SMC Corporation of America
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Search Results "PFM510S-N01-1-W"

0 @1 r ye t !4 !7 !3 wu !8 @0 @2 @3 !6 q !5 !9 i *1 *1 C95K32 A A-A A !2 !

1 4 Note 1) Above figure is for D-A73/A80.

3 w @4 @3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !6 !7 !8 !1 @1 !2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

1 Parts list No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.

U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

o trtvzgzto "' J 9 4l|_\lb, 4l/_t_\lF FrpFr-*--lF, Base mounted type I Nvz33m N\a23340 FF ^.1T2-hn* ""rrr-h--w @ l / n r r n r \ 1 s @ 1 / t , , , 1 , \ t E E -FjFF--"lFt\Nzy2l Nvz3440 ".rnun n "^rriiTrnv t r E { / , l l , l t . \ t E \ r E l h t 1 , l , \ 1 r u . . . i F n : _ * w wz352o r.rvzgslT qTniin-Th^ qrzrti\-nv ?

W Mounting orientation: Horizontal Operating pressure: 0.5MPa Allowable Lateral Load at Rod End Standard type: MQQTB Lateral load resisting type: MQQLB/Built-in ball bushing 60 5 50 Maximum allowable lateral load W(N) Maximum allowable lateral load W(N) 4 28 40 3 28 25 30 25 2 20 20 20 16 16 1 10 10 10 30 60 75 100 30 60 75 100 Stroke (mm) Stroke (mm) Note 1) The indicated allowable lateral

U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

U RL ht t p: //w w w . sm cw orl d. com 4141, Sot okanda, Chi yodaku, Tokyo 1010021 J APAN Tel : +81 3 5207 8249 Fax: +81 3 5298 5362 1 Saf et y i nst ruct i ons These saf et y i nst ruct i ons are i nt ended t o prevent a hazardous si t uat i on and/or equi pm ent dam age.

Make sure not to plug the exhaust port R. 1 8 VK3140 Base mounted 1 8 130 (with sub-plate) VK3140Y (For low wattage 2 W DC) 0.50 0.12 0.11 0.48 0.19 0.12 Plug position B port N. C. A port N. O.

: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ Accessory Dimensions MI W S Rod end nut (mm) CEP1 d: Thread nominal size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1 M8 x 1.25 M10 x 1 M10 x 1.25 M10 x 1.5 M12 x 1.25 M12 x 1.5 M12 x 1.75 M14 x 1.5 M16 x 1.5 M16 x 2 M18 x 1.5 d: Thread nominal size M20 x 1.5 M20 x 2.5 M22 x 1.5 M24 x 1.5 M24 x 2 M24 x 3 M26 x 1.5 M27 x 1.5

As a rule, after the rod bottoms out, back off 1 to 2 turns.

port Unlocked when pressurized Rc(PT)P Front cylinder port GD GC GR GL W GL 1 GE ??

Grommet type (G) Rated voltage DIN terminal (D) Part no. symbol W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light No.1 Coil Coil S Varistor Varistor No.2 AC No.1 Varistor Neon light None Coil Z How to Calculate the Flow Rate No.2 No.1(+) Caution Red(+) For obtaining the flow rate, refer to front matter.

53 182 95 23 5 132 169 144 40 18.5 130 74 M16 x 1.5 to 1200 With rod boot (mm) (mm) Stroke range (mm) Bore size (mm) 125 140 160 Bore size (mm) 125 140 160 l ZZ1 N P S H W ZZ h 1/5 stroke 35 1/2 98 110 345 30 to 1000 133 368 1/5 stroke 35 1/2 98 110 345 30 to 1000 133 368 8 1/5 stroke 39 3/4 106 120 388.5 30 to 1200 141 409.5 9 5 Cylinder with Lock Double Acting: Single Rod Series CLS

1 u !4 t w e !5 Rod end male thread CHQB32 to CHQB100 r o !0 y q !2 !1 !4 u t !3 e w !5 Rod end male thread Description Material Note Parts List Replacement Parts: Seal Kit No. Bore size (mm) Seal kit no.

y q e (EB) 3 (EA) 5 (P) 1 t 2 position double JIS Symbol 2 position double (A) (B) 4 2 q w y u r (P) 1 (EB) 3 (EA) 5 t 3 Position Closed center / Exhaust center / Pressure center JIS Symbol 3 position closed center (A) (B) 4 2 q w y u r 3 position exhaust center 3 position pressure center (EB) 3 (EA) 5 (P) 1 t (This figure shows a closed center type.)