CEx-OMI0064

No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. + 3 3 3 3 3 3 + 1 1 1 1 1 1 2 2 2 2 2 2 C (O/H/C) # 0 0 D W [CR] No. No. )0 ,+O H C 29 - # 0 0 P R [CR] No.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

1 t i With auto switch (Built-in magnet) 20, 25 12, 16 t y e !2 !0 q r !3 !1 w t !1 !2 !0 o q r !3 w y e Component Parts No.

REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts No. No. Qty Description Material Remarks Description Material Remarks Qty 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Rod cover Cushion spear A q o 1 1 Brass Electroless nickel plated Aluminum alloy White anodized Head cover Cushion spear B w !

RZQ

0 y q w !9 e @1 @4 !3 RE A B @0 REC !2 CX @3 !1 CY MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G @2 !5 !7 !6 !4 @3 t !

Peltier-type Chiller Thermo-con/ Compact Type

Note q Dustproof filter set HEF-FL001 Front panel, Filter: 1 piece each w Dustproof filter HEF-FL002 Filter: 1 piece w 11 HEF Series Specific Product Precautions Be sure to read this before handling the products. Refer to the back cover for safety instructions.

VM

Frequency Port size (Nominal size) Piston style 0.15 to 1.0MPa 5 to 60C (No freezing) VM/VR Red Green Orange Rc(PT) (6A) 40g VH 300 c.p.m or less R(PT) (6A) 1 8 1 8 Weight 6g Construction/Component Parts Construction/Component Parts w q Description Aluminum alloy Material Notes No. w q Description Brass Material Notes No.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

1 w !4 PF2M701/702(-L) PF2M711S(-L) !5 * There is no bypass construction for the 1 and 2 L ranges. Component Parts No.

ZQ

Actuation Warning 1 Normally closed q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1 t LEM e Motor type*1 r Lead [mm] q Accuracy LEY Symbol Type Output [W] Actuator size Compatible driver*2 Nil Basic type H High precision type Symbol LEJS40 LEJS63 A 16 20 B 8 10 LES S2 AC servo motor (Incremental encoder) 100 40 LECSA-S1 w Size S3 AC servo motor (Incremental encoder) 200 63 LECSA-S3 LEPY LEPS t Stroke [mm]*3 40 63 S6 AC servo motor (Absolute encoder) 100 40 LECSB-S5 LECSC-S5

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

CNG

Graph 1 10 500st 600st 700st 400st 4 5 300st 3 200st 2 Load movement time: t(s) 100st [Example] 1 Example) 0.4 0.5 0.3 0.2 300 0.1 V' 100 200 1000 400 500 Maximum speed: V(mm/s) V W Step 2 Find the cylinder bore size.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73

rep-filter-e

Do not take the tension bolt away from the case. 460 Series FGE Replacement Procedure of Element 1 1. Removal of the Cover 1-1. Stop operation 1-2. Close the valve in order of INLET, then, OUTLET. 1-3. Zeroes the pressure in the filter. 1-4. Open the drain valve for inlet and outlet to discharge all fluid inside. 1-5. Pull out the V-band clamping position check pin. 1-6.

Industrial Filters Replacement Procedure

Do not take the tension bolt away from the case. 460 Series FGE Replacement Procedure of Element 1 1. Removal of the Cover 1-1. Stop operation 1-2. Close the valve in order of INLET, then, OUTLET. 1-3. Zeroes the pressure in the filter. 1-4. Open the drain valve for inlet and outlet to discharge all fluid inside. 1-5. Pull out the V-band clamping position check pin. 1-6.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

1

Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.

Compact Cylinder Series NCQ8

1/16"), 150 (1-1/2"), 200 (2"), 250 (2-1/2") N-through hole H-thread C-depth 4 places Z Q Q P-port 2 places J E M2 bolt circle W M1 D-rod dia.

Electric Slide Table / High Precision Type 《 AC servo motor 》

*5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9 Rated voltage [V] 24 VDC 0/10% * 1 The force setting range (set values for the driver) for the force control with