SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

PFxx-OMP0001CN

[P_2][n_2][] [H_2][] [F 2] OUT2 500 L/min OUT1 -37No.PF-OMP0001CN-F b. () [P2L][n2L][] () [P2H][n2H][] [ H2][] [F 2] OUT2 500 L/min OUT1 -38No.PF-OMP0001CN-F c. 0999,999,999 3 (3) [P2.1][n2.1][] (3) [P2.2][n2.2][] (3) [P2.3][n2.3][] [F 2] OUT2 /OUT1 OUT1 -39No.PF-OMP0001CN-F d.

CM2

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Width across flats B3 e 9 l 9 f h ZZ + Stroke Boss-cut style Built-in One-touch fittings One-touch fitting port size P ZZ + Stroke H1 H G F E MM P ZZ B2 D H2 I A AL B1 K N NA NN S Bore size (mm) 0 0.033 0 0.033 0 0.033 0 0.039 20 41 8 13 20 116 8 18 5

Precautions 1

(mm) HX H2 Q H1 NN F H MM ZZ QY I K N NA S AL D A B2 B1 Eh8 Bore size (mm) 20 25 32 40 Stroke range 0 0.033 20 8 5 13 41 116 14 28 5 15 24 62 8 18 26 Up to 300 13 19.8 65.3 15.5 M8 x 1.25 M20 x 1.5 0 0.033 26 8 6 13 45 120 14 5.5 15 30 62 22 10 22 32 Up to 300 17 70.5 33.5 19.5 M26 x 1.5 M10 x 1.25 0 0.033 26 8 6 13 45 122 16 5.5 15 64 12 22 32 Up to 300 17 76.5 37.5 25.8 34.5 19.5 M26 x

Compact Cylinder with Lock Series CLQ

80 100 L1 X C1 H2 Rod end nut Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

Plate Cylinder with Lock Series MLU

depth 12 7 8 9 9 12 14 16 20 M5 x 0.8 depth 11 M6 x 1 depth 11 45 50.5 53 62 45 51.5 53 62 10 8.5 9 11.5 15.5 17.5 18.5 23 32.5 37 38.5 43 2.5 0 0 6 5 5.5 7 8 36 40 45 53 6 7 8 11 54 68 86 104 26 42 54 64 5 to 300 5 to 300 5 to 300 5 to 300 MLUB25 MLUB32 MLUB40 MLUB50 Rc, NPT, 1/8 Rc, NPT, 1/8 M8 x 1.25 depth 13 M8 x 1.25 depth 11 Rc, NPT, 1/8 M10 x 1.5 depth 14.5 M10 x 1.5 depth 15 KA H2

Table of Contents

Straight Union: KFH H2 (width across flats) H1 (width across flats) Applicable tubing (mm) I.D.

Process Gas Diaphragm Valve

Applicable Fluid Process Gas Molecular Formula Process Gas Molecular Formula Boron11 Trifluoride Chlorine 11BF3 Cl2 Argon Chlorine Trifluoride Ar ClF3 Arsine Carbon Monoxide AsH3 CO Boron Trichloride Carbon Dioxide CO2 BCl3 Boron Trifluoride Germane BF3 GeH4 Halocarbon114 Hydrogen C2ClF4 H2 Halocarbon115 Hydrogen Sulfide C2ClF5 H2S Halocarbon116 Hydrogen Selenide H2Se C2F6 Acetylene Hydrogen

Shuttle Valve/AND Valve with One-Touch Fittings

Dimensions(mm) 1in = 25.4mm Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 10 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 SMC Pneumatics, Inc. 6 SMC Pneumatics, Inc. 7 World Wide Support...

CJ2X/CUX/CQSX/CQ2X/CM2X

CY MQQ M Auto switch Cylinder stroke (mm) Refer to Standard Stroke below. RHC Nil Without auto switch (Built-in magnet) Stroke MK(2) For the applicable auto switch model, refer to page 10-3-14.

LFE-OMZ0013

Use the accumulated pulses to obtain the accumulated flow based on the accumulated volume per pulse (page 62). -28No.LFE*-OMZ0013 Hysteresis H_1 (H_2) Hysteresis mode Instantaneous flow n_1 (n_2) Window comparator mode Hysteresis H1(H2) Hysteresis H1(H2) n1H n1L Instantaneous flow (n2H) (n2L) Accumulated increment output mode Count up from "0".

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

Applicable bore size SNJ-016C SNKJ-016C 10 16 C1 d C2 d B1 B2 H1 H2 14 17 16.2 19.6 4 4 7 8 8.1 9.2 3.2 4 M10 x 1.0 M12 x 1.0 M4 x 0.7 M5 x 0.8 The applicable mounting nuts are different from those for standard cylinders. 7 B CJ2W-Z Series 10-/1121-/22Double Rod Cylinder 10, 16 How to Order Clean series 10 11 Relief type Vacuum suction type M9BW Z 60 16 L W 2 J D C 10 B M9BW Z 60 16 L

Industrial Filter

[V-band for replacement] No.: CY-24S -bracket Clamping position check pin Bolt Latch Clamping nut Fig.

PF-OMM0004_C

P2dH n2dH P2dL n2dL P2AH n2AH P2AL n2AL P2L/n2L P2H/n2H H2 (38 ) tnL/tPL tnH/tPH Ht (40 ) P_2/n_2 H_2 (38 ) tn/tP H_t (40 ) (39 ) 4. [F 2] OUT2 -36No.PF-OMM0004-D 1. [F 2] [oUt2] OUT2 [-] 2. ON-OFF -37No.PF-OMM0004-D 3. a. ([n_2]) 4. [F 2] OUT2 b. ([n2L]) [P2H] or [n2H] ([n2H]) 4. [F 2] OUT2 -38No.PF-OMM0004-D c.

IZE11.eng

The descriptions for OUT2 are the same as those for OUT1, under the conditions that [P_1] should be replaced by [P_2], [P1H] should be replaced by [P2H], [n_1] should be replaced by [n_2], [n1H] should be replaced by [n2H], [H_1] should be replaced by [H_2] and [H1] should be replaced by [H2]. Absolute setting is assigned when window comparator is set.

KB

Weight (g) H2 (Hex.) H1 (Hex.) D L A2 A1 M Part No.

CLQ

L1 X C1 H2 Note) Be sure to use the attached flat washers when mounting a cylinder from the rod side.

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators d C2 C1 B2 H2 B1 H1 Material: Carbon steel (mm) Material: Carbon steel (mm) Part no. Applicable bore size Part no.

Low Friction: Double Acting Single Rod Series CM2Q ø20, ø25, ø32, ø40

9 Rod seal NBR Basic (B) CM2QB Bore size Stroke (mm) Stroke range 1 to 300 1 to 300 1 to 300 1 to 300 S 65 65 67 91 N 15 15 15 21.5 Bore A 18 22 22 24 B2 26 32 32 41 D 8 10 12 14 H2 8 8 8 10 I 28 33.5 37.5 46.5 ZZ 119 123 125 157 NA 24 30 34.5 42.5 AL 15.5 19.5 19.5 21 E F 13 13 13 16 K 5 5.5 5.5 7 NN M20 X 1.5 M26 X 1.5 M26 X 1.5 M32 X 2 B1 13 17 17 22 G 8 8 8 11 MM M8 X 1.25 P 1/8 1/8 1

FGG-E

element Spring AN-3S SUS316WPA Stabilizes the element seal Element holder L-27S SUS316 Seals the element Element guide U-8SU-9SU-10S SUS304 Guides the element Tension bolt SUS304 Shaft fix the element Element Assemble elements into this Joint J-4S SUS316 Seal the space between element AL-25S NBR O ring AL-22S FKM Oring used to seal the sealing part of the cover and the case V band CY