SMC Corporation of America
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D-MS-A Mounting screw (M2.5 x 4 L, Steel (Black zinc chromate)) 1 pc. D-MS-AP Mounting screws (M2.5 x 4 L, Steel (Black zinc chromate)) 10 pcs. D-MS-B Mounting screw (M2.5 x 4 L, SUS) 1 pc. D-MS-BP Mounting screws (M2.5 x 4 L, SUS) 10 pcs. ISA-2-1 DIN rail (Width 35 mm x Length 105 mm) 1 pc. ISA-2-2 DIN rail (Width 35 mm x Length 140 mm) 1 pc.

(This detection is "H/L reference " only. "Pulse Input Method" cannot be detected.) When the first SVON input is ON during the pulse inputting, the H/L reference cannot be detected.

Checks and Maintenance 6.1 Specifications erature bowlItem Specification Outlet air pressure dew point 10 o C IDH410 IDH4 20 IDH A 423 Rated performance IDH6 10 ) release bushOutlet air temp IDH 6 20 IDHA 6 23 (2) Mounting of the bowl assembly Note 1 ) 2) ir flow capacity 400 L/min ANR Operating range Fluid Compressed air Amount of air processed 100 to 5 00L/min ( 600 L/min ANR Inlet

The allowable voltage fluctuation is -15% to +5% of the rated voltage for the 115 VAC or 230 VAC. *2 Type Y is a DIN terminal conforming to EN-175301-803C former DIN43650C. *3 When the electrical entry is DO or YO, light/surge voltage suppressor cannot be selected. -20- Manual operation AV L 2 0 A AV L 2 0 1 G A with solenoid valve Applicable size Symbol Description AVL AVL AVL AVL 2000 3000

AF-OMX0053-B PRODUCT NAME Mist Separator MODEL / Series / Product Number AFM20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AFM30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AFM40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2. Application 8 3. Standard Specifications 8 4. How to Order 9 5.

. -20No.PF-OMJ0016-J Specification Specifications Model PFM510 PFM525 PFM550 PFM511 Applicable fluid Dry air, N2, Ar, CO2 (air quality class to ISO8573-1 1.1.2 to 1.6.2) Dry air, N2, Ar 0.2 to 10 L/min 0.5 to 25 L/min 1 to 50 L/min 2 to 100 L/min Rated flow range CO2 0.2 to 5 L/min 0.5 to 12.5 L/min 1 to 25 L/min 2 to 50 L/min Accuracy 3%F.S. max. Repeatability 1%F.S. max.

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 12 Position for application of grease Table 9 Amount of grease A units: g Stroke 32 40 50 63 80 100 125 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 15 to 17 50st added 1 1 1 1.5 2 3 3 28 3-2-4.

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

Lube unit: Series ALDU Strainer Series INA Main line filter Series AFF Solenoid valve Metal seal Regulator Series AR Air cylinder Air tool Air dryer Series IDF How to read graph Solenoid valve Rubber seal With the flow rate set to 250 l/min(ANR) and the pressure differential set to 0.05MPa, by changing the flow rate to 3800 l/min(ANR) and 6000 l/min(ANR), the pressure differential will change

ON OFF IN SMC OUT R 7 Spacer L type bracket Spacer with L type bracket T type bracket Spacer with T type bracket Spacer with L type bracket Spacer with T type bracket T type bracket L type bracket L type bracket Spacer with L type bracket Applicable model T type bracket Spacer with T type bracket Applicable model Applicable model Model Y20T AV2000 B210T Y20L AV2000 AV2000 Y20 B210L Y30T AV3000

Air Cylinder/Low Friction Series MBlQ 32, 40, 50, 63, 80, 100 How to Order MB L Q F 32 50 Standard MDB L F 32 50 Q A53 With auto switch Built-in magnet Number of auto switches S 3 n 2 1 3 n Mounting Basic/Without bracket Axial foot Front flange Rear flange Single clevis Double clevis Center trunnion B L F G C D T Bore size 32mm 40mm 50mm 63mm 80mm 100mm 32 40 50 63 80 100 Auto switch/Tie

02S 2 R R L C VHK 04F 04F Flame resistant type Flame resistant cover Nil No Bracket Valve model With cover (For One-touch fitting only) L Nil With L-bracket None C 2 port valve 2 3 port valve 3 Flame resistant type Bracket and screws are attached. 1(P) port size 4 04F 1(P) nob color 6 06F Gray Nil (Standard) Blue 2 port valve 3 port valve 2(A) port size 8 08F 10 10F 4 04F Red R (Option)

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

L R L R L R L R L R L R Glass q w e Stainless steel Stainless steel Cross recessed round head screw Brass Stainless steel r t Stub 3.8-2 ISA Specifications Fluid Dry air (Filtered through a 5m filter) Operating pressure range 0.05 to 0.2MPa Recommended pressure range 0.1 to 0.2MPa Detection zone 10 to 300 m Repeatability including temperature characteristics 10m (for 0 to 60C on the basis

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 With neon light (110 VAC, Green) Flow range ZSP 3 With neon light (220 VAC, Red) Low flow setting possible (1 l/min) 10 1 to 10 l/min 4 With neon light (220 VAC, Green) 20 10 to 20 l/min Simple flow setting Without removing the cover, you can set

16 11 13 11 Vacuum supply port 3.3 Gasket Vacuum supply port 3.3 Gasket 16-6-12 7 Compact Pressure Switch Series ZSE2/ISE2 01 T1 Dimensions: ISE2Grommet type: ISE2-15 01 T1 01 T1 Connector type: ISE2-15C Pressure setting trimmer Pressure setting trimmer L H SET L H SET 15 15 ZSE ISE Indicator light (Red) Indicator light (Red) 20 20 PSE Z I SE3 600 (3000) PS 600 (3000) Z I SE1 2 Courtesy

Stainless Steel (mm) A B C D E F G H J L Bracket part no.

Cover A Case Cover A Case O L L Element O-ring Window 3) Pull cover A out of the case and remove the element. Remove dust and other debris remaining inside the case by blowing it out with air, etc.

bracket) are included with the above parts. 3 Direct Operated 2 Port for Heated Water Series VCB Dimensions Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G1/2 C R R E E B A H 2-P Port size 2-P A 2-M Thread depth N B H Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G1/2 E B A H D 2-P Port size (S) 2-M Thread depth N L K (mm) Electrical entry P Port