CLQ

20 25 27 31 39.2 43.2 18 20 8 10 16 20 18.5 22.5 9 10 4.5 5 Rod end nut L1 9-10-15 15 Series CLQ Dimensions: 32 Both ends tapped style: CLQA32 16 3.2 2 x 4-M5 x 0.8 16 3.2 Basic style (Through-hole): CLQB32 Extension locking LOCK 31.5 (unlocks when pressurized) 7.5 42.5 22.5 Rc 1/8 Rod side cylinder port Rc 1/8 Rc 1/8 unlocking port M8 x 1.25 (Effective thread depth 13) Head side cylinder

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0.3 Note 1) 10-32UNF has the same specification as M5.

MQQ

16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5 32 20.5 38 32 For details on rod end nut and mounting nut, refer to page 10-5-24. 10-5-20 20 Low Friction Cylinder: Anti-lateral Load Type Metal Seal Series MQM For other

MQQ

2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7 8 15 6 65 101 18.5 28 16 11 20 16 16 M14 x 1 15 M5 x 0.8 5 M5 x 0.8 10 15 6 74 114 22 30 22 12 21 19.5 20 M20 x 1.5 18 Rc 1/8 8 M8 x 1.25 13 25 8.5 97.5 151 31.5 40.5 28.5 20.5 33 29 25 M26 x 1.5 18 Rc 1/8 10 M10 x 1.25 13 30 8.5 102.5 160 34.5 44.5

Air Slide Table Series MXP

Nil 6 5, 10 S 1 pc. 8 10, 20 n n pcs. In the case of MXP6-5, with 2 auto switches are available for DM9 type and D-M9V type only.

S Couplers Series KK/KKH/KK13

KK2P-23E -04E -06E KK3P-04E -06E -08E -10E KK4P-06E -08E -10E -12E KK6P-12E -16E KK2S-23E -04E -06E KK3S-04E -06E -08E -10E KK4S-06E -08E -10E -12E KK6S-12E -16E 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 166 S Couplers Series KK Specifications K M Fluid Air, Water KK2: 100 kPa to 1 MPa KK3: 90 kPa to 1 MPa KK4/6: 0 to 1 MPa H Operating

Stopper Cylinder

2 20 20 10 10 10 5 4 3 4 5 3 4 5 3 2 2 2 1 1 1 1 5 10 20 10 5 1 20 30 10 5 1 20 30 Transfer speed (m/min) Transfer speed (m/min) Transfer speed (m/min) Lever-type weight of transferred object and transfer speed graphs (graphs (2) and (3)) show the values at room temperature (20 to 25C).

Large Size Vacuum Module: Series ZR

Example) ZR1--CN(-Q) . 1 pc. ZS-10-5A-50 . 1 pc.

0.55

Tightening Torque of Mounting Screw Symbol 1 2 VP344 1/8 1/4 VP544 1/4 3/8 VP744 3/8 1/2 9 Gasket HNBR VP700-217-1 VP300-217-1 VP500-217-1 VP300-202-l VP700-202-l VP500-202-l 10 Sub-plate Aluminum die-casted M3: 0.8 Nm M4: 1.4 Nm M5: 2.9 Nm Hexagon socket head bolt (1 pc.)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Note MXP6-5 MXP-AD6-5 MXP6-10 MXP10-10 MXP-AD10-10 With magnet and MXP10-20 MXP-AD10-20 mounting screw MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 MXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. 8-8-11 11 Series MXP Construction MXP6 @1 @0 @2 !2 !1 t e y !9 !8 !7 r !4 !6 u !5 !0 !

CJ5-S

Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CJ5-S

Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

SZ3000

Station 10 SOL.A SOL.A 10 10 Light/Surge voltage suppressor Light/Surge voltage suppressor 15 15 15 SOL.B SOL.B SOL.B Station 2 Station 2 Station 2 2 2 SOL.A SOL.A SOL.A Light/Surge voltage suppressor Light/Surge voltage suppressor Light/Surge voltage suppressor 2 SOL.B SOL.B SOL.B 14 Station 1 Station 1 14 14 Station 1 SOL.A SOL.A SOL.A 1 1 1 Light/Surge voltage suppressor Light/Surge voltage

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Process Valve Series VNA

(Non-locking push type) Pilot port 12(P1), 10(P2) Port size: refer to table below Main port 1 (Back side port 2) Port size: refer to table below Main port 1, 2 Pilot port 12(P1), 10(P2) A K B L C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 229.5 (215.5) 247 (233) 270 (256) 105 120 140 197 214.5 237.5 77 96 113 55 63 74 53 60 74 26.5 30 37 120.5 137 160 20 24

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VV5FR4-10-1-, VV5FR4-10-2 VV5FRA4-10-061-031 pc. VFRA41115 pcs. VVFS4000-10A1 pc.

0.

VQZ100 / How to Order Valve C4 Series VQZ 1 5 1 5 M 1 CE compliant CE marked Nil Q 1 VQZ100 body width 10 mm Note) For CE compliant models, DC type only. Type of actuation 1 N.C.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

body ZF ZP SP ZFB ZCUK Universal joint type Unrestricted 360 piping tube mounting 4, 6 4: 10 AMJ 8, 10 6: 30 P.1108 30 With one-touch fitting AMV 8: 50 3/16", 1/4" Light and compact molded resin parts 10: 75 AEP 3/8", 1/2" HEP Related Equipment ZFC 2, 3.2 2 : 2 IN/OUT straight piping 4, 6, 8 In-line type 3.2: 7 With one-touch fitting 4 : 10 P.1 10 Light and compact molded resin parts

Fieldbus system EtherNet/IP TM compatible SI Unit

Unit 1 -10..10 V -5..5 V -20..20 mA 0..10 V Selects the analogue input range. -10..10 V Channel 2 Analogue input range Sets the analogue input device range. 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sets analogue data type which is output to PLC. 2s complement 2s complement.

240

[Nm] Roll moment [Nm] 388 Step Motor (Servo/24 VDC) Electric Actuator Miniature Slide Table Type LEPS Series LEPS6, 10 How to Order LEPS 10 K 50 1 1 R 6N q w e r t y u i o !