Compressed Air Cleaning Filter Series

8, 1/4 300 250C 1/4, 3/8 750 350C 3/8, 1/2 1,500 Piping support type AMG 450C 1/2, 3/4 2,200 550C 3/4, 1 3,700 650 1, 1 1/2 6,000 850 AMG150C to 550C AMG650/850 1 1/2, 2 12,000 2C 1/8, 1/4 300 Large dust particle filtration, Oil droplet separation Large dust particle filtration, Oil droplet separation 4C 1/4, 3/8 750 8C Main Line Filter 3/8, 1/2 1,500 Piping support type 11C 1/2, 3/4 2,200

Vacuum System Peripherals:

(V) Body ported 1 8 1 4 , 230 to 310 570 to 650 , 0.66 1.6 5.5 0.71 2.4 3.3 6.6 1.2 3.1 8.1 15 19 to 28 1 4 , 1 4 3 8 , 1 8 1 4 VT307(V) VT317(V) 1 4 VT301 , VP342 1 8 1 4 , VP542 1 4 3 8 , VP742 3 8 1 2 Body ported VT315 VT325 , VP344 1 8 1 4 , VP544 1 4 3 8 , VP744 3 8 1 2 Base mounted VT307 , , VP3145 3 8 3 4 1 2 VP542 , 1 1 VP3165 3 4 1 4 1 , 1 , 2 Body ported VP3185 1 4 1 2 Low wattage

HRX-OM-X084

. 7-4 7.4 Other Errors . 7-6 Chapter 8 Control, Inspection, Exchange and Cleaning . 8-1 8.1 Quality Control of Circulating Fluid and Facility Water . 8-1 8.2 Inspection, exchange, cleaning . 8-2 8.2.1 Daily check . 8-2 8.2.2 Monthly check . 8-4 8.2.3 Inspection every 3 months . 8-5 8.3 Stop for a Long Time . 8-8 8.3.1 Discharge of the circulating fluid . 8-8 8.3.2 Discharge of the facility

Free Mount Cylinder

31 1 8 Rc 1 8 Rc 1 8 Rc 1 8 8 9 10.5 26 32 40 40 50 62 3 4 5 8 10 12 9 10 11 8 10 12 16 20 24 20 22 29 33 43.5 51.5 33.5 34 34.5 6.6 5 to 50 19 21.5 23 8 5 to 50 11.5 5 to 50 L H J P Q QA R S SA T W Y Z Model ZC(D)UKD16 ZC(D)UKD20 ZC(D)UKD25 ZC(D)UKD32 ( ): In the case of a mounted auto switch.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Compact Manifold Regulator Series ARM5

8 1 8 ARM1000 57 1 8 1 8 VEX1 1 4 1 8 ARM2000 136 1 8 1 8 SRH How to Order SRP ARM 1000 A1 5 01 G SRF Option Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting ARX20 Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

LX

to cross section C-C. 27.5 T-slo B Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 LXSH5SB-50B LXSH5SB-75B LXSH5SB-100B LXSH5SB-125B LXSH5SB-150B Refer to page 301 for mounting.

Cylinder with Lock

1 65 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 n (Same surface) 90 + 100 (n 2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

B port Rc(PT) , C6 A, B port side P port Rc(PT) 1 8 1 8 Rc(PT) 01 1 4 6 One-touch fitting C6 43 Type (5 Port/Base mounted) How to Order SS5YJ5-43-05 -C4 Stations 2 stations 02 R port Rc(PT) : : 1 8 20 stations 20 A, B port C4 P port Rc(PT) C4 4 One-touch fitting A, B port side 1 8 1.2-42 Series SYJ5000 Flat Cable Manifold Common SUP/Common EXH Note) For more than 8 stations, supply air to

Sine Rodless Cylinder Series REA/REB

30 75 M5 x 0.8 REAS20 40 70 90 90 38 73 16.5 25.5 87 115 Rc 1/8 NPT 1/8 G 1/8 CX REAS25 40 70 100 90 42 73 16.5 25.5 0.5 1 97 115 Rc 1/8 NPT 1/8 G 1/8 REAS32 75 110 50 91 18.5 28.5 0.5 1 119 138 40 122 Rc 1/8 NPT 1/8 G 1/8 MQ REAS40 105 120 64 99 20.5 35.5 1 1 142 155 65 145 Rc 1/4 NPT 1/4 G 1/4 PA dimensions are for split from center.

Air Fittings Fitting Series For Special Environment

8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (

CJ2

1 !

Modular F.R.L. Unit

AR60 1 AF + AFM + AR 1/8, 1/4 AC20C AF20 AR20 AFM20 1/4, 3/8 AC25C AF30 AR25 AFM30 1/4, 3/8 AC30C AF30 AR30 AFM30 1/4, 3/8, 1/2 AC40C AF40 AR40 AFM40 3/4 AC40C-06 AF40-06 AR40-06 AFM40-06 AW + AFM AC20D 1/8, 1/4 AW20 AFM20 AC30D 1/4, 3/8 AW30 AFM30 AC40D 1/4, 3/8, 1/2 AW40 AFM40 AC40D-06 3/4 AW40-06 AFM40-06 Table of Contents F.R.L.

CNA

C D E F GA GB GC GD GL GL1 GR H1 P CY1 1/4 3/8 3/8 1/2 1/2 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 27 30 31 37 40 6 7 7 11 11 M8 X 1.25 M8 X 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 56.5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

-6 YNT-1210S k FVD5.5-8 l FVD8-6 DH-111 DH121 m FVD14-8 DH-112 DH122 YF-1 E-4 YNE-38 n FVD22-8 DH-113 DH123 (Note 1)p R38-8 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 q FVD2-6 YNT-1614 Note 1.

HRX-OM-W002

5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20 1 10 12 1 13 4 15 3 16 1 15 2 16 18 4 8 4 3 24 24 3 2 14 (CN6) BR BR BR BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL 3 2 1 4 4 3 2 2 1 1 1 1 1 3 3 6 8 3 2 2 5 7 2 4 (CN2) (CN1) 1 1 3 3 2 2 4 4 YL BK BK BK BK BR RD

REA/REB

1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

REA/REB

M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless