Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: F (G), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: Flow Adj.

Stations: 03 (3 Stations), Supply/Return Unit Layout: D (U Side: Open; D Side: Open), Thread Type: F (G), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: Flow Adj.

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV8 (1/2 Inch Face Seal, Male), Connections, Outlet: MV8 (1/2 Inch Face Seal, Male), Gauge

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: MV6 (3/8 Inch Face Seal, Male), Connections, Outlet: MV6 (3/8 Inch Face Seal, Male), Gauge

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: 15 μin. (0.4 μm), Standard, Ports: 4PW [4 Ports (1-In; 2-Out; 3-Gauge Port In; 4-Gauge Port Out)], Connections, Inlet: TW6 (3/8 Inch Tube Weld), Connections, Outlet: TW6 (3/8 Inch Tube Weld), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Hastelloy® C-22; Nozzle: 316L SS), Surface Finish: M [10 μin. (0.25 μm)], Ports: 3PW [3 Ports (1-In; 2-Out; 4-Gauge Port Out)], Connections, Inlet: MV4 (1/4 Inch Face Seal, Male), Connections, Outlet: MV4 (1/4 Inch Face Seal, Male), Gauge Port, Inlet: 0 (No

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4T (1/4 Inch Compression), Connections, Outlet: 4T (1/4 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 6T (3/8 Inch Compression), Connections, Outlet: 6T (3/8 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet

Delivery Pressure: 06 [2 to 60 psig (0.014 to 0.4 MPa)], Material: S (Body; 316 SS; Poppet; 316 SS; Diaphragm: Hastelloy® C-22 ), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 8T (1/2 Inch Compression), Connections, Outlet: 8T (1/2 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Presure Gauge, Connections: 1/

Pressure Specifications: 1 [-101 to 10kPa (for vacuum)], One-touch Fitting Type: 06 (ø6mm, KJH06-M5), Option, Case Holder: B (With PPA-B), Unit Specification: M (Fixed in SI Unit)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specifications: ES (Out: PNP; Func: Analog Voltage Ouput <-> External Input)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specifications: CS (Out: NPN; Func: Analog Voltage Output <-> External Input)

Rated Flow Range: 06 (60 to 6000 l/min), Thread Type: N (NPT), Port Size: 14 (1 1/2), Output Specifications: DS (Out: NPN; Func: Analog Current Output <-> External Input)