Cylinder with Turntable ø63, ø80, ø100 Series MGT

Port thread type 80 80 mm Rc Nil 100 100 mm Table position detector hardware TN NPT Position detector arms Switch bracket Positioning angle Symbol TF G Table unit/ Auto switch a b c d 10 11 12 13 14 15 20 23 25 180 c Nil Without auto switch (Built-in magnet) Stroke (mm) 90 Refer to Standard Stroke on page 452.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

(N) Backlash Manual release 12 16 20 40 Head end only 8 5, 10, 15, 20, 25, 30 125 211 53 82 329 29 12, 16 25, 50, 75, 100 1 mm Non-lock type only 25, 50, 75, 100, 125, 150, 175, 200 20, 25, 32, 40 Strokes other than the above are produced upon receipt of order. Theoretical Output (N) Stud Bolt Part No.

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146

Air-hydro Unit

The speed will be approximately 1.4 times the date given on page 10-17-3.

Free Mount Cylinder Series CU

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

KJ

F (mm) Weight (g) 65 72 81 91 97 112 Port B Min. port size L2 L3 L4 L5 L6 P Q1 Q2 M L1 KM12-04-02-6 6 17 40 89 110 99 125 108 139 1 4 6 4 10 18 29.5 19.5 29 10.6 16 12 KM12-04-02-10 10 KM12-06-02-6 6 KM12-06-02-10 10 KM12-08-03-6 6 KM12-08-03-10 10 61.5 47 1 4 17 7.5 6 10 19.5 31.5 21.5 31 13 17 13.5 73 55 3 8 19 9 8 11.5 22.5 35.5 24 34.5 15.5 18.5 14.7 86 Dimensions: KM13 Applicable tubing

AS

M Mass (g) 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 27.9 28.2 29.6 32.4 40.2 32.5 33.1 36.4 44.5 37.9 41.0 43.3 44.3 37.9

KQ2

4 9 4 9 10 8 10 19 32 11 19 32 25 25 32 58 27 35 61 15.5 15.5 2.3 2.5 2.3 2.8 3.6 2.3 15 21.6 14.5 19.6 19.6 18 19.6 24 25.4 21.1 25.5 26.9 23.1 26.5 27.9 32.1 27 28.4 32.6 16.5 16.5 8 10 8 10 10 Applicable tubing 9.6 1 8 1 8 10-32 UNF 5 32 10.4 16 17 1 8 3 16 1 8 11.4 16.5 18 10-32 UNF 11.11 1 8 Connection thread 1 4 13.2 17 19 10 1 4 14.29 17.46 12.7 14.29 17.46 4.6 3 8 1 8

Environment

Duty ratio: 50% Duty ratio: 25% 15000 15000 10 10 Duty ratio: 100% Duty ratio: 100% Duty ratio: 75% 5000 5000 Duty ratio: 75% The value of 50% or less is the same as duty ratio 50% 0 0 0 5 10 15 20 0 2.5 5 7.5 10 Work load [kg] Work load [kg] 125 LEJ Series AC Servo Motor Clean Room Specication Work LoadAcceleration/Deceleration Graph (Guide) LEJB40/Belt Drive: Horizontal LEJB63/Belt Drive

AC Servo Motor Driver (CC-Link Type ）

4 10.

AC Servo Motor Driver (CC-Link Type ）

0.3 Encoder Cable (Note 3) ETFE SVP 70/0.08 (AWG#22 or equivalent)-3P Ban-gi-shi-16824 LE-CSE-RB LE-CSE-RA 2 to 10 AWG22 6 (3 pairs) 70/0.08 56 or less 1.2 7.1 0.3 LE-CSM-SA 2 to 10 AWG18 4 34/0.18 21.8 or less 1.71 62 0.3 HRZFEV-A(CL3) AWG18 4-cores LE-CSM-SB 2 to 10 Motor cable LE-CSM-RA 2 to 10 (Note 5) AWG19 or less 1.63 5.7 0.5 (Note 4) RMFES-A(CL3X) AWG19 4-cores LE-CSM-RB 2 to 10

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

10 ISO Class 8 10 10 0 L/min (ANR) ISO Class 7 ISO Class 7 10 10 Particle concentration [particles/m3] Particle concentration [particles/m3] ISO Class 6 ISO Class 6 10 10 0 L/min (ANR) 50 L/min (ANR) ISO Class 5 ISO Class 5 10 10 1000 1000 20 L/min (ANR) ISO Class 4 ISO Class 4 100 100 70 L/min (ANR) 30 L/min (ANR) 10 10 1 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

1.1

0 10 20 30 40 Circulating fluid temperature (C) HRG010-A HRG010-W 12 12 60 [Hz] 60 [Hz] 10 Cooling capacity (kW) Cooling capacity (kW) 10 50 [Hz] 50 [Hz] 8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) HRG015-A HRG015-W 18 16 60 [Hz] 16 60 [Hz] 50 [Hz] 14 Cooling capacity (kW) Cooling capacity (kW) 14 50 [Hz] 12 12 10 10

ITV

10 Dimensions not shown are same as on page 828.

•

K ,L Y Model 'A .8 C D E F I:MSXQ.8 I: Ji J ;K .L y G H J G H ZPT40B 40 43 34 7.5 60 110 125 5 10 1 1265 6.2 13 4.4 48 16 ZPTSQ8.

42

Description Material Q'ty VFR VVQ5000-80A-1 Gasket HNBR 10 Type VVQ5000-80A-2 Gasket HNBR 10 Option VQ7 A For 1 station Note) Spare parts consist of sets containing 10 pcs. each.

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

V

(mm) 2, 4, 6, 8, 10, 13, 16, 20, 25, 32, 40, 50 10, 13, 16, 20, 25, 32, 40, 50 10, 16, 25, 40 D I M E N S I O N S PA D D I A M E T E R S 2, 4, 6, 8 Material (colour) NBR (Black) Hardness 50 shore S P R I N G F O R C E ( N) Pad dia.

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.