SI Unit for Vacuum Manifold

Product summary 10 2. Wiring 11 2.1. Fieldbus interface connector 11 2.2. Power supply connector 13 2.3. FE terminal 14 3. Configuration 15 3.1. GSD file and symbol file 15 3.2. Head modules 15 3.3. Modules 16 3.4. Sub modules 17 3.5. Configuration steps 18 4. Parameter 19 4.1. Module parameters for Vacuum / Release module 19 5. Process data 23 5.1.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Black Brown Red None None None None None None None White Black Black Red Red Red Black Black White None None Black White White Red Red White None 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 10 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Seal (Length indication) Orange Yellow Pink Blue Purple Gray White White Yellow 015 L Molded cover 2-M2.6 x 0.45

Compact Cylinder

Standard Strokes Bore size [mm] Standard stroke [mm] 12, 16 5, 10, 15, 20, 25, 30 20, 25, 32, 40 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 50, 63, 80, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Intermediate strokes are available as a special order.

Compact Cylinder with Air Cushion Series RQ

B + Stroke L K A + Stroke 2 x 4-M6 x 1.0 effective depth 10 M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5

LG1H

common 10 m or less Note 5) 33 OP Z phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 Emergency stop EMG 42 Servo ON SON 15 Note 4) CN6 RES 19 Reset 3 MO1 PC 17 Proportion control Analog monitor 1 10 VDC 1 LG TL 18 External torque limit selection 10 VDC Analog monitor 2 2 MO2 LSP 43 Forward rotation stroke end LSN 44 Reverse rotation stroke end 2

ASR

Note 3) Not used for 10 and 12. 15-16-9 10 Series ASR/ASQ Flow Characteristics Pressure Valve: Series ASR (Inlet pressure: 0.5 MPa) ASR430F ASR530F ASR630F 20 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Effective area mm2 Effective area mm2 Effective area mm2 400 6 12 1000 15 300 4 8 500 10 200 500 4 2 5 100 10 5 0 10 5 0 10 5 0 Number of needle rotations Number of needle

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

EtherNet/IP TM Compatible Fieldbus System

Power supply for solenoid valves: 24 VDC +10%/-5% 68 No.EX-OMS0014-A Fault No. 10 Fault Possible cause Investigation method Countermeasures Tighten the branch cable connection. (if there is a broken wire, replace the cable) Power supply for input and control: 24 VDC 10% SI unit PWR LED is OFF. Check the branch cable connections and check for broken wires.

10

67.1 8 12 5 M14 x 1.5 19 6 12 92.6 13.5 21.9 15 88.2 73.2 10 17 6 M20 x 1.5 27 6 18 105.2 17 31.2 25 124 99 12 24 8 M27 x 1.5 36 6 25 147 23 41.6 The dimensions of H/L type are the same.

Card Motor

Pushing force 0.9 0.9 Pushing force Pushing force 0.9 4 4 4 Thrust setting value: 3 Thrust setting value: 2.8 Thrust setting value: 2.6 0.7 0.7 0.7 3 3 3 0.4 0.4 0.4 2 2 2 Thrust setting value: 1 Thrust setting value: 1 Thrust setting value: 1 0.2 0.2 0.2 1 1 1 0 0 0 0 0 0 0 2 4 6 8 10 Pushing position [mm] 0 5 10 15 20 Pushing position [mm] 0 5 10 15 20 25 30 Pushing position [mm] Pushing

High Power Cylinder Series RHC

area So [mm] 10 1/4,3/8 20 2000 6 10 1/4, 3/8 2500 7.5 =0.7 10 1/4, 3/8 0.5 3000 9 10 0.1 0.3 6 1/4,3/8 500 2.5 8 1/4, 3/8 1000 5 0 10 1/4, 3/8 1,000 2,000 3,000 25 1500 7.5 Maximum speed Vmax [mm/s] 10 1/4 2000 10 32 2500 3000 12.5 15 1/4 1/4 30 6 10 1/4, 3/8 =0.7 500 4 20 0.5 0.1 0.3 10 10 1/4, 3/8 32 1000 8 1500 2000 2500 3000 12 16 20 24 1/4,3/8 3/8 3/8 3/8 0 1,000 2,000 3,000 Maximum

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

area (mm2) 1.5 2 3.5 4.5 7 6.5 10 14 16 21 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-49

AC Servo Motor Driver (Pulse input type/Positioning type)

PA06 1 100 35 100 (10) (7) (10) Electronic gear denominator *3.

ChemicalThermo-con

0.7 0 0 0 5 10 15 20 0 5 10 15 20 Flow rate (L/min) Flow rate (L/min) Pressure Loss in FacilityWater Circuit Clear water HED003 HED005 HED007 1 0 2 3 4 gpm 1 0 2 3 4 gpm 100 kPa 100 kPa 15 psi 15 psi 80 80 12 12 Pressure loss Pressure loss 60 60 9 9 40 40 6 6 20 20 3 3 0 0 5 10 15 0 0 5 10 15 Flow rate (L/min) Flow rate (L/min) 179 Series HED Dimensions Unit: inch (mm) HED003

MHF2

Auto Switch Mounting Groove Dimensions M3 x 0.5 5 1.7 15 33 4 20 Accessory option: Hexagon socket head screw (special screws) 3.3 2-2.5H9 +0.025 0 depth 2.5 3 9 9 2-M4 x 0.7 thread depth 5 Groove for auto switch mounting 14 14 Mounting thread 15 38 12-3-15 16 Series MHF2 Dimensions MHF2-12D1 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Mounting thread 4 58 4 40

MHF2

14 Mounting thread 15 38 12-3-15 16 Series MHF2 Dimensions MHF2-12D1 3H9 +0.025 0 depth 3 42 3H9 +0.030 0 depth 3 2-M4 x 0.7 thread depth 10 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Mounting thread 4 58 4 40 68 M5 x 0.8 2-M4 x 0.7 thread depth 5 20 54 Finger

Stainless Steel 316

(inch) M Weight (g) A D L1 L1 Applicable tubing M 10 16 18.3 18 3.5 KQGL03-32 10-32UNF 10.6 20.5 18 5/32 12 19.5 20.7 21 4.2 KQGL03-N01S D NPT1/8 A 10 17 20.5 25 3.5 KQGL07-32 10-32UNF L2 12 13 20.5 22.1 22.9 27 18.8 KQGL07-N01S 1/4 NPT1/8 H Connection thread 9 14 24.5 25.2 35 KQGL07-N02S NPT1/4 12 21.9 25.3 37 KQGL09-N01S NPT1/8 (In case of R) 15 14 25.9 24.9 27.6 45 20.9 21.6 KQGL09-N02S

JXCx-OMT0005CN

1 ALARM ESTOP WAREA AREA INP SETON SVRE BUSY 2 ALM FG READY 3 4-7 4byte 8-9 2byte 20Byte 10-11 2byte 12-15 4byte 16 1 17 2 18 3 19 4 Byte0,1 Byte Bit 0 OUT0 DRIVE No.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N

Sine Cylinder Series REC

2) 2 15 + 45 D-C7 D-C80 10 15 50 50 + 45 (n 2) (n = 2, 4, 6, ) D-H7 D-H7W D-H7BAL D-H7NF (n 2) 2 15 + 45 10 15 60 + 45 (n 2) 60 (n = 2, 4, 6, ) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 65 + 50 (n 2) 10 15 65 (n = 2, 4, 6, ) D-B5 D-B64 D-G5NTL (n 2) 2 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6, ) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 100