5-5 5.3.7 Setting screen . 5-6 5.3.8 Mode Selection screen . 5-6 5.3.9 Initial Setting screen . 5-7 5.3.10 Maintenance screen . 5-9 5.3.11 Option screen . 5-9 5.3.12 Alarm Display screen . 5-10 5.3.13 Information screen . 5-10 5.4 Examples of System Operation . 5-11 5.4.1 Example 1: Circulating fluid set temperature is changed from 25.0C to 34.1C. . 5-11 5.4.2 Example 2: Communication

0.5

level: 1 Air flow level: 1 10 10 10 10 Air flow level: 10 5 Air flow level: 10 5 Air flow level: 10 Air flow level: 10 5 5 Air flow level: 10 Air flow level: 10 5 5 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400