Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) D-A93 12 16 to 25 A B W A B W D-M9B/M9N 12 16 to 25 A B W A B W B D-A93 B D-M9B/M9N/M9P Bore size (mm) A 11.5 W 4 A 15.5 W 5.5 12 16 20 25 0.5 4.5 12 0 4.5 16 4 6 16 3.5 1 20 7.5 2.5 17 5.5 -1 21 9.5 0.5 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

Rack & Pinion Type Rotary Actuator Series 11-CRA1-Z Size: 30, 50 RoHS How to Order 11 Vacuum suction type Clean series Nil Auto switch No D Built-in magnet B Mounting Basic L Foot Shaft type S Single shaft W Double shaft 30 Size 50 11 C D R A 1 B S 50 90 Z M9B Rotating angle Number of auto switches 90 180 100 90 180 100 190 Nil S 2 pcs. 1 pc. 190 Type of auto switch (For model with auto switch

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Side tapped mounting [1/N1] Through-holes in open/close direction [2/N2] 4 x MM through Thread for mounting attachment C C B A 4 x H through Hole for mounting attachment S S O O B A (mm) (mm) MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 C 2 2.5 4 5 H 2.9 3.4 4.5 5.5 B 5.7 7 9 12 B 5.7 7 9 12 Model A 3 4 5 6 Model A 3 4 5 6 11221122112211221 N1

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

Operating pressure (MPa) 1778 Series VPA450/470 5 Port Air Operated Valve Flow Characteristics/Mass Port size Function Flow characteristics Mass (kg) 14/2(PA/B) 4/25/3(A/BEA/EB) Valve model b Cv b Cv 15 17 21 15 17 21 16 18 22 16 18 22 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1

Foot Pedal Type

Specifications Model Model XT34-60 XT34-67 Lock With lock Without lock Weight 0.8 kg 0.5 kg Fluid Air/Inert gas Operating pressure 0.15 to 0.9 MPa Ambient and fluid temperature 5 to 60C (No freezing) Flow-rate characteristics C [dm3/(sbar)] b Cv 1(P) 2(B)/4(A) 0.76 0.22 0.17 2(B)/4(A) 4(EB)/5(EA) 0.53 0.28 0.13 Lubrication Not required (Use turbine oil Class 1 ISO VG32, if lubricated) Port

Made to Order Specifications:

Port size Dimensions Dimensions A Connection HA B IN OUT AT IN OUT ID A B AMG AFF AM Drain Misc.

MXH

B MY CY 22 (20) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A CX D-A9V D-M9V D-F9WV D-X 20( ): Denotes the values of D-M9V, D-F9WV. 5(7) B W Data D-A9, D-A9V D-F9W, D-M9 D-F9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5

EXxx-OMO0027

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930 Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943 Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969 Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (9)EtherCAT communication cable PCA-1446566 Cable with M12 connector, D code

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (8)Ethernet communication cable PCA-1446566: Cable with M12 connector,

EXxx-OMY0006CN

. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2.

PFxx-OMU0002

[October 2017] B: Contents revised in several places. [July 2018] C: Contents revised in several places. [August 2019] D: Contents revised in several places.

Digital Flow Switch (Remote type sensor unit)

B: Contents revised in several places. C: Contents revised in several places.

LV50-OMQ0002

The proof pressure is double the operating pressure range. -69No.LV50***-OMQ0002-G Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -70No.LV50***-OMQ0002-G Dimensions Note) The electrical

LFE-OMZ0011

The proof pressure is double the operating pressure range. -70No.LFE*-OMZ0011 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out of range -71No.LFE*-OMZ0011 Dimensions Note) The electrical entry

LFE-OMZ0013

Approx. 1.00 mm Colours Brown, blue, black, white, grey Sheath Material Heat and oil resistant plastic Finished O.D. 3.5 mm -63No.LFE*-OMZ0013 Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow [L/min] Model B Minimum Maximum A LFE1 0.5 20 LFE2 2.5 100 Flow rate 0 Minimum Maximum rated flow LFE3 5 200 rated flow Out

IZ-OMU0031-CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

DO NOT k i id hi d l h b i d HRX-OM-O021 Chapter 1 Safety Instructions 1.3.4 Locations of Hazard Labels There are various warning labels on the product to show the potential hazards.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2