Flow Control Equipment

Meter-out Control Series ASN2 Speed Exhaust Controller Series ASV ASS100 ASS300 ASS500 ASS600 / 1 4, / 3 8 / 1 8 ASN2-M5 ASN2-01 ASN2-02 ASN2-03 ASN2-04 ASV120F-M3 ASV220F-M5 ASV310F ASV410F ASV510F / 1 8 M5 M3 M5 4.6-1 / 1 2, / 3 4 / 3 4, 4.2-1 4.4-1 / 1 4 / 3 8 / 1 2 / 1 8, / 1 4 1 / 1 8, / 1 4, / 3 8 Meter-in Control ASS110 ASS310 / 1 4, / 3 8 / 1 8 / 1 4, / 3 8, / 1 2 4.6-1 Quick Exhaust

Electric Actuator

Connector C Actuator side (Terminal no.) 1 2 5 6 (8) (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L)[m] 1 3 5 8 A B C 1 2 A6 B6 1.5 3 5 8 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 15 (5.5) Actuator side (14) (18) (Terminal no.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit for 2 to 24 stations/Single wiring L0 kit Stations (1 to 8) L1 kit Stations (1 to 8) L2 kit Stations (1 to 8) F1 F2 F3 P1 P2 P3 L0 L1 L2 Replacement Parts No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

20 24 36 44 56 V 18 22 20 28 28 Y 38 47 Z Bore size (mm) 16 20 32 40 50 14 14 19 1 8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.

Dual Speed Controller with One-touch Fitting Series ASD

Port size 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 4 ASD230F-M5 ASD330F-01 ASD430F-02 ASD530F-02 ASD530F-03 ASD630F-04 M5 x 0.8 R 1/8 R 1/4 R 1/4 R 3/8 R 1/2 ASD230F-U10/32 ASD330F-N01 ASD430F-N02 ASD530F-N02 ASD530F-N03 ASD630F-N04 10-32 UNF NPT 1/8 NPT 1/4 NPT 1/4 NPT 3/8 NPT 1/2 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1 MPa Min. operating pressure

Cylinder with Lock

8)*1 80 + 30 (n 2) (n = 2, 4, 6, 8)*1 85 + 30 (n 2) (n = 2, 4, 6, 8)*1 D-A44 n (Same surface) 70 + 50 (n 2) (n = 2, 4, 6, 8)*1 75 + 50 (n 2) (n = 2, 4, 6, 8)*1 80 + 50 (n 2) (n = 2, 4, 6, 8)*1 85 + 50 (n 2) (n = 2, 4, 6, 8)*1 Double Acting, Single Rod Double Acting, Double Rod 1 70 75 80 85 D-F5m D-J59 D-F5mW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 1 90 95 100 110

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

M5 6 4 8 (1) M5 X 0.8 SYJ300 Top (2) SY Body ported Base mounted Rc(PT)1/8 SYJ SYJ500 Top Rc(PT)1/8 VK (1) Rc(PT)1/8 SYJ700 Top VZ Rc(PT)1/4 VT (1) M5 X 0.8 SYJ300 Side VT Rc(PT)1/8 Bottom VP SYJ500 Rc(PT)1/8 Side VG Rc(PT)1/8 (1) SYJ700 Bottom Rc(PT)1/4 VP Rc(PT)1/4 Side Note 1) Only internal pilot style Note 2) Only external pilot style VQ VQZ VZ VS Series SYJ300 Series SYJ500 Series SYJ700

Mechanically Jointed Rodless Cylinder Series MY1

5.4 114 53 90 9 M5 x 0.8 30 20 MY1H25 40.5 Rc 1/8 39 53 140 11 6.6 19 30 68 16 M8 x 1.25 6.8 140 70 110 13 M6 x 1 37 25 MY1H32 50 Rc 1/8 49 64 170 14 8.5 23 36.5 84 15 M10 x 1.5 8.6 170 85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

C95

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

8 o !6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

Cylinder with Lock

1 !5 !6 @5 @8 @9 #6 r #3 #4 o q$6y#9 #1 $4 #0 B A w !3 !4 !7 !8 @0 !9 @1 @3 @4 @6 #8 #7 $0 $1 $2 $3 $5 $7 $8 $9 @9 @7 #5 @2 B section (Release piston bushing) A section: 50 to 100 100 80 63 50 40 !2 !2 Component Parts Component Parts No.

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

Auto Switch Guide

color Indication Type P. 8-30-42 Band, Rail, Tie-rod, Direct Mounting With Timer P. 8-30-47 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 8-30-49 Rail Mounting Wide Range Detection Type P. 8-30-50 Band Mounting Made to Order Specifications P. 8-30-52 Technical Data 1, 2 P. 8-30-55 8-30-1 2 SMC Auto Switch Variations Function Type Electrical

HRX-OM-I051

. 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-11 8.1.3 Communication specification. 8-12 8.1.4 Alarm signal selection . 8-14 8.2 Outer Dimensions . 8-15 8.2.1 Part 1 . 8-15 8.2.2 Part 2 . 8-15 8.2.3 Part 3 . 8-16 8.3 Flow Chart . 8-17 8.3.1 Part 1 . 8-17 8.3.2 Part 2 . 8-18 8.4 Offset Function . 8-19 8.4.1

Free Mount Cylinder Series CU

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

CNA

For details, refer to page 9-15-40. 9-7-26 27 Series CNAW Cylinder with Lock Double Acting, Double Rod Construction #8 t #5 @7 e !6 !0 u @5 i !5 !1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL CL1 MLGC #1 @3 !4 %0 !3 #9 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !

CNA

l + 2 stroke Bore size (mm) Stroke range (mm) 40 50 63 80 100 MM N J K KA A AL B B1 BN BP BQ C D E F GA GB GC GD GL GL1 GR H1 P 1/4 3/8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14

3 Port Air Operated Valve Series SYJA300

8 1/8 1/8 1/8 1/8 Type SS3YJ5-40-M5 Type SS3YJ5-40-01 C4 1/8 1/8 M5 x 0.8 Base mounted for internal pilot Type SS3YJ5-41-M5 SYJ54 Type SS3YJ5-41-01 1/8 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5