Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Non-Cassette Type, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: Two Axes Bellows, Applicable Wafer Size 200mm, Valve Type: Cassette Type Full MESC, Opening Window Size: 46x236, Applicable Wafer Size 200mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: High Vacuum Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Non-Cassette Type, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: Kalrez® 4079, Auto Switch & Connector: 2 pcs D-A93 w/Multiple Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Half MESC, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: -
Type: Parallel Seal Slit Valve, Valve Size: One Axis Bellows, Applicable Wafer Size 300mm, Valve Type: Cassette Type Standard, Opening Window Size: 50x336, Applicable Wafer Size 300mm, Gate O-ring Material: FKM, Auto Switch & Connector: 2 pcs D-A93 w/D-sub Connector, End Lock: None
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø40 mm, Port Thread: NPT, Clamp Stroke: 20 mm, Rotary Direction: Counterclockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø40 mm, Port Thread: NPT, Clamp Stroke: 20 mm, Rotary Direction: Clockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø50 mm, Port Thread: NPT, Clamp Stroke: 20 mm, Rotary Direction: Clockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø32 mm, Port Thread: NPT, Clamp Stroke: 10 mm, Rotary Direction: Counterclockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø32 mm, Port Thread: NPT, Clamp Stroke: 10 mm, Rotary Direction: Clockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø50 mm, Port Thread: NPT, Clamp Stroke: 10 mm, Rotary Direction: Clockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 5m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø63 mm, Port Thread: NPT, Clamp Stroke: 10 mm, Rotary Direction: Counterclockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -
Mounting: Through-hole/Both Ends Tapped Common, Basic, Bore Size: Ø63 mm, Port Thread: NPT, Clamp Stroke: 10 mm, Rotary Direction: Clockwise, Body Option: w/Arm, Auto Switch: A93--Reed, DC Volt, AC Volt, LED, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Made to Order: -