Electric Actuators

P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

1

32 13.5 14.5 C76 50 165 67 19 80 37 15 16.5 63 165 67 19 100 44 16.5 17.5 C85 80 199 81 25 The above diagram shows head side lock type and manual releasing non-lock type.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

ZP

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Table of Contents

80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2 0.1 0.1 Refer to page 303 for acceleration time. 213

Tie-rod Type Hydraulic Cylinder

80 60 22.4 30 17 17 M10 x 1.5 22 12 25 M18 x 1.5 30 80 80 26 65 13 65 212 12 75 115 M12 x 1.75 32 8 100 100 75 28 32 22 20 26 14 29 M22 x 1.5 35 90 100 34 80 13 80 234 14 90 139 M27 x 2 M12 x 1.75 38 6.5 118 118 90 35.5 35 27 19 27 14 34 35 100 125 34 80 15 100 250 16 112 170 M14 x 2 M27 x 2 38 6.5 140 140 112 35.5 35 27 19 27 16 34 35 100 160 43 100 17 110 279 18 140 197 M16 x 2 M33 x 2

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

Vacuum Pad

Product specifications Pad diameter Mounting thread size Buffer body material Brass Steel Brass Steel Brass Steel Nut tightening torque ZP2-F (40/50) H ZP2-F (40/50) HB M18 x 1.5 28 to 32 Nm 48 to 52 Nm 45 to 50 Nm 75 to 80 Nm 45 to 50 Nm 75 to 80 Nm JB JF JB JF JB JF 40, 50 ZP2-F (63/80) H ZP2-F (63/80) HB ZP2-F (100/125) H ZP2-F (100/125) HB 63, 80 M22 x 1.5 100, 125 M22 x 1.5 Time of

CL

Lock-up direction 2.3mm 3mm 200mm/s Lock-up Unit Style 40 50 63 80 100 Bore size (mm) CL-40 CL-50 CL-63 CL-80 CL-100 Lock up unit part No.

Combination Cylinder

80 e 43 52 52 65 65 f 15 15 17.5 21.5 21.5 h 59 66 66 80 81 H 51 58 58 71 72 ZZ 223 245 262 305 324 ZZ 215 237 254 296 315 l MGP 40 50 63 80 100 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 3/8 3/8 1/2 1/2 27 30 31 37 40 42 46 48.5 55 56.5 11 10 13 15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 60 70 86 102 116 9 9 11.5 13.5 13.5 12 12 15 18 18 80 90 105

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

52 80 59 10 213 207(221) 229 100 62 80 71 7 ( ): Denotes the dimensions for long strokes.

Air Cylinder

, 100 80, 100 @0 !

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-B59W Same side 75 115 115 115 130 140 150 1 pc. 15 Different sides 35 80 80 95 2 pcs.

CNA

CNA63 or more 0.3MPa Graph x m 0.4MPa Graph c F 0.5MPa Graph v Load along rod retracted or extended direction m 0.3MPa Graph b F 0.4MPa Graph n m 0.5MPa Graph m F 3.3-6 How to Select Series CNA Selection Graphs Graph b Graph x 0.3MPa P < 0.4MPa 0.3MPa P < 0.4MPa 1000 1000 500 400 300 500 400 300 100 100 100 80 80 80 200 200 100 100 100 63 63 63 CL 80 80 80 50 50 50 40 40 40

MGG

Not required for 80, 100 Replacement parts: Seal kits Bore size (mm) 20 25 32 40 50 63 80 100 Seal kit no.

Rotary Actuator

Size Current model [kg] Reduction rate [%] CRA1 [kg] Angle adjustable type 30 50 63 80 100 0.3 10 0.27 Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 1.5 13 1.3 D50 to 100 50 to 100 Rotating angle 2.5 12 2.2 90, 180, 100, 190 90, 180, 100, 190 4.3 10 3.9 8.5 14 7.3 With solenoid valve Size: 50, 63, 80, 100 Size: 50, 63, 80, 100 Mounting interchangeable with the current model 50 to 100 50 to

Aluminum High Vacuum Angle Valve

Seal material Symbol Nil FKM EPDM Barrel Perfluoro Seal material 1349-80 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Compound No.

CG1

62 f 16 17 17 17 17 18 10 7 h 55 62 62 70 78 78 80 80 IJ 27 32 38 48 59 72 59 71 JH (14.5) (17.5) (19.5) (22.5) (25) (25) 11 11 11 12 13 13 M5 M6 X 0.75 M8 X 1.0 M10 X 1.25 M12 X 1.25 M14 X 1.5 20 25 32 40 50 63 80 100 Bore (mm) S ZZ 70 70 72 80 95 95 140 150 152 180 211 211 20 25 32 40 50 63 0.25 stroke The minimum stroke for rod boot equipped style is 20mm.